Electrooptical apparatus, production method for the electrooptical apparatus, and electronic appliance
First Claim
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1. An electrooptical apparatus comprising:
- a substrate;
an electroconductive member that includes;
a pair of first support posts protruding toward the substrate;
a torsion hinge supported by the first support posts; and
a second support post protruding from the torsion hinge toward a side opposite the substrate, the second support post having;
a tubular shape,a hollow interior, anda first end that faces the substrate and has an opening to the hollow interior,the first support posts, the torsion hinge and the second support post being integrally formed; and
a mirror provided at a second end portion of the second support post at a side opposite to the substrate.
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Abstract
An electrooptical apparatus includes a torsion hinge and a mirror support post that are formed integrally with an electroconductive member. Of the mirror support post (second support post), a first end portion at a substrate side has an open end whose opening faces the substrate. Of the mirror support post, a second end portion at a mirror side is a flat plate portion that closes the opening of the mirror support post. A mirror is in contact with the opposite side of the flat plate portion to the substrate. A first sacrificial layer for use for production of the electrooptical apparatus is formed by exposing and developing a photosensitive resist.
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Citations
9 Claims
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1. An electrooptical apparatus comprising:
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a substrate; an electroconductive member that includes; a pair of first support posts protruding toward the substrate; a torsion hinge supported by the first support posts; and a second support post protruding from the torsion hinge toward a side opposite the substrate, the second support post having; a tubular shape, a hollow interior, and a first end that faces the substrate and has an opening to the hollow interior, the first support posts, the torsion hinge and the second support post being integrally formed; and a mirror provided at a second end portion of the second support post at a side opposite to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A reflector array for a display, comprising:
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a substrate; an integrally-formed electroconductive member, including; a torsion hinge; a pair of hinge supports connected to the torsion hinge and the substrate; and a mirror support that protrudes from the torsion hinge and has a hollow interior, the mirror support having a first end that faces the substrate and has an opening to the hollow interior of the mirror support; and a mirror attached to a second end of the mirror support.
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Specification