MEMS gyroscope for determining rotational movements about an x, y, and/or z axis
First Claim
1. A gyroscope comprising:
- a substrate;
at least two driving masses that are arranged on the substrate and radially oscillate relative to a central point;
a first drive element coupled to a first driving mass of the at least two driving masses, the first drive element causes radial oscillating vibration of the first driving mass in order to generate Coriolis forces on the first driving mass in a first event of rotation of the substrate about a first axis of the gyroscope;
a second drive element coupled to a second driving mass of the at least two driving masses, the second drive element causes radial oscillating vibration of the second driving mass in order to generate Coriolis forces on the second driving mass in a second event of rotation of the substrate about a second axis of the gyroscope;
synchronization springs that link the first and second driving masses and cause the radial oscillating vibrations of the first and second driving masses to occur in synchrony with each other;
a first sensor element that detects displacement of the first driving mass in response to the Coriolis forces on the first driving mass in the first event of rotation of the substrate about the first axis; and
a second sensor element that detects displacement of the second driving mass in response to the Coriolis forces on the first driving mass in the first event of rotation of the substrate about the second axis.
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Accused Products
Abstract
The invention relates to a MEMS gyroscope for detecting rotational motions about an x-, y-, and/or z-axis, in particular a 3-D sensor, containing a substrate, several, at least two, preferably four, drive masses (2) that are movable radially with respect to a center and drive elements (7) for the oscillating vibration of the drive masses (2) in order to generate Coriolis forces on the drive masses (2) in the event of rotation of the substrate about the x-, y-, and/or z-axis. The oscillating drive masses (2) are connected to at least one further non-oscillating sensor mass (3) that however can be rotated about the x-, y-, and/or z-axis together with the oscillating drive masses (2) on the substrate. Sensor elements (9, 10) are used to detect deflections of the sensor mass (3) and/or drive masses (2) in relation to the substrate due to the generated Coriolis forces. At least two, preferably four anchors (5) are used to rotatably fasten the sensor mass (3) to the substrate by means of springs (4).
21 Citations
18 Claims
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1. A gyroscope comprising:
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a substrate; at least two driving masses that are arranged on the substrate and radially oscillate relative to a central point; a first drive element coupled to a first driving mass of the at least two driving masses, the first drive element causes radial oscillating vibration of the first driving mass in order to generate Coriolis forces on the first driving mass in a first event of rotation of the substrate about a first axis of the gyroscope; a second drive element coupled to a second driving mass of the at least two driving masses, the second drive element causes radial oscillating vibration of the second driving mass in order to generate Coriolis forces on the second driving mass in a second event of rotation of the substrate about a second axis of the gyroscope; synchronization springs that link the first and second driving masses and cause the radial oscillating vibrations of the first and second driving masses to occur in synchrony with each other; a first sensor element that detects displacement of the first driving mass in response to the Coriolis forces on the first driving mass in the first event of rotation of the substrate about the first axis; and a second sensor element that detects displacement of the second driving mass in response to the Coriolis forces on the first driving mass in the first event of rotation of the substrate about the second axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A gyroscope comprising:
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a substrate; a first pair of driving masses that are arranged on the substrate and radially oscillate in synchronized opposition to each other relative to a central point along a first axis of the gyroscope; a first drive element coupled to a first driving mass of the first pair of driving masses, the first drive element causes radial oscillating vibration of the first driving mass in order to generate Coriolis forces on the first driving mass in an event of rotation of the substrate about the first axis; a second drive element coupled to a second driving mass of the first pair of driving masses, the second drive element causes radial oscillating vibration of the second driving mass in order to generate Coriolis forces on the second driving mass in the event of rotation of the substrate about the first axis, the first and second drive elements being adapted to vibrate the first and second driving masses in synchronized opposition to each other; synchronization springs that link the first and second driving masses so that the radial oscillating vibrations of the first and second driving masses occur in synchrony with each other; a first sensor element that detects displacement of the first driving mass in response to the Coriolis forces on the first driving mass in the first event of rotation of the substrate about the first axis; and a second sensor element that detects displacement of the second driving mass in response to the Coriolis forces on the first driving mass in the first event of rotation of the substrate about the first axis. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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- 16. The gyroscope of 10 further comprising a third sensor element located above the first driving mass, the third sensor element comprising a plurality of capacitive plates that detect rotation of the substrate about a second axis of the gyroscope.
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18. A gyroscope comprising:
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a substrate; a first driving mass that is arranged on the substrate and radially oscillates relative to a central anchor along a first axis of the gyroscope; a second driving mass that is arranged on the substrate and radially oscillates relative to the central anchor along a second axis of the gyroscope that is ninety degrees from the first axis; a third driving mass that is arranged on the substrate and radially oscillates relative to the central anchor along the first axis; a fourth driving mass that is arranged on the substrate and radially oscillates relative to the central anchor along the second axis; a first drive element coupled to the first driving mass, the first drive element causes radial oscillating vibration of the first driving mass in order to generate Coriolis forces on the first driving mass in a first event of rotation of the substrate about the first axis; a second drive element coupled to the second driving mass, the second drive element causes radial oscillating vibration of the second driving mass in order to generate Coriolis forces on the second driving mass in a second event of rotation of the substrate about the second axis; synchronization springs that link the first, second, third and fourth driving masses so that radial oscillating vibrations of the third and fourth driving masses occur in synchrony with the radial oscillating vibrations of the first and second driving masses, the radial oscillating vibrations of the first and third driving masses occur in synchronized opposition to each other, and the radial oscillating vibrations of the second and fourth driving masses occur in synchronized opposition to each other; a first sensor element that detects displacement of the first driving mass in response to the Coriolis forces on the first driving mass in the first event of rotation of the substrate about the first axis; a second sensor element that detects displacement of the second driving mass in response to the Coriolis forces on the second driving mass in the second event of rotation of the substrate about the second axis; a third sensor element that detects displacement of the third driving mass in response to the Coriolis forces on the third driving mass in the first event of rotation of the substrate about the first axis; and a fourth sensor element that detects displacement of the fourth driving mass in response to the Coriolis forces on the fourth driving mass in the second event of rotation of the substrate about the second axis.
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Specification