Flexible electrochemical micro-sensor

• US 9,918,667 B2
• Filed: 03/07/2014
• Issued: 03/20/2018
• Est. Priority Date: 03/07/2014
• Status: Active Grant

• Current Assignee: STMicroelectronics International N.V. (STMicroelectronics NV)
• Original Assignee: Stmicroelectronics Pte Limited (STMicroelectronics NV)
• Inventors: Le Neel, Olivier, Cherian, Suman, Leung, Calvin
• Primary Examiner(s): Ball, J. Christopher
• Application Number:
  US14/200,828
• Publication Number:
  US 20150253276A1
• Time in Patent Office: 1,474 Days
• CPC Class Codes: A61B 5/14532 for measuring glucose, e.g. by tissue impedance measurement
• CPC Class Codes: A61B 5/1468 using chemical or electrochemical methods, e.g. by polarographic means A61B5/1486 takes precedence
• CPC Class Codes: A61B 5/1473 invasive, e.g. introduced into the body by a catheter A61B5/1482 takes precedence
• CPC Class Codes: G01N 27/3272 Test elements therefor, i.e. disposable laminated substrates with electrodes, reagent and channels optical biosensors G01N33/52

Abstract

A universal electrochemical micro-sensor can be used either as a biosensor or an environmental sensor. Because of its small size and flexibility, the micro-sensor is suitable for continuous use to monitor fluids within a live subject, or as an environmental monitor. The micro-sensor can be formed on a reusable glass carrier substrate. A flexible polymer backing, together with a set of electrodes, forms a reservoir that contains an electrolytic fluid chemical reagent. During fabrication, the glass carrier substrate protects the fluid chemical reagent from degradation. A conductive micromesh further contains the reagent while allowing partial exposure to the ambient biological or atmospheric environment. The micromesh density can be altered to accommodate fluid reagents having different viscosities. Flexibility is achieved by attaching a thick polymer tape and peeling away the micro-sensor from the glass carrier substrate. The final structure is thereby transferred to the polymer tape, providing a flexible product.

Claims

1. A fluid electrochemical micro-sensor, comprising:

a flexible substrate;

a first polymer film on the flexible substrate;

a second polymer film on the first polymer film;

a reservoir formed at least partially in the first and second polymer films, the flexible substrate defining at least a portion of the reservoir;

a volume of a fluid chemical reagent contained in the reservoir, a portion of a surface area of the fluid chemical reagent being exposed to an ambient environment; and

electrodes at least partially embedded between the first and second polymer films and in contact with the fluid chemical reagent.

2. The fluid electrochemical micro-sensor of claim 1 wherein the surface area of the fluid chemical reagent exposed to the ambient environment is substantially circular.

3. The fluid electrochemical micro-sensor of claim 1 wherein each electrode is electrically coupled to a corresponding arc segment that partially surrounds the fluid chemical reagent.

4. The fluid electrochemical micro-sensor of claim 1 wherein the electrodes are made of a biocompatible conducting material.

5. The fluid electrochemical micro-sensor of claim 4 wherein the biocompatible conducting material includes one or more of gold, platinum, or carbon.

6. The fluid electrochemical micro-sensor of claim 1 wherein at least one of the first and second polymer films is polyimide.

7. The fluid electrochemical micro-sensor of claim 1 wherein the fluid chemical reagent includes one or more of an electrolyte or an enzyme.

8. The fluid electrochemical micro-sensor of claim 1 wherein the fluid chemical reagent is in the form of one or more of a gel, a liquid, or a paste.

9. The fluid electrochemical micro-sensor of claim 1 wherein the ambient environment is atmospheric and the fluid chemical reagent is a gas.

10. A fluid electrochemical micro-sensor, comprising:

a plurality of photosensitive polymer films;

a volume of a fluid chemical reagent contained by at least the photosensitive polymer films, a portion of a surface area of the fluid chemical reagent being exposed to an ambient environment;

electrodes at least partially embedded between the photosensitive polymer films and in contact with the fluid chemical reagent; and

a species inlet net partially covering the exposed portion of the fluid chemical reagent.

11. The fluid electrochemical micro-sensor of claim 10 wherein the surface area of the fluid chemical reagent exposed to the ambient environment is defined by the species inlet net.

12. The fluid electrochemical micro-sensor of claim 11 wherein the species inlet net is a conductive micromesh.

13. The fluid electrochemical micro-sensor of claim 12 wherein dimensions of the conductive micromesh are based on a viscosity of the fluid chemical reagent.

14. The fluid electrochemical micro-sensor of claim 12 wherein the conductive micromesh is coupled to one or more of the electrodes.

15. A micro-sensor, comprising:

a well;

a first polymer layer having a well opening, the first polymer layer forming sides of the well;

metal electrodes positioned at the well opening, the metal electrodes including a conductive micromesh that covers the well opening;

metal traces coupled to the metal electrodes;

a second polymer layer, the first and second polymer layers together forming sides of the well;

a volume of a fluid chemical reagent contained in the well; and

a polymer tape suitable for use as a flexible carrier.

16. The micro-sensor of claim 15 wherein the well opening is substantially circular.

17. The micro-sensor of claim 15 wherein the micro-sensor is suitable for use as a flexible biosensor.

18. The micro-sensor of claim 15 wherein the micro-sensor is suitable for use as a flexible atmospheric sensor.

19. A fluid electrochemical micro-sensor, comprising:

a flexible substrate;

a first polymer layer on the flexible substrate;

a second polymer layer on the first polymer layer;

a pair of reservoirs formed at least partially in the first and second polymer layers, the flexible substrate defining at least a portion of each of the pair of reservoirs;

a reagent contained in the pair of reservoirs, a portion of a surface area of the reagent being exposed to an ambient environment; and

electrodes at least partially embedded between the first and second polymer layers and in contact with the reagent.

20. The fluid electrochemical micro-sensor of claim 19, further comprising a species inlet net partially covering the exposed portion of the reagent.