Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light

• US 9,920,993 B2
• Filed: 05/10/2012
• Issued: 03/20/2018
• Est. Priority Date: 05/13/2011
• Status: Active Grant

• Current Assignee: SCREEN Holdings Co., Ltd.
• Original Assignee: SCREEN Holdings Co., Ltd.
• Inventors: Hashimoto, Kazuyuki, Kusuda, Tatsufumi
• Primary Examiner(s): Angwin, David
• Assistant Examiner(s): Bae, Gyounghyun
• Application Number:
  US13/468,381
• Publication Number:
  US 20120288261A1
• Time in Patent Office: 2,140 Days
• Field of Search: 219385, 219390, 219405, 219411, 392416, 392418
• CPC Class Codes: F27B 17/0025 Especially adapted for treating semiconductor wafers
• CPC Class Codes: F27D 5/0037 Supports specially adapted for semi-conductors
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/67248 Temperature monitoring

Abstract

A photodetector element for receiving radiated light from a surface of a semiconductor wafer loses a detection function because the intensity of the received light exceeds a detection limit while a flash lamp emits light. Measurement is not performed during the above-mentioned period, and the intensity of the radiated light from the surface of the semiconductor wafer is measured after the flash lamp stops emitting light and the photodetector element restores the detection function. Then, the temperature of the surface of the semiconductor wafer heated by irradiation with a flash of light is calculated based on the measured intensity of the radiated light. Accordingly, even in a case where intense irradiation is performed in an extremely short period of time, such as flash irradiation, the flash of light does not act as ambient light, which enables to obtain the surface temperature of the semiconductor wafer.

Claims

1. A method for a heat treatment apparatus heating a substrate by irradiating the substrate with light, comprising the steps of:

(a) irradiating a substrate with light from a plurality of halogen lamps, to thereby preheat the substrate;

(b) irradiating the substrate with light from a plurality of flash lamps after said step (a);

(c) measuring an intensity of radiated light from a surface of said substrate, the radiated light being received by a photodetector element after the irradiation in said step (b) is stopped and said photodetector element recovers a detection function thereof, and an output signal from said photodetector element becomes lower than a level of saturation;

(d) calculating, using a controller having a CPU, a ROM and a RAM, a temperature of the surface of said substrate heated in said step (b) based on the intensity of the radiated light from the surface of said substrate, the intensity being measured in said step (c), wherein

in said step (c), a plurality of intensities of the radiated light from the surface of said substrate are measured in chronological order after the irradiation in said step (b) is stopped, and

in said step (d), an exponentially approximate equation approximated by least square method indicating changes in time of the intensity of the radiated light is obtained from said plurality of intensities of the radiated light measured in chronological order in said step (c), to thereby calculate a maximum temperature reached by the surface of said substrate from said exponentially approximate equation, said equation being in the form of f(t−

a)=b^t+c, wherein “

t”

represents time and “

a”

, “

b”

, “

c”

, are coefficients determined so as to obtain a smallest sum of square of differences between levels of output signals V₁, V₂, V₃,. . . V_n, at times of measurement t21, t22, t23, . . . tn, respectively, and f(t−

a); and

using said calculating step (d) to control said flash lamps to activate implanted impurities in said substrate to join metal and silicon, or to crystalize polysilicon, or to recover crystal defects caused by the implanted impurities.

2. The method according to claim 1, wherein

in said step (c), said plurality of intensities of the radiated light are measured until the temperature of the surface of said substrate decreases to the temperature near the preheating temperature in said step (a).