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Semiconductor lens optimization of fabrication

  • US 9,927,558 B2
  • Filed: 04/19/2016
  • Issued: 03/27/2018
  • Est. Priority Date: 04/19/2016
  • Status: Active Grant
First Claim
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1. A method for manufacturing lenses, the method comprising:

  • etching a layer of photoresist over a substrate to form a lens array with a plurality of lenses, wherein the lens array further comprises an inner portion with a first set of lenses and an outer portion with a second set of lenses, wherein the second set of lenses is positioned adjacent to and surrounds the first set of lenses, wherein each lens in the first set of lenses is surrounded by a same number of lenses of either the first set of lenses or the second set of lenses; and

    positioning each laser among a plurality of lasers to correspond with each lens in the first set of lenses and positioning no laser to correspond with any of the lenses in the second set of lenses.

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