Method of manufacturing a lithium ion battery
First Claim
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1. A method of manufacturing a lithium ion battery, the method comprising:
- attaching a lid to a first main surface of a first substrate, the lid comprising a conductive cover element, the first substrate being a semiconductor substrate;
forming a cavity between the lid and the first substrate;
forming an anode comprising a component made of a semiconductor material at the first substrate;
forming a cathode at the lid; and
filling an electrolyte into the cavity.
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Abstract
A method of manufacturing a lithium ion battery includes: attaching a lid to a first main surface of a first substrate, the lid including a conductive coves element; forming a cavity between the lid and the first substrate; forming an anode comprising a component made of a semiconductor material at the first substrate; forming a cathode at the lid; and filling an electrolyte into the cavity.
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Citations
20 Claims
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1. A method of manufacturing a lithium ion battery, the method comprising:
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attaching a lid to a first main surface of a first substrate, the lid comprising a conductive cover element, the first substrate being a semiconductor substrate; forming a cavity between the lid and the first substrate; forming an anode comprising a component made of a semiconductor material at the first substrate; forming a cathode at the lid; and filling an electrolyte into the cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of manufacturing a lithium ion battery, the method comprising:
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attaching a lid to a first main surface of a first substrate, the lid comprising a conductive cover element; forming a cavity between the lid and the first substrate; forming an anode comprising a component made of a semiconductor material at the first substrate; forming a cathode at the lid; and filling an electrolyte into the cavity, wherein forming the lid comprises attaching a conductive cover element to a first main surface of a second substrate and the second substrate is a semiconductor substrate. - View Dependent Claims (14, 15, 16, 17)
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18. A method of manufacturing a lithium ion battery, the method comprising:
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attaching a lid to a first main surface of a first substrate, the lid comprising a conductive cover element; forming a cavity between the lid and the first substrate; forming an anode comprising a component made of a semiconductor material at the first substrate, wherein forming the anode comprises patterning the first substrate to form grooves; forming a cathode at the lid; and filling an electrolyte into the cavity. - View Dependent Claims (19, 20)
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Specification