Electrooptical apparatus, production method for the electrooptical apparatus, and electronic appliance

• US 9,933,700 B2
• Filed: 03/03/2016
• Issued: 04/03/2018
• Est. Priority Date: 04/01/2015
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Ito, Satoshi
• Primary Examiner(s): THOMAS, BRANDI N
• Application Number:
  US15/060,077
• Publication Number:
  US 20160291318A1
• Time in Patent Office: 761 Days
• Field of Search: 359237, 359242, 359244, 359245, 359263, 359247, 359290-292, 359295, 359298
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 7/1821 for rotating or oscillating mirrors
• CPC Class Codes: G03F 7/0005 Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
• CPC Class Codes: G03F 7/0035 Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
• CPC Class Codes: G03F 7/038 Macromolecular compounds which are rendered insoluble or differentially wettable G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021
• CPC Class Codes: G03F 7/039 Macromolecular compounds which are photodegradable, e.g. positive electron resists G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023
• CPC Class Codes: G03F 7/095 having more than one photosensitive layer G03F7/075 takes precedence
• CPC Class Codes: G03F 7/2002 with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
• CPC Class Codes: G03F 7/2022 Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
• CPC Class Codes: G03F 7/26 Processing photosensitive materials; Apparatus therefor G03F7/12 - G03F7/24 take precedence

Abstract

An electrooptical apparatus includes a torsion hinge and a mirror support post that are formed integrally with an electroconductive member. Of the mirror support post (second support post), a first end portion at a substrate side has an open end whose opening faces the substrate. Of the mirror support post, a second end portion at a mirror side is a flat plate portion that closes the opening of the mirror support post. A mirror is in contact with the opposite side of the flat plate portion to the substrate. A first sacrificial layer for use for production of the electrooptical apparatus is formed by exposing and developing a photosensitive resist.

Claims

1. An electrooptical apparatus comprising:

a substrate;

an electroconductive member that includes;

a pair of first support posts protruding toward the substrate;

a torsion hinge supported by the first support posts; and

a second support post protruding from the torsion hinge toward a side opposite the substrate, the second support post having;

a tubular shape,

a hollow interior, and

a first end that faces the substrate and has an opening to the hollow interior,

the first support posts, the torsion hinge and the second support post being integrally formed; and

a mirror provided at a second end portion of the second support post at a side opposite to the substrate.

2. The electrooptical apparatus according to claim 1, wherein

the second end portion forms a flat plate portion that closes an opening of the second support post.

3. The electrooptical apparatus according to claim 1, wherein

a curved sectional shape is present between the second support post and the torsion hinge.

4. The electrooptical apparatus according to claim 1, wherein

an outer peripheral surface of the second support post is a tapered surface that faces a mirror side.

5. An electronic appliance comprising:

the electrooptical apparatus according to claim 1; and

a light source that emits light source light to the mirror.

6. An electronic appliance comprising:

the electrooptical apparatus according to claim 2; and

a light source that emits light source light to the mirror.

7. An electronic appliance comprising:

the electrooptical apparatus according to claim 3; and

a light source that emits light source light to the mirror.

8. An electronic appliance comprising:

the electrooptical apparatus according to claim 4; and

a light source that emits light source light to the mirror.

9. A reflector array for a display, comprising:

a substrate;

an integrally-formed electroconductive member, including;

a torsion hinge;

a pair of hinge supports connected to the torsion hinge and the substrate; and

a mirror support that protrudes from the torsion hinge and has a hollow interior, the mirror support having a first end that faces the substrate and has an opening to the hollow interior of the mirror support; and

a mirror attached to a second end of the mirror support.