Arrays of integrated analytical devices
First Claim
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1. A method for producing an array of integrated analytical devices comprising:
- providing a substrate layer, wherein the substrate layer is a rigid inorganic material;
depositing a laser rejection filter element layer on the substrate layer;
depositing a color filtration layer on the laser rejection filter element layer, wherein the color filtration layer comprises 2 to 9 color filtration elements per analytical device, each color filtration element specific for a range of light wavelengths;
depositing a lens element layer on the color filtration layer, wherein the lens element layer comprises a diffractive beam shaping element for each analytical device;
depositing an excitation waveguide layer on the lens element layer;
optionally depositing a first aperture layer on the substrate layer, the color filtration layer, or the lens element layer;
depositing a nanowell layer on the excitation waveguide layer; and
patterning and etching the nanowell layer to define a nanowell for each analytical device;
wherein the diffractive beam shaping element is configured to spatially separate light emitted from the nanoscale emission volume into a plurality of beams and to direct the spatially-separated light beams through the color filtration elements.
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Abstract
Arrays of integrated analytical devices and their methods for production are provided. The arrays are useful in the analysis of highly multiplexed optical reactions in large numbers at high densities, including biochemical reactions, such as nucleic acid sequencing reactions. The devices allow the highly sensitive discrimination of optical signals using features such as spectra, amplitude, and time resolution, or combinations thereof. The devices include an integrated diffractive beam shaping element that provides for the spatial separation of light emitted from the optical reactions.
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Citations
32 Claims
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1. A method for producing an array of integrated analytical devices comprising:
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providing a substrate layer, wherein the substrate layer is a rigid inorganic material; depositing a laser rejection filter element layer on the substrate layer; depositing a color filtration layer on the laser rejection filter element layer, wherein the color filtration layer comprises 2 to 9 color filtration elements per analytical device, each color filtration element specific for a range of light wavelengths; depositing a lens element layer on the color filtration layer, wherein the lens element layer comprises a diffractive beam shaping element for each analytical device; depositing an excitation waveguide layer on the lens element layer; optionally depositing a first aperture layer on the substrate layer, the color filtration layer, or the lens element layer; depositing a nanowell layer on the excitation waveguide layer; and patterning and etching the nanowell layer to define a nanowell for each analytical device; wherein the diffractive beam shaping element is configured to spatially separate light emitted from the nanoscale emission volume into a plurality of beams and to direct the spatially-separated light beams through the color filtration elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification