Systems and methods for extracting system parameters from nonlinear periodic signals from sensors
First Claim
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1. An inertial device, comprising:
- a first structure including a first plurality of sub-structures arranged along a first axis;
a second structure including a second plurality of sub-structures arranged along the first axis, the second structure configured to;
move relative to the first structure and primarily along a second axis that is approximately perpendicular to the first axis and approximately perpendicular to a plane of the inertial device that is approximately parallel to a surface of a semiconductor wafer from which the inertial device is fabricated; and
enable monotonic motion of the second structure along the second axis to cause a reversal in a direction of a current between the first and second structures; and
a sensor configured to generate an output voltage based on the current.
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Abstract
Systems and methods are disclosed herein for extracting system parameters from nonlinear periodic signals from sensors. A sensor such as an inertial device includes a first structure and a second structure that is springedly coupled to the first structure. The sensor is configured to generate an output voltage based on a current between the first and second structures. Monotonic motion of the second structure relative to the first structure causes a reversal in direction of the current.
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Citations
32 Claims
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1. An inertial device, comprising:
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a first structure including a first plurality of sub-structures arranged along a first axis; a second structure including a second plurality of sub-structures arranged along the first axis, the second structure configured to; move relative to the first structure and primarily along a second axis that is approximately perpendicular to the first axis and approximately perpendicular to a plane of the inertial device that is approximately parallel to a surface of a semiconductor wafer from which the inertial device is fabricated; and enable monotonic motion of the second structure along the second axis to cause a reversal in a direction of a current between the first and second structures; and a sensor configured to generate an output voltage based on the current. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of forming an inertial device from a semiconductor wafer, comprising:
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forming a first structure including a first plurality of sub-structures arranged along a first axis; forming a second structure including a second plurality of sub-structures arranged along the first axis, the second structure configured to; move relative to the first structure and primarily along a second axis that is approximately perpendicular to the first axis and approximately perpendicular to a plane of the inertial device that is approximately parallel to a surface of a semiconductor wafer; and enable monotonic motion of the second structure along the second axis to cause a reversal in a direction of a current between the first and second structures; and forming electrical connections from the first and second structures to a sensor configured to generate an output voltage based on the current. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification