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Electrooptical apparatus, production method for the electrooptical apparatus, and electronic appliance

  • US 9,933,700 B2
  • Filed: 03/03/2016
  • Issued: 04/03/2018
  • Est. Priority Date: 04/01/2015
  • Status: Active Grant
First Claim
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1. An electrooptical apparatus comprising:

  • a substrate;

    an electroconductive member that includes;

    a pair of first support posts protruding toward the substrate;

    a torsion hinge supported by the first support posts; and

    a second support post protruding from the torsion hinge toward a side opposite the substrate, the second support post having;

    a tubular shape,a hollow interior, anda first end that faces the substrate and has an opening to the hollow interior,the first support posts, the torsion hinge and the second support post being integrally formed; and

    a mirror provided at a second end portion of the second support post at a side opposite to the substrate.

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