Method of detecting defect location using multi-surface specular reflection

• US 9,921,169 B2
• Filed: 05/19/2016
• Issued: 03/20/2018
• Est. Priority Date: 05/19/2016
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: Zeta Instruments, Inc. (KLA Corporation)
• Inventors: Meeks, Steven W., Kudinar, Rusmin, Soetarman, Ronny, Nguyen, Hung P.
• Primary Examiner(s): STAFIRA, MICHAEL PATRICK
• Application Number:
  US15/159,266
• Publication Number:
  US 20170336330A1
• Time in Patent Office: 670 Days
• CPC Class Codes: G01N 2021/8854 Grading and classifying of flaws
• CPC Class Codes: G01N 21/21 Polarisation-affecting properties G01N21/19 takes precedence
• CPC Class Codes: G01N 21/55 Specular reflectivity
• CPC Class Codes: G01N 21/8806 Specially adapted optical and illumination features
• CPC Class Codes: G01N 21/94 Investigating contamination, e.g. dust G01N21/85 takes precedence
• CPC Class Codes: G01N 21/958 Inspecting transparent materials or objects, e.g. windscreens for conveyed flat sheet or rod G01N21/896
• CPC Class Codes: G01N 2201/06113 Coherent sources; lasers
• CPC Class Codes: G01N 2201/0683 Brewster plate; polarisation controlling elements
• CPC Class Codes: G01N 2201/105 Purely optical scan
• CPC Class Codes: G01N 2201/1247 Thresholding

Abstract

A method for detecting defects includes directing a scanning beam to a location on a surface of a transparent sample, measuring top and bottom surface specular reflection intensity, and storing coordinate values of the first location and the top and bottom surface specular reflection intensity in a memory. The method may further include comparing the top surface specular reflection intensity measured at each location with a first threshold value, comparing the bottom surface specular reflection intensity measured at each location with a second threshold value, and determining if a defect is present at each location and on which surface the defect is present. The method may further include comparing the top surface specular reflection intensity measured at each location with a first intensity range, comparing the bottom surface specular reflection intensity measured at each location with a second intensity range, and determining on which surface the defect is present.

Claims

1. A method for detecting defects, comprising:

(a) directing a scanning beam to a first location on a first surface of a transparent sample, wherein a portion of the scanning beam irradiates a second surface of the transparent sample;

(b) at the first location, measuring top surface specular reflection intensity, wherein the top surface specular reflection intensity results from irradiation by the scanning beam at the first location on the first surface of the transparent sample;

(c) storing coordinate values of the first location and the measured top surface specular reflection intensity in a memory;

(d) comparing the top surface specular reflection intensity measured with an expected top surface specular reflection intensity value; and

(e) determining that a defect is present on the top surface of the transparent sample when the measured top surface specular reflection intensity is less than the expected top surface specular reflection intensity value.

2. The method of claim 1, further comprising:

(f) measuring bottom surface specular reflection intensity;

(g) comparing the measured bottom surface specular reflection intensity with an expected bottom surface specular reflection intensity value; and

(h) determining that a defect is present at bottom surface of the transparent sample when the top surface specular reflection intensity is equal to or greater than the expected top surface specular reflection intensity value and the bottom surface specular reflection intensity is less than the expected bottom surface specular reflection intensity value.

3. The method of claim 2, further comprising:

(i) repeating steps (a) through (h) at a plurality of locations on the first surface of the first transparent sample.

4. The method of claim 1, wherein the defect is one selected from the group consisting of:

(1) a top surface particle, (2) a bottom surface particle, (3) a bottom surface pit, (4) a top surface pit, (5) a top surface scratch, (6) a bottom surface scratch, (7) a top surface stain, (8) a bottom surface stain, (9) an internal crack, (10) an internal stress field, (11) an internal void, or (12) an internal defect.

5. The method of claim 1, wherein the transparent sample is one selected from a group comprising, glass, plastic, quartz, sapphire, silicon, Silicon Carbide (SiC), and Gallium Nitride (GaN).

6. The method of claim 1, wherein the directing of the scanning beam to the first location on the first surface of the transparent sample is performed, at least in part, by a radiating source, a rotating polygon, and a telecentric scan lens.

7. The method of claim 1, further comprising:

(f) measuring top surface slope at the first location, wherein the measuring of top surface slope is performed, at least in part, by an achromatic lens and a bi-cell detector.

8. The method of claim 1, further comprising:

(f) measuring bottom surface slope at the first location, wherein the measuring of bottom surface slope is performed, at least in part, by an achromatic lens, and a bi-cell detector.

9. A method for detecting defects, comprising:

(a) directing a scanning beam to a first location on a first surface of a transparent sample, wherein a portion of the scanning beam irradiates a second surface of the transparent sample;

(b) at the first location, measuring top surface specular reflection intensity, wherein the top surface specular reflection intensity result from irradiation by the scanning beam at the first location on the first surface of the transparent sample;

(c) storing coordinate values of the first location and the measured top surface specular reflection intensity in a memory;

(d) determining if the measured top surface specular reflection intensity is within a first intensity range, wherein the first intensity range includes an expected top surface specular reflection intensity value; and

(e) determining that a defect is present on the top surface of the transparent sample when the measured top surface specular reflection intensity is not within the first intensity range.

10. The method of claim 9, further comprising:

(f) repeating steps (a) through (e) at a plurality of locations on the first surface of the first transparent sample.

11. The method of claim 9, further comprising:

(f) at the first location, measuring bottom surface specular reflection intensity;

(g) comparing the measured bottom surface specular reflection intensity with a second intensity range;

(h) determining if the measured bottom surface specular reflection intensity is within a second intensity range, wherein the second intensity range includes an expected bottom surface specular reflection intensity value; and

(i) determining that a defect is present on the bottom surface of the transparent sample when the measured top surface specular reflection intensity is within the first intensity range and the measured bottom surface specular reflection is not within the second intensity range.

12. The method of claim 9, wherein the top surface specular reflection passes through a second polarizing element before the measurement of the top surface specular reflection intensity.

13. The method of claim 9, wherein the defect is selected from the group consisting of:

(1) a top surface crack, (2) a bottom surface crack, (3) an internal stress field, (4) an internal void, or (5) an internal defect.

14. The method of claim 9, wherein the directing of the scanning beam to the first location on the first surface of the transparent sample is performed, at least in part, by a radiating source, a rotating polygon, and a telecentric scan lens.

15. The method of claim 9, wherein the polarizing element is a polarizing beam splitter, and wherein the measuring of specular reflection intensity is performed, at least in part, by an achromatic lens, a bi-cell detector, and the polarizing beam splitter.

16. The method of claim 9, wherein the measuring of specular reflection intensity is performed, at least in part, by an achromatic lens, a bi-cell detector, a polarizing element, and a separation mirror.