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Systems and methods for extracting system parameters from nonlinear periodic signals from sensors

  • US 9,910,062 B2
  • Filed: 06/26/2015
  • Issued: 03/06/2018
  • Est. Priority Date: 06/26/2014
  • Status: Active Grant
First Claim
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1. An inertial device, comprising:

  • a first structure including a first plurality of sub-structures arranged along a first axis;

    a second structure including a second plurality of sub-structures arranged along the first axis, the second structure configured to;

    move relative to the first structure and primarily along a second axis that is approximately perpendicular to the first axis and approximately perpendicular to a plane of the inertial device that is approximately parallel to a surface of a semiconductor wafer from which the inertial device is fabricated; and

    enable monotonic motion of the second structure along the second axis to cause a reversal in a direction of a current between the first and second structures; and

    a sensor configured to generate an output voltage based on the current.

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