Unreleased thermopile infrared sensor using material transfer method

• US 9,915,567 B2
• Filed: 06/28/2016
• Issued: 03/13/2018
• Est. Priority Date: 06/28/2016
• Status: Active Grant

• Current Assignee: Excelitas Technologies Singapore Pte., Ltd.
• Original Assignee: Excelitas Technologies Singapore Pte., Ltd.
• Inventors: Kropelnicki, Piotr, Marinescu, Radu M., Huminic, Grigore D., Karagoezoglu, Hermann, Chuan, Kai Liang
• Primary Examiner(s): Makiya, David J
• Assistant Examiner(s): Jo, Taeho
• Application Number:
  US15/194,753
• Publication Number:
  US 20170370779A1
• Time in Patent Office: 623 Days
• Field of Search: 2503384
• CPC Class Codes: G01J 2005/065 by shielding
• CPC Class Codes: G01J 5/024 Special manufacturing steps or sacrificial layers or layer structures
• CPC Class Codes: G01J 5/046 Materials; Selection of thermal materials
• CPC Class Codes: G01J 5/061 by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
• CPC Class Codes: G01J 5/12 using thermoelectric elements, e.g. thermocouples
• CPC Class Codes: H01L 31/09 Devices sensitive to infrared, visible or ultraviolet radiation H01L31/101 takes precedence
• CPC Class Codes: H01L 31/1804 comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/1828 the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
• CPC Class Codes: H01L 31/1856 comprising nitride compounds, e.g. GaN
• CPC Class Codes: H10N 10/01 Manufacture or treatment
• CPC Class Codes: H10N 10/17 characterised by the structure or configuration of the cell or thermocouple forming the device

Abstract

An unreleased thermopile IR sensor and method of fabrication is provided which includes a new thermally isolating material and an ultra-thin material based sensor which, in combination, provide excellent sensitivity without requiring a released membrane structure. The sensor is fabricated using a wafer transfer technique in which a substrate assembly comprising the substrate and new thermally isolating material is bonded to a carrier substrate assembly comprising a carrier substrate and the ultra-thin material, followed by removal of the carrier substrate. As such, temperature restrictions of the various materials are overcome.

Claims

1. An unreleased thermopile infrared sensor comprising:

a substrate having a bottom surface and a top surface;

a thermally isolating material disposed on at least a portion of the top surface of the substrate, the thermally isolating material having a bottom surface and a top surface; and

an ultra-thin material disposed on at least a portion of the top surface of the thermally isolating material;

wherein the thermally isolating material is stable at temperatures up to 450°

C., and

wherein the ultra-thin material is selected from materials having a thickness of less than or equal to 200 rim, and are deposited by methods requiring a heightened temperature of greater than 450°

C.

2. The unreleased thermopile infrared sensor of claim 1, wherein the thermally isolating material is selected from Parylene, benzocyClobutene (BCB), amorphous fluoropolymers, poly(methyl methacrylate), SU-8 photo-resists, and other polymers.

3. The unreleased thermopile infrared sensor of claim 1, wherein the ultra-thin material is selected from 2D materials.

4. The unreleased thermopile infrared sensor of claim 3, wherein the ultra-thin material is selected from the group consisting of grapheme, MoS₂, SnSe, black phosphorus (BP), thin poly-silicon, SiGe (silicon germanium), Ge (germanium), boron nitride (BN), group III-V compound semiconductors, group II-VI compound semiconductors, and combinations thereof.

5. The unreleased thermopile infrared sensor of claim 1, further comprising a second ultra-thin material disposed on at least another portion of the top surface of the thermally isolating material.

6. The unreleased thermopile infrared sensor of claim 1, wherein the substrate is selected from a silicon wafer, a CMOS wafer, a printed circuit board, or a flexible substrate that is unstable at temperatures in excess of 450°

C.

7. An unreleased thermopile infrared sensor comprising:

a Parylene material disposed between a 2D material based sensor and a substrate, wherein the Parylene material is stable at temperatures up to 450°

C., and the 2D material is deposited by methods requiring a heightened temperature of greater than 450°

C.

8. The unreleased thermopile infrared sensor of claim 7, wherein the substrate is selected from a silicon wafer, a CMOS wafer, a printed circuit board, or a flexible substrate that is unstable at temperatures in excess of 450°

C.

9. A method for fabricating an unreleased thermopile infrared sensor comprising:

(a) forming a substrate assembly by providing a substrate layer having a bottom surface and a top surface, and depositing a thermally isolating material layer on at least a portion of the top surface of the substrate layer;

(b) forming a carrier assembly by providing a carrier layer having a bottom surface and a top surface, optionally depositing a sacrificial layer on at least a portion of the top surface of the carrier layer, depositing an ultra-thin material layer on at least a portion of the sacrificial layer or on at least a portion of the top surface of the carrier layer, and optionally depositing a bonding layer on the ultra-thin material;

(c) stacking the carrier assembly on top of the substrate assembly by placing the ultra-thin material layer or bonding layer of the carrier assembly into contact with the thermally isolating material layer of the substrate assembly;

(d) bonding the carrier assembly to the substrate assembly to provide a bonded stack;

(e) removing the carrier layer and optional sacrificial layer from the bonded stack to provide a sensor wafer, the sensor wafer comprising the substrate layer, the thermally isolating material layer on the top surface of the substrate layer, the optional bonding layer on the thermally isolating material layer, and the ultra-thin material layer on the optional bonding layer or on the thermally isolating material layer; and

(f) structuring the sensor wafer to provide the unreleased thermopile infrared sensor,

wherein the thermally isolating material layer is stable at temperatures up to 450°

C., and the ultra-thin material layer is fabricated of one or more materials having a thickness of less than or equal to 200 nm and is deposited by methods requiring a heightened temperature of greater than 450°

C.

10. The method of claim 9, wherein the substrate layer comprises one or more materials that are unstable at temperatures greater than 450°

C.

11. The method of claim 9, wherein the substrate layer is a CMOS wafer, a printed circuit board (PCB), or a flexible substrate that is unstable at temperatures greater than 450″

C.

12. The method of claim 9, wherein the carrier substrate is fabricated of silicon.

13. The method of claim 9, wherein the carrier substrate is fabricated of a material that is stable under conditions at which the ultra-thin material layer is deposited.

14. The method of claim 9, wherein the thermally isolating material layer is fabricated of one or more materials selected from the group consisting of Parylene, benzocyclobutene (BCB), amorphous fluoropolymers, poly(methyl methacrylate), SU -8 photo-resists, and other polymers.

15. The method of claim 9, wherein the ultra-thin material layer is fabricated of one or more 2D materials.

16. The method of claim 9, wherein the ultra-thin material layer is fabricated of one or more materials selected from the group consisting of graphene, MoS₂, SnSe, black phosphorus (BP), thin poly-silicon, SiGe (silicon germanium), Ge (germanium), boron nitride (BN), group III-V compound semiconductors, and group II-VI compound semiconductors.

17. The method of claim 9, wherein the optional bonding layer is fabricated of one or more polymeric materials that are stable at temperatures up to 450°

C.

18. The method of claim 9, wherein the step of bonding the carrier assembly to the substrate assembly is carried out using polymer bonding, low temperature direct bonding, fusion bonding, and/or thermo-compression bonding.

19. The method of claim 9, wherein the carrier layer and sacrificial layer are removed from the bonded stack by selective etching of the sacrificial layer.

20. The method of claim 19, wherein prior to selective etching, a wafer grinding process is performed to remove a bulk of the carrier wafer.

21. A method for fabricating an unreleased thermopile infrared sensor comprising:

(a) forming a substrate assembly by providing a substrate layer having a bottom surface and a top surface, and depositing a thermally isolating Parylene material layer on at least a portion of the top surface of the substrate layer;

(b) forming a carrier assembly by providing a carrier layer having a bottom surface and a top surface, depositing a sacrificial layer on at least a portion of the top surface of the carrier layer, depositing a 2D material layer on at least a portion of the sacrificial layer, and optionally depositing a bonding layer on the 2D material layer;

(c) stacking the carrier assembly on top of the substrate assembly by placing the 2D material layer or bonding layer of the carrier assembly into contact with the thermally isolating Parylene material layer of the substrate assembly;

(d) bonding the carrier assembly to the substrate assembly to provide a bonded stack;

(e) removing the carrier layer and sacrificial layer from the bonded stack to provide a sensor wafer, the sensor wafer comprising the substrate layer, the thermally isolating Parylene material layer on the top surface of the substrate layer, the optional bonding layer on the thermally isolating Parylene material layer, and the 2D material layer on the optional bonding layer or on the thermally isolating Parylene material layer; and

(f) structuring the sensor wafer to provide the unreleased thermopile infrared sensor,

wherein the thermally insulating Parylene material layer is stable at temperatures up to 450°

C.