Methods and systems for micro machines

• US 9,912,257 B2
• Filed: 10/10/2014
• Issued: 03/06/2018
• Est. Priority Date: 06/02/2006
• Status: Active Grant

• Current Assignee: MicroZeus, LLC
• Original Assignee: MicroZeus, LLC
• Inventors: Stalford, Harold L.
• Primary Examiner(s): KENERLY, TERRANCE L
• Application Number:
  US14/512,176
• Publication Number:
  US 20150061456A1
• Time in Patent Office: 1,243 Days
• Field of Search: 310309, 310 40 MM
• CPC Class Codes: B81B 2201/035 Microgears
• CPC Class Codes: B81B 2201/037 Microtransmissions
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: F03G 7/065 using a shape memory element
• CPC Class Codes: F16C 2223/60 by vapour deposition, e.g. PVD, CVD in general C23C14/00
• CPC Class Codes: F16C 2223/70 by electroplating or electrolytic coating, e.g. anodising, galvanising in general C25D
• CPC Class Codes: F16C 33/20 Sliding surface consisting mainly of plastics F16C33/22 - F16C33/28 take precedence
• CPC Class Codes: F16C 33/201 Composition of the plastic
• CPC Class Codes: F16C 33/208 Methods of manufacture, e.g. shaping, applying coatings
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H02N 10/00 Electric motors using thermal effects motors using expansion or contraction of bodies due to heating or cooling F03G7/06
• CPC Class Codes: H02N 11/006 Motors

Abstract

A micro machine may be in or less than the micrometer domain. The micro machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft is operable to be driven by the micro actuator. A tool is coupled to the micro shaft and is operable to perform work in response to at least motion of the micro shaft.

Claims

1. A micro machine in or less than the micrometer domain, comprising:

a substrate;

a micro actuator;

a micro shaft coupled to the micro actuator, wherein the micro shaft is in-plane with the substrate;

the micro shaft operable to be driven by the micro actuator;

a transmission system coupled to the micro shaft, wherein a lateral movement of the transmission system causes a rotation motion of the micro shaft;

a bearing coupled to the micro shaft and operable to move out-of-plane with the substrate to support the rotation motion of the micro shaft; and

a tool coupled to the micro shaft and operable to perform work in response to at least motion of the micro shaft.

2. The micro machine of claim 1, wherein the micro machine comprises a micro vehicle.

3. The micro machine of claim 1, wherein the micro machine comprises a micro blender.

4. The micro machine of claim 1, wherein the actuator comprises a plurality of thermal actuators in tandem configuration.

5. The micro machine of claim 1, further comprising a micro transmission coupled to the micro actuator and the micro shaft.

6. The micro machine of claim 1, further comprising a processor operable to control the micro machine.

7. The micro machine of claim 1, further comprising a sensor operable to gather processing information from a component or operation of the micro machine.

8. A micro machine, comprising:

a substrate;

a micro actuator fabricated on the substrate;

a micro shaft fabricated on the substrate;

the micro shaft coupled to the micro actuator;

the micro shaft operable to be driven by the micro actuator;

a transmission system coupled to the micro shaft, wherein a lateral movement of the transmission system causes the rotation motion of the micro shaft;

a bearing coupled to the micro shaft, wherein the micro shaft is in-plane with the substrate, and the bearing is operable to move out-of-plane with the substrate to support the rotation motion of the micro shaft;

a tool fabricated on the substrate; and

the tool coupled to the micro shaft and operable to perform work in response to at least motion of the micro shaft.

9. The micro machine of claim 8, the plurality of thermal actuators comprising a double configuration.

10. The micro machine of claim 8, further comprising:

a sensor disposed on the substrate;

the sensor operable to gather information from an operation of the micro machine;

a processor disposed on the substrate; and

the processor operable to process the information and control the micro machine.