Touch sensitive device with multiple ablation fluence values

• US 9,911,550 B2
• Filed: 03/04/2013
• Issued: 03/06/2018
• Est. Priority Date: 03/05/2012
• Status: Active Grant

• Current Assignee: Apple Inc.
• Original Assignee: Apple Inc.
• Inventors: Mohapatra, Siddharth, Kang, Sunggu, Zhong, John Z.
• Primary Examiner(s): NGUYEN, DUY T V
• Application Number:
  US13/784,749
• Publication Number:
  US 20130228442A1
• Time in Patent Office: 1,828 Days
• Field of Search: 438800, 257415
• CPC Class Codes: G06F 2203/04103 Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
• CPC Class Codes: G06F 3/0445 using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
• CPC Class Codes: G06F 3/0446 using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
• CPC Class Codes: H01H 11/00 Apparatus or processes specially adapted for the manufacture of electric switches processes specially adapted for manufacture of rectilinearly movable switches having a plurality of operating members associated with different sets of contacts, e.g. keyboards, H01H13/88
• CPC Class Codes: H03K 17/9622 using a plurality of detectors, e.g. keyboard
• CPC Class Codes: Y10T 29/49105 Switch making

Abstract

Processes for fabricating compact touch sensors for touch sensitive devices are disclosed. A process can include providing a touch sensor structure having a substrate, a first layer disposed on the substrate, and a second layer disposed on the first layer. The second layer can have an ablation fluence value that is lower than an ablation fluence value of the first layer. The process can include patterning the second layer with a laser emitting energy having a fluence value greater than or equal to the ablation fluence value of the second layer and less than the ablation fluence value of the first layer. The process can further include etching at least a portion of the first layer that was exposed during the patterning of the second layer. At least a portion of the second layer can then be removed by etching or laser ablation.

Claims

1. A touch sensitive device comprising:

a substrate;

a first layer disposed on the substrate, the first layer including first touch sensing lines and second touch sensing lines, the first layer having a first ablation fluence value;

a first area of the first layer including;

the first touch sensing lines; and

a second area of the first layer located between outside the first area to outer edges of the substrate, the second area including;

the second touch sensing lines, and

a second layer disposed on the second touch sensing lines, the second layer comprising a plurality of conductive routing traces and having a second ablation fluence value, the plurality of conductive routing traces coupled to the second touch sensing lines,

wherein the second ablation fluence value is less than the first ablation fluence value,

wherein a spacing between adjacent conductive routing traces in the second area oriented along a direction is less than a spacing between adjacent first touch sensing lines in the first area oriented along the direction, and

wherein a size and location of an entire pattern of the second touch sensing lines in all of the second area are same as a size and location of an entire pattern of the plurality of conductive routing traces in all of the second area.

2. The touch sensitive device of claim 1, wherein the second ablation fluence value is between 60-100 mJ/cm².

3. The touch sensitive device of claim 1, wherein the first layer comprises indium tin oxide and the second layer comprises Ti.

4. The touch sensitive device of claim 2, wherein the first ablation fluence value is 2 J/cm².

5. The touch sensitive device of claim 1, wherein the substrate is undamaged.

6. The touch sensitive device of claim 1, wherein the second layer is a combination of layers.

7. The touch sensitive device of claim 1, wherein the second layer includes a metal.

8. The touch sensitive device of claim 1, wherein the second layer functions as a mask for patterning the first layer.

9. The touch sensitive device of claim 1, wherein the second layer is excluded from the first area.

10. The touch sensitive device of claim 1, wherein a pattern of the first layer is different than a pattern of the second layer in the first area.

11. The touch sensitive device of claim 1, wherein the second layer is patterned to form:

a plurality of rows; and

a plurality of strips along edges of the substrate that are connected to the plurality of rows.

12. The touch sensitive device of claim 1, further comprising:

a third layer located in the first and a second areas and having a third ablation fluence value; and

a fourth layer located in the second area and having a fourth ablation fluence value.

13. The touch sensitive device of claim 12, wherein the third and fourth layers are disposed on the substrate opposite the first layer.

14. The touch sensitive device of claim 12, wherein the fourth layer is disposed on the third layer, and the third layer is disposed on the substrate.

15. The touch sensitive device of claim 12, wherein the fourth ablation fluence value is less than the third ablation fluence value.

16. The touch sensitive device of claim 12, wherein the fourth layer comprises indium tin oxide, and the third layer comprises Ti.

17. The touch sensitive device of claim 12, wherein the fourth ablation fluence value is 2J/cm²and the third ablation fluence value is between 60-100 mJ/cm².

18. The touch sensitive device of claim 12, wherein a pattern of the third layer is same as a pattern of the fourth layer in the second area.

19. The touch sensitive device of claim 12, wherein the first layer is patterned to form a plurality of columns, and the third layer is patterned to form a plurality of rows that are at least substantially perpendicular to the plurality of columns.

20. The touch sensitive device of claim 12, wherein the fourth layer is a same material as the second layer.

21. The touch sensitive device of claim 12, wherein the fourth layer is a different material than the second layer.

22. The touch sensitive device of claim 1, wherein the first area is a viewable area, and the second area is a border area.