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Accelerometer with offset compensation

  • US 9,927,459 B2
  • Filed: 11/06/2013
  • Issued: 03/27/2018
  • Est. Priority Date: 11/06/2013
  • Status: Active Grant
First Claim
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1. An accelerometer comprising:

  • an anchor secured to a substrate;

    a movable mass springedly coupled to the anchor by a spring which is directly connected to the anchor;

    a movable frame rigidly connected to the anchor;

    a stationary finger connected to the substrate;

    a movable finger connected to the movable mass, the movable finger forming an acceleration capacitor with the stationary finger; and

    a frame finger connected to the movable frame, the frame finger forming a noise correcting capacitor with the stationary finger.

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