Accelerometer with offset compensation
First Claim
Patent Images
1. An accelerometer comprising:
- an anchor secured to a substrate;
a movable mass springedly coupled to the anchor by a spring which is directly connected to the anchor;
a movable frame rigidly connected to the anchor;
a stationary finger connected to the substrate;
a movable finger connected to the movable mass, the movable finger forming an acceleration capacitor with the stationary finger; and
a frame finger connected to the movable frame, the frame finger forming a noise correcting capacitor with the stationary finger.
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Abstract
An accelerometer has a movable mass suspended above a substrate, and a variable acceleration capacitor supported by the substrate. The movable mass has a mass anchor securing the mass to the substrate, while the acceleration capacitor has both a stationary finger extending from the substrate, and a movable finger extending from the movable mass. The accelerometer also has a variable stress capacitor, which also includes the stress finger, for determining movement of the mass anchor relative to the substrate.
37 Citations
20 Claims
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1. An accelerometer comprising:
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an anchor secured to a substrate; a movable mass springedly coupled to the anchor by a spring which is directly connected to the anchor; a movable frame rigidly connected to the anchor; a stationary finger connected to the substrate; a movable finger connected to the movable mass, the movable finger forming an acceleration capacitor with the stationary finger; and a frame finger connected to the movable frame, the frame finger forming a noise correcting capacitor with the stationary finger. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An accelerometer comprising:
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a movable mass springedly coupled to an anchor by a spring directly connected to the anchor, the anchor being connected to a substrate; a movable frame rigidly connected to the anchor; an acceleration capacitor configured to detect acceleration of the movable mass relative to the substrate, the acceleration capacitor having a first stationary finger connected to the substrate and a movable finger connected to the movable mass; and a noise correcting capacitor configured to detect movement of the anchor relative to the movable mass, the noise correcting capacitor having a second stationary finger connected to the substrate and a frame finger connected to the movable frame. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method comprising:
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sensing accelerations of a movable mass using an acceleration capacitor, the acceleration capacitor comprising a stationary finger connected to a substrate and a movable finger connected to the movable mass, wherein the movable mass is springedly coupled to an anchor through a spring directly connected to the anchor, the anchor being connected to the substrate; and detecting displacement of the anchor using a noise correcting capacitor, the noise correcting capacitor comprising the stationary finger and a frame finger connected to a movable frame, the movable frame being rigidly connected to the anchor. - View Dependent Claims (17, 18, 19, 20)
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Specification