System and method for modulation mapping
First Claim
1. A method for probing an integrated circuit (IC), comprising:
- electrically applying a stimulation signal to said IC;
scanning a selected area of said IC with a monochromatic beam;
collecting beam reflection from the selected area of said IC, wherein the beam reflection correspond to modulation of the monochromatic beam by active devices of said IC;
converting said beam reflection to an electrical probing signal;
selecting a frequency or a band of frequencies of said probing signal;
utilizing the selected frequency or band of frequencies of said probing signal to generate a spatial modulation map for various locations over the selected area of said IC; and
displaying the spatial map on a monitor, wherein grey scale values correspond to modulation signal values.
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Accused Products
Abstract
Probing an integrated circuit (IC), by: electrically applying stimulation signal to said IC; scanning a selected area of said IC with a monochromatic beam; collecting beam reflection from the selected area of said IC, wherein the beam reflection correspond to modulation of the monochromatic beam by active devices of said IC; converting said beam reflection to an electrical probing signal; selecting a frequency or a band of frequencies of said probing signal; utilizing the probing signal to generate a spatial modulation map for various locations over the selected area of said IC; and displaying the spatial map on a monitor, wherein grey scale values correspond to modulation signal values.
114 Citations
21 Claims
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1. A method for probing an integrated circuit (IC), comprising:
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electrically applying a stimulation signal to said IC; scanning a selected area of said IC with a monochromatic beam; collecting beam reflection from the selected area of said IC, wherein the beam reflection correspond to modulation of the monochromatic beam by active devices of said IC; converting said beam reflection to an electrical probing signal; selecting a frequency or a band of frequencies of said probing signal; utilizing the selected frequency or band of frequencies of said probing signal to generate a spatial modulation map for various locations over the selected area of said IC; and displaying the spatial map on a monitor, wherein grey scale values correspond to modulation signal values. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for probing an integrated circuit (IC), comprising:
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electrically applying a stimulation signal to said IC; scanning a selected area of said IC with a monochromatic beam; collecting a beam reflection from the selected area of said IC, wherein the beam reflection corresponds to modulation of the monochromatic beam by active devices of said IC; converting said beam reflection to an electrical probing signal; utilizing the probing signal to generate a spatial modulation map for various locations over the selected area of said IC; and displaying the spatial map on a monitor, wherein grey scale values correspond to modulation signal values.
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Specification