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System and method for modulation mapping

  • US 9,915,700 B2
  • Filed: 01/15/2016
  • Issued: 03/13/2018
  • Est. Priority Date: 08/26/2005
  • Status: Active Grant
First Claim
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1. A method for probing an integrated circuit (IC), comprising:

  • electrically applying a stimulation signal to said IC;

    scanning a selected area of said IC with a monochromatic beam;

    collecting beam reflection from the selected area of said IC, wherein the beam reflection correspond to modulation of the monochromatic beam by active devices of said IC;

    converting said beam reflection to an electrical probing signal;

    selecting a frequency or a band of frequencies of said probing signal;

    utilizing the selected frequency or band of frequencies of said probing signal to generate a spatial modulation map for various locations over the selected area of said IC; and

    displaying the spatial map on a monitor, wherein grey scale values correspond to modulation signal values.

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