Hybrid cavity and lumped filter architecture

• US 9,929,458 B2
• Filed: 11/03/2015
• Issued: 03/27/2018
• Est. Priority Date: 11/03/2014
• Status: Active Grant

• Current Assignee: Qorvo US, Inc. (Qorvo, Inc.)
• Original Assignee: Qorvo US, Inc. (Qorvo, Inc.)
• Inventors: Leipold, Dirk Robert Walter, Maxim, George, Scott, Baker
• Primary Examiner(s): Pascal, Robert J
• Assistant Examiner(s): Glenn, Kimberly
• Application Number:
  US14/931,689
• Publication Number:
  US 20160126613A1
• Time in Patent Office: 875 Days
• Field of Search: 333202, 333227
• CPC Class Codes: H01F 2027/2809 on stacked layers
• CPC Class Codes: H01F 27/2804 Printed windings
• CPC Class Codes: H01L 21/0276 using an anti-reflective coating anti-reflective coating for lithography in general G03F7/09
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: H01P 7/06 Cavity resonators
• CPC Class Codes: H01P 7/065 integrated in a substrate
• CPC Class Codes: H01P 7/08 Strip line resonators
• CPC Class Codes: H03H 7/38 Impedance-matching networks
• CPC Class Codes: H03H 7/463 Duplexers
• CPC Class Codes: H03H 9/24 Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
• CPC Class Codes: H04B 1/40 Circuits
• CPC Class Codes: H04J 1/08 Arrangements for combining channels branching filters H01P1/213, H03H7/46

Abstract

A resonator includes an inductive element and a conductive cavity surrounding the inductive element. In particular, the conductive cavity surrounds the inductive element such that a capacitance is distributed between the inductive element and the conductive cavity. By distributing a capacitance between the inductive element and the conductive cavity, a high quality-factor resonator can be achieved by the resonator with a relatively small form factor.

Claims

1. A resonator comprising:

an inductive element comprising a conductive path routed along a periphery of a volume between an input node and an output node such that the inductive element is a three-dimensional inductor with a length between about 0.5 mm and 20 mm; and

a conductive cavity surrounding the inductive element such that a capacitance is distributed between the inductive element and the conductive cavity along a length of the inductive element.

2. The resonator of claim 1 wherein the conductive cavity is coupled to a fixed potential.

3. The resonator of claim 1 wherein the conductive path comprises:

one or more vertical connectors, each disposed at an angle of 45°

with respect to a center of the inductive element; and

one or more conductive traces connecting the one or more vertical connectors.

4. The resonator of claim 1 wherein a delay between the input node and the output node is between about 0.5 ns and 50 ns.

5. The resonator of claim 1 wherein the conductive cavity encloses the volume such that the conductive path runs parallel to one or more surfaces of the conductive cavity.

6. The resonator of claim 1 wherein the inductive element further comprises at least one intermediate node between the input node and the output node.

7. The resonator of claim 6 wherein a delay between the input node and the at least one intermediate node is different from a delay between the input node and the output node.

8. The resonator of claim 1 further comprising a tunable capacitive element coupled to the inductive element.

9. The resonator of claim 8 wherein the conductive cavity further surrounds the tunable capacitive element.

10. The resonator of claim 9 wherein the conductive cavity is coupled to a fixed potential.

11. The resonator of claim 1 wherein the conductive cavity encloses the volume such that the conductive path runs parallel to one or more surfaces of the conductive cavity.

12. A filter comprising:

a plurality of inductive elements each comprising a conductive path routed along a periphery of a volume between an input node and an output node such that the inductive element is a three-dimensional inductor with a length between about 0.5 mm and 20 mm;

a plurality of tunable capacitive elements, each coupled to a different one of the plurality of inductive elements; and

a conductive cavity surrounding at least one of the plurality of inductive elements such that a capacitance is distributed between each one of the plurality of inductive elements and the conductive cavity along a length of the at least one of the plurality of inductive elements surrounded by the conductive cavity.

13. The filter of claim 12 wherein the conductive cavity surrounds all of the plurality of inductive elements.

14. The filter of claim 12 wherein the conductive path of each one of the plurality of inductive elements runs parallel to one or more surfaces of the conductive cavity.

15. A resonator comprising:

an inductive element comprising a conductive path routed along a periphery of a volume between an input node and an output node such that the inductive element is a three-dimensional inductor; and

a conductive cavity surrounding the inductive element such that a capacitance is distributed between the inductive element and the conductive cavity along a length of the inductive element and a delay between the input node and the output node is between about 0.5 ns and 50 ns.

16. A resonator comprising:

an inductive element including one or more vertical connectors, each disposed at an angle of 45°

with respect to a center of the inductive element and one or more conductive traces connecting the one or more vertical connectors; and

a conductive cavity surrounding the inductive element such that a capacitance is distributed between the inductive element and the conductive cavity along a length of the inductive element.