Structurally controlled deposition of silicon onto nanowires
First Claim
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1. An anode for a lithium battery, comprising:
- a substrate;
a nanowire template rooted to the substrate;
a first silicon layer substantially coating the nanowire template, the first silicon layer having a first density; and
a second silicon layer over the first silicon layer and any exposed nanowire template, the second silicon layer having a density higher than the density of the first silicon layer, wherein the first silicon layer is non-conformal to the nanowire template.
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Abstract
Provided herein are nanostructures for lithium ion battery electrodes and methods of fabrication. In some embodiments, a nanostructure template coated with a silicon coating is provided. The silicon coating may include a non-conformal, more porous layer and a conformal, denser layer on the non-conformal, more porous layer. In some embodiments, two different deposition processes, e.g., a PECVD layer to deposit the non-conformal layer and a thermal CVD process to deposit the conformal layer, are used. Anodes including the nanostructures have longer cycle lifetimes than anodes made using either a PECVD or thermal CVD method alone.
166 Citations
25 Claims
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1. An anode for a lithium battery, comprising:
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a substrate; a nanowire template rooted to the substrate; a first silicon layer substantially coating the nanowire template, the first silicon layer having a first density; and a second silicon layer over the first silicon layer and any exposed nanowire template, the second silicon layer having a density higher than the density of the first silicon layer, wherein the first silicon layer is non-conformal to the nanowire template. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An anode for a lithium battery, comprising:
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a substrate; a nanowire template rooted to the substrate; a first silicon layer substantially coating the nanowire template, the first silicon layer having a first density; and a second silicon layer over the first silicon layer and any exposed nanowire template, the second silicon layer having a density higher than the density of the first silicon layer, wherein the second silicon layer has a density at least 0.15 g/cm3 greater than the density of the first silicon layer. - View Dependent Claims (16, 17, 18, 19, 20)
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21. An anode for a lithium battery, comprising:
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a substrate; a nanowire template rooted to the substrate; a first silicon layer substantially coating the nanowire template, the first silicon layer having a first density; and a second silicon layer over the first silicon layer and any exposed nanowire template, the second silicon layer having a density higher than the density of the first silicon layer, wherein the first density is less than 2.1 g/cm3. - View Dependent Claims (22, 23, 24, 25)
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Specification