Semiconductor device and method for manufacturing the same

• US 9,911,858 B2
• Filed: 12/20/2011
• Issued: 03/06/2018
• Est. Priority Date: 12/28/2010
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Primary Examiner(s): Lee, Jae
• Application Number:
  US13/330,772
• Publication Number:
  US 20120161122A1
• Time in Patent Office: 2,268 Days
• Field of Search: 257 43, 257 57, 257296, 257 40, 257 59, 257 66, 257288, 257368, 257 71, 257 88, 257290, 257 52, 257 53, 257762, 257 79, 438104, 438151, 438158, 438197, 438 23, 438129, 438155, 438 30, 438479, 438585, 438 85
• CPC Class Codes: H01L 21/02554 Oxides
• CPC Class Codes: H01L 21/02565 Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
• CPC Class Codes: H01L 21/02631 Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A miniaturized semiconductor device including a transistor in which a channel formation region is formed using an oxide semiconductor film and variation in electric characteristics due to a short-channel effect is suppressed is provided. In addition, a semiconductor device whose on-state current is improved is provided. A semiconductor device is provided with an oxide semiconductor film including a pair of second oxide semiconductor regions which are amorphous regions and a first oxide semiconductor region located between the pair of second oxide semiconductor regions, a gate insulating film, and a gate electrode provided over the first oxide semiconductor region with the gate insulating film interposed therebetween. One or more kinds of elements selected from Group 15 elements such as nitrogen, phosphorus, and arsenic are added to the second oxide semiconductor regions.

Claims

1. A semiconductor device comprising:

a substrate; and

a transistor over the substrate, the transistor comprising;

an oxide semiconductor film comprising a first oxide semiconductor region and a pair of second oxide semiconductor regions;

a gate insulating film over the oxide semiconductor film; and

a gate electrode over the first oxide semiconductor region with the gate insulating film interposed therebetween,

wherein the first oxide semiconductor region is located between the pair of second oxide semiconductor regions,

wherein the first oxide semiconductor region comprises c-axis-aligned crystalline oxide semiconductor comprising indium, gallium, and zinc,

wherein the pair of second oxide semiconductor regions comprises an amorphous region, and

wherein proportion of the amorphous region in each of the pair of second oxide semiconductor regions is larger than proportion of an amorphous region in the first oxide semiconductor region.

2. The semiconductor device according to claim 1,

wherein the pair of second oxide semiconductor regions serve as a source region and a drain region, and

wherein the first oxide semiconductor region serves as a channel region.

3. The semiconductor device according to claim 1, wherein the oxide semiconductor film comprises tin.

4. The semiconductor device according to claim 1, wherein each of the pair of second oxide semiconductor regions comprises at least one kind of element selected from nitrogen, phosphorus, and arsenic.

5. The semiconductor device according to claim 4, wherein a concentration of the element in the pair of second oxide semiconductor regions is higher than or equal to 5×

10¹⁸ atoms/cm³ and lower than or equal to 1×

10²² atoms/cm³.

6. The semiconductor device according to claim 1, wherein the gate electrode overlaps with only the first oxide semiconductor region.

7. The semiconductor device according to claim 1, further comprising:

a source electrode and a drain electrode between the oxide semiconductor film and the substrate, the source electrode and the drain electrode being electrically connected to the pair of second oxide semiconductor regions.

8. A semiconductor device comprising:

a substrate; and

a transistor over the substrate, the transistor comprising;

a gate electrode;

a gate insulating film over the gate electrode; and

an oxide semiconductor film comprising a first oxide semiconductor region and a pair of second oxide semiconductor regions over the gate insulating film,

wherein the first oxide semiconductor region is located between the pair of second oxide semiconductor regions,

wherein the first oxide semiconductor region comprises c-axis-aligned crystalline oxide semiconductor comprising indium, gallium, and zinc,

wherein the pair of second oxide semiconductor regions comprises an amorphous region, and

wherein proportion of the amorphous region in each of the pair of second oxide semiconductor regions is larger than proportion of an amorphous region in the first oxide semiconductor region.

9. The semiconductor device according to claim 8,

wherein the pair of second oxide semiconductor regions serve as a source region and a drain region, and

wherein the first oxide semiconductor region serves as a channel region.

10. The semiconductor device according to claim 8, wherein the oxide semiconductor film comprises tin.

11. The semiconductor device according to claim 8, wherein each of the pair of second oxide semiconductor regions comprises at least one kind of element selected from nitrogen, phosphorus, and arsenic.

12. The semiconductor device according to claim 11, wherein a concentration of the element in the pair of second oxide semiconductor regions is higher than or equal to 5×

10¹⁸ atoms/cm³ and lower than or equal to 1×

10²² atoms/cm³.

13. The semiconductor device according to claim 8, further comprising:

a source electrode and a drain electrode over the pair of second oxide semiconductor regions, the source electrode and the drain electrode being electrically connected to the pair of second oxide semiconductor regions, and

an insulating film over and in contact with the first oxide semiconductor region, the insulating film overlapping with the gate electrode.

14. The semiconductor device according to claim 13, wherein the insulating film does not overlap with the pair of second oxide semiconductor regions.

15. The semiconductor device according to claim 8,

wherein each of the pair of second oxide semiconductor regions further comprises a crystalline region.