Hybrid MOS-PCM CMOS SOI switch

• US 9,917,104 B1
• Filed: 06/19/2017
• Issued: 03/13/2018
• Est. Priority Date: 06/19/2017
• Status: Active Grant

• Current Assignee: Newport Fab, LLC (Tower Semiconductor Limited), Tower Semiconductor Limited
• Original Assignee: Newport Fab, LLC (Tower Semiconductor Limited), Tower Semiconductor Limited
• Inventors: Roizin, Yakov, Howard, David J., Hurwitz, Paul D.
• Primary Examiner(s): Phu, Sanh
• Application Number:
  US15/627,261
• Time in Patent Office: 267 Days
• Field of Search: 455129
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688
• CPC Class Codes: H01L 29/0649 Dielectric regions, e.g. SiO2 regions, air gaps
• CPC Class Codes: H01L 29/0676 oriented perpendicular or at an angle to a substrate
• CPC Class Codes: H04B 1/0483 Transmitters with multiple parallel paths
• CPC Class Codes: H10B 63/30 comprising selection components having three or more electrodes, e.g. transistors
• CPC Class Codes: H10B 63/80 Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
• CPC Class Codes: H10N 70/231 based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
• CPC Class Codes: H10N 70/823 adapted for essentially horizontal current flow, e.g. bridge type devices
• CPC Class Codes: H10N 70/8613 Heating or cooling means other than resistive heating electrodes, e.g. heater in parallel
• CPC Class Codes: H10N 70/8828 Tellurides, e.g. GeSbTe

Abstract

A hybrid MOS-PCM IC switch utilizes both MOS transistors and groups of parallel-connected Phase-Change Material (PCM) cells to control signal transmissions. The MOS transistors are separated by PCM cell groups, and the PCM cells are configured to generate similar C_OFF or lower values as the MOS transistors, whereby the hybrid switch is both smaller and exhibits lower FOM than standard CMOS SOI switches. When switched into an open (OFF/high-resistance) state, both the PCM cells and MOS transistors function to distribute high VBSR voltages, and the MOS transistors prevent unintended phase changes (ON/OFF switching) of the PCM cells by preventing exponential current flow. In the closed (ON/conducting) state, the PCM cells facilitate lower total R_ON, whereby the hybrid CMOS SOI switch achieves improved FOM. The MOS transistors may also function as drivers during programming (switching) of direct-heating-type PCM cells.

Claims

1. An integrated circuit (IC) switch configured to control signals transmitted along a signal path, the switch comprising:

a plurality of Metal-Oxide-Silicon (MOS) transistors coupled in series in the signal path; and

a plurality of switching elements connected in parallel and disposed in the signal path, wherein each said switching element comprises a Phase Change Material (PCM) structure,

wherein said plurality of MOS transistors comprises a first MOS transistor fabricated on a first Silicon-On-Insulator (SOI) island and a second MOS transistor fabricated on a second Silicon-On-Insulator (SOI) island, said first and second SOI islands being separated by an intervening isolation region, and

wherein the plurality of switching elements are fabricated on a dielectric layer portion disposed over the intervening isolation region and are connected in parallel between a drain terminal of the first MOS transistor and a source terminal of the second MOS transistor.

3. The IC switch of claim 1, wherein the plurality of switching elements are configured such that a ratio of an OFF-resistance of each said switching element to an ON-resistance of said each switching element is greater than 1,000.

4. The IC switch of claim 1, wherein the PCM structure of each said switching structure comprises a chalcogenide glass member connected between two electrodes.

5. The IC switch of claim 4, wherein the chalcogenide glass member comprises Germanium and Tellurium.

6. The IC switch of claim 4, wherein each of the plurality of switching structures further comprises a heater element configured to transmit heat onto said chalcogenide glass member during switching operations in response to an applied switching voltage.

8. The IC switch of claim 4, wherein said chalcogenide glass member of each of the plurality of switching structures is configured to transform between amorphous and crystalline states in response to corresponding applied switching voltages that are passed through said chalcogenide glass member from an associated MOS transistor of said plurality of MOS transistors.

9. The IC switch of claim 4, wherein each of the plurality of switching elements comprises one of a horizontal configuration, a vertical configuration, and a nanowire configuration.

10. The IC switch of claim 1,

wherein said plurality of switching elements includes a plurality of PCM cell groups, each said PCM cell group including multiple said PCM cells connected in parallel, and

wherein each of the plurality of MOS transistors is connected to at least one of said plurality of PCM cell groups.

2. An integrated circuit (IC) switch configured to control signals transmitted along a signal path, the switch comprising:

a plurality of Metal-Oxide-Silicon (MOS) transistors coupled in series in the signal path; and

a plurality of switching elements connected in parallel and disposed in the signal path, wherein each said switching element comprises a Phase Change Material (PCM) structure,

wherein each of the plurality of MOS transistors is configured to apply a first OFF-capacitance to the signal path when said each MOS transistor is in a high-resistance state,

wherein the plurality of switching elements are configured to collectively apply a second OFF-capacitance to the signal path when all of said plurality of switching elements are in a high-resistance state such that said second OFF-capacitance is substantially equal to or lower than said first OFF-state capacitance of said each MOS transistor.

7. An integrated circuit (IC) switch configured to control signals transmitted along a signal path, the switch comprising:

a plurality of Metal-Oxide-Silicon (MOS) transistors coupled in series in the signal path; and

a plurality of switching elements connected in parallel and disposed in the signal path, wherein each said switching element comprises a Phase Change Material (PCM) structure,

wherein the PCM structure of each said switching structure comprises a chalcogenide glass member connected between two electrodes, wherein each of the plurality of switching structures further comprises a heater element configured to transmit heat onto said chalcogenide glass member during switching operations in response to an applied switching voltage, and

wherein said each switching element further comprises a thermally conductive material structure disposed under said heater element and said chalcogenide glass member.

11. An integrated circuit (IC) switch configured to control signals transmitted along a signal path, the switch comprising:

a plurality of Metal-Oxide-Silicon (MOS) transistors coupled in series in the signal path; and

a plurality of switching elements connected in parallel and disposed in the signal path, wherein each said switching element comprises a Phase Change Material (PCM) structure,

wherein said plurality of switching elements includes a plurality of PCM cell groups, each said PCM cell group including multiple said PCM cells connected in parallel,

wherein each of the plurality of MOS transistors is connected to at least one of said plurality of PCM cell groups,

wherein each of the plurality of MOS transistors is configured with a breakdown voltage that is above a first voltage level, and

wherein each of said plurality of PCM cells is configured such that said each PCM cell is biased to conduct current when a voltage across said each PCM cell is above a second voltage level that is lower than the first voltage level.

12. A system including:

an antenna;

a transmitter circuit;

an antenna switch circuit operably coupled between the antenna and the transmitter circuit such that, in a first operating state, said antenna switch circuit forms a low-resistance path between the transmitter circuit and the antenna, and such that, in a second operating state, said antenna switch circuit forms a high-resistance path between the transmitter circuit and the antenna, said antenna switch circuit including at least one branch comprising;

a plurality of Metal-Oxide-Silicon (MOS) transistors respectively fabricated on associated SOI islands such that each said SOI island is separated from one or more adjacent said SOI islands by an associated intervening isolation region; and

a plurality of Phase Change Material (PCM) cell groups disposed on a dielectric layer that is formed over the plurality of MOS transistors, each said PCM cell group including a plurality of PCM cells disposed on an associated region of said dielectric layer that is disposed between an associated pair said MOS transistors, wherein the plurality of PCM cells of said each PCM cell group are connected in parallel between a drain terminal of a first MOS transistor of said associated pair of MOS transistors and a source terminal of a second MOS transistor of said associated pair of MOS transistors.

13. The system of claim 12, further comprising a switch control circuit configured to generate MOS control signals that are applied to gate terminals of the MOS transistors and PCM control signals that are operably applied to the plurality of PCM cells.

14. The system of claim 12, wherein each said PCM cell comprises a chalcogenide glass member connected between two electrodes.

15. The system of claim 14, wherein each of the plurality of PCM cells further comprises a heater element configured to transmit heat onto said chalcogenide glass member during switching operations in response to an applied switching voltage.

16. The system of claim 15, wherein said each PCM cell further comprises a thermally conductive material structure disposed under one or more of said heater element and said chalcogenide glass member.

17. The system of claim 14, wherein said chalcogenide glass member of each of the plurality of PCM cells is configured to transform between amorphous and crystalline states in response to corresponding applied switching voltages that are passed through said chalcogenide glass member from an associated MOS transistor of said plurality of MOS transistors.

18. The system of claim 14,

wherein each of the plurality of MOS transistors is configured with a breakdown voltage that is above a first voltage level, and

wherein each of said plurality of PCM cells is configured such that said each PCM cell is biased to conduct current when a voltage across said each PCM cell is above a second voltage level that is lower than the first voltage level.

19. An integrated circuit switch comprising:

first and second Metal-Oxide-Silicon (MOS) transistors connected in series along a signal path; and

a plurality of switching elements connected in parallel between a drain terminal of said first MOS transistor and a source terminal of said second MOS transistor,

wherein each said switching element comprises one of a chalcogenide glass structure and a ReRAM element.