High frequency, repetitive, compact toroid-generation for radiation production
First Claim
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1. A radiation source comprising:
- a gas source;
a confinement tube coupled with the gas source and configured to contain a gas introduced into the confinement tube from the gas source;
a resonant inductor having a conductor shaped into coil disposed around the confinement tube, the coil comprising;
a first plurality of windings having a first diameter;
a second plurality of windings, each winding of the second plurality of windings having a diameter less than the first diameter; and
a third plurality of windings having a third diameter; and
switching circuitry electrically coupled with the resonant inductor that generates high current pulses within the coil of the resonant inductor, and switches the high current pulses at high frequencies.
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Abstract
Systems and methods are discussed to create radiation from one or more compact toroids. Compact toroids can be created from plasma of gases within a confinement chamber using a plurality of coils of various densities of windings. High current pulses can be generated within the coil and switched at high frequencies to repeatedly generate compact toroids within the plasma. The plasma can produce radiation at various wavelengths that is focused toward a target or an intermediate focus.
74 Citations
20 Claims
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1. A radiation source comprising:
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a gas source; a confinement tube coupled with the gas source and configured to contain a gas introduced into the confinement tube from the gas source; a resonant inductor having a conductor shaped into coil disposed around the confinement tube, the coil comprising; a first plurality of windings having a first diameter; a second plurality of windings, each winding of the second plurality of windings having a diameter less than the first diameter; and a third plurality of windings having a third diameter; and switching circuitry electrically coupled with the resonant inductor that generates high current pulses within the coil of the resonant inductor, and switches the high current pulses at high frequencies. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A radiation source comprising:
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a gas source; a confinement tube coupled with the gas source and configured to contain a gas introduced into the confinement tube from the gas source; a first resonant inductor wrapped around a portion of the confinement tube; a second resonant inductor wrapped around a portion of the confinement tube; and a central resonant inductor wrapped around a portion of the confinement tube and disposed between the first resonant inductor and the second resonant inductor. - View Dependent Claims (13, 14, 15, 16)
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17. A method for creating ultraviolet light, the method comprising:
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introducing a gas into a confinement chamber; ionizing the gas within the confinement chamber; generating a plurality of compact toroids in the ionized gas by pulsing high current and high frequencies within coils of a resonant inductor wrapped around the confinement chamber; and focusing ultraviolet radiation produced by each of the plurality of compact toroids toward a target or an intermediate focus. - View Dependent Claims (18, 19, 20)
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Specification