Optical element
First Claim
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1. An optical element, comprising:
- a substrate comprising a fluoride; and
a coating supported by the substrate,wherein;
the coating comprises, in order moving away from the substrate, a first layer, a second layer, a third layer, a fourth layer, and a fifth layer;
the first layer comprises an inorganic oxide;
the coating does not include two consecutive oxide layers;
the second layer comprises an inorganic fluoride having a refractive index at a wavelength in the ultraviolet range that is less than a refractive index of calcium fluoride at the wavelength in the ultraviolet range;
the third layer comprises the inorganic oxide;
the fourth layer comprises an inorganic fluoride;
the fifth layer comprises the inorganic oxide;
the first layer is in contact with the substrate;
the fifth layer is in contact with the surroundings of the optical element;
the second layer is in direct contact with the first layer; and
the second layer is in direct contact with the third layer.
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Abstract
In order to make possible both good laser resistance and good antireflection properties, an optical element, in particular for UV lithography, comprising a substrate and a coating on the substrate having at least four layers, is proposed, wherein
- a first layer comprising a low refractive index inorganic fluoride compound is arranged on the substrate,
- a layer comprising an inorganic oxide-containing compound is arranged as a layer the most distant from the substrate, and
- at least two further layers each comprising an inorganic fluoride compound or an inorganic oxide-containing compound are arranged alternately between the first and the most distant layers.
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Citations
24 Claims
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1. An optical element, comprising:
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a substrate comprising a fluoride; and a coating supported by the substrate, wherein; the coating comprises, in order moving away from the substrate, a first layer, a second layer, a third layer, a fourth layer, and a fifth layer; the first layer comprises an inorganic oxide; the coating does not include two consecutive oxide layers; the second layer comprises an inorganic fluoride having a refractive index at a wavelength in the ultraviolet range that is less than a refractive index of calcium fluoride at the wavelength in the ultraviolet range; the third layer comprises the inorganic oxide; the fourth layer comprises an inorganic fluoride; the fifth layer comprises the inorganic oxide; the first layer is in contact with the substrate; the fifth layer is in contact with the surroundings of the optical element; the second layer is in direct contact with the first layer; and the second layer is in direct contact with the third layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. An optical element, comprising:
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a substrate comprising a fluoride; and a coating supported by the substrate, wherein; the coating comprises an inner most layer, an outer most layer, and a multi-layer stack between the inner most layer and the outer most layer; the inner most layer is the layer of the coating that is closest to the substrate; the outer most layer is the layer of the coating that is furthest from the substrate; the inner most layer comprises an inorganic oxide; the outer most layer comprises the inorganic oxide; the multi-layer stack comprises alternating layers of an inorganic fluoride and the inorganic oxide; the inner most layer is in contact with the substrate; the outer most layer is in contact with the surroundings of the optical element; and the alternating layers of an inorganic fluoride and the inorganic oxide are in contact with each other.
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23. An optical element, comprising:
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a substrate comprising a fluoride; and a coating supported by the substrate, wherein; the coating comprises at least five layers; the at least five layers comprise alternating layers of the same inorganic oxide and the same inorganic fluoride; the layer of the coating that is closest to the substrate comprises the inorganic oxide; the layer of the coating that is furthest from the substrate comprises the inorganic oxide; a refractive index of the inorganic oxide at a wavelength in the ultraviolet range is greater than a refractive index of the inorganic fluoride at the wavelength in the ultraviolet range; the layer of the coating that is closest to the substrate is in contact with the substrate; the layer of the coating that is furthest from the substrate is in contact with the surroundings of the optical element; and the alternating layers of the same inorganic oxide and the same inorganic fluoride are in contact with each other.
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24. An optical element, comprising:
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a substrate comprising a fluoride; and a coating supported by the substrate, wherein; the coating comprises, in order moving away from the substrate, a first layer, a second layer, a third layer, a fourth layer, and a fifth layer; the first layer comprises an inorganic oxide; the coating does not include two consecutive oxide layers; the second layer comprises an inorganic fluoride having a refractive index at a wavelength in the ultraviolet range that is less than a refractive index of calcium fluoride at the wavelength in the ultraviolet range; the third layer comprises the inorganic oxide; the fourth layer comprises an inorganic fluoride; the fifth layer comprises the inorganic oxide; the first layer is in contact with the substrate; the fifth layer is in contact with the surroundings of the optical element; the fourth layer is in direct contact with the third layer; and the fourth layer is in direct contact with the fifth layer.
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Specification