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Micromechanical sensor of angular velocity

  • US 9,927,241 B2
  • Filed: 02/05/2016
  • Issued: 03/27/2018
  • Est. Priority Date: 02/11/2015
  • Status: Active Grant
First Claim
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1. A micromechanical device for detecting angular velocity, said device comprising:

  • four open drive frames, each forming a semi-open enclosure;

    four detection masses, each disposed within the semi-open enclosure formed by the respective open drive frame, thefour detection masses configured to double differentially detect angular velocity about a single rotation axis aligned with a plane of the device;

    an inner coupling lever system for coupling the four detection masses into a synchronized anti-phase detection motion; and

    first springs coupling each one of the four detection masses to a respective one of the four open drive frames, the first springs being configured to relay a linear driving motion of each open drive frame to a detection mass coupled to it and wherein, for each of the detection masses, a plurality of first springs coupling the detection mass to the respective open drive frame are disposed symmetrically with respect to an axis aligned with the linear driving motion.

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