Semiconductor light-emitting device and method for fabricating the same

• US 9,935,245 B2
• Filed: 02/15/2017
• Issued: 04/03/2018
• Est. Priority Date: 10/15/2009
• Status: Active Grant

• Current Assignee: Suzhou Lekin Semiconductor Company Limited
• Original Assignee: LG Innotek Company Limited (LG Corporation)
• Inventors: Jeong, Hwan Hee, Lee, Sang Youl, Song, June O, Oh, Tchang Hun, Choi, Hee Seok, Choi, Kwang Ki
• Primary Examiner(s): Tran, Tony
• Application Number:
  US15/433,167
• Publication Number:
  US 20170162753A1
• Time in Patent Office: 412 Days
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2933/0016 relating to electrodes
• CPC Class Codes: H01L 33/0075 comprising nitride compounds
• CPC Class Codes: H01L 33/0093 Wafer bonding; Removal of the growth substrate
• CPC Class Codes: H01L 33/145 with a current-blocking structure
• CPC Class Codes: H01L 33/22 Roughened surfaces, e.g. at the interface between epitaxial layers
• CPC Class Codes: H01L 33/24 of the light emitting region, e.g. non-planar junction
• CPC Class Codes: H01L 33/32 containing nitrogen
• CPC Class Codes: H01L 33/38 with a particular shape
• CPC Class Codes: H01L 33/40 Materials therefor
• CPC Class Codes: H01L 33/405 Reflective materials
• CPC Class Codes: H01L 33/44 characterised by the coatings, e.g. passivation layer or anti-reflective coating

Abstract

A semiconductor light-emitting device is provided. The semiconductor light-emitting device may include a light-emitting structure, an electrode, an ohmic layer, an electrode layer, an adhesion layer, and a channel layer. The light-emitting structure include a compound semiconductor layer. The electrode may be disposed on the light-emitting structure. The ohmic layer may be disposed under the light-emitting structure. The electrode layer may include a reflective metal under the ohmic layer. The adhesion layer may be disposed under the electrode layer. The channel layer may be disposed along a bottom edge of the light-emitting structure.

Claims

1. A light emitting device, comprising:

a conductive support member;

an adhesion layer including a barrier metal layer and a bonding metal layer on the conductive support member;

an electrode layer having a first multi-layer structure on the adhesion layer;

an ohmic layer having a second multi-layer structure on the electrode layer;

a light-emitting structure disposed on the ohmic layer, the light-emitting structure having at least one portion of a bottom surface directly in contact with a first portion of the ohmic layer and an inclined side surface, the light-emitting structure including a first conductivity type semiconductor layer, a second conductivity type semiconductor layer and an active layer disposed between the first conductivity type semiconductor layer and the second conductivity type semiconductor layer;

a channel layer disposed on the adhesion layer, the channel layer disposed under a plurality of peripheral portions of the bottom surface of the light-emitting structure;

an insulating layer disposed on an upper surface of the first conductivity type semiconductor layer and the inclined side surface of the light-emitting structure;

an electrode disposed on an upper surface of the light-emitting structure; and

a current blocking layer disposed between the adhesion layer and the light-emitting structure, the current blocking layer positioned corresponding to a position of the electrode and including an insulating material, wherein the first conductivity type semiconductor layer comprises a roughness pattern portion and a non-patterned portion on the upper surface thereof, wherein the ohmic layer is spaced apart from an outermost side surface of the adhesion layer and vertically overlapped with the insulating layer, and has a second portion directly contacting the electrode layer, wherein the electrode layer comprises an upper surface, a bottom surface, at least two protrusions that extend from the upper surface or the bottom surface and protrude toward the adhesion layer, and a plurality of extension portions disposed under the bottom surface of the channel layer, each of the upper surface and the bottom surface having a different height from an upper surface of the conductive support member, wherein the bottom surface of the electrode layer is continuously formed from one outermost side surface to the other outermost side surface, wherein the at least two protrusions of the electrode layer are vertically overlapped with a portion of the ohmic layer, and wherein the adhesion layer has a top surface corresponding to the bottom surface of the electrode layer and the top surface of the adhesion layer is in contact with the bottom surface of the electrode layer.

2. The light emitting device according to claim 1, wherein the upper surface of the electrode layer is in contact with both the ohmic layer and the bottom surface of the channel layer, and wherein a material of the upper surface of the electrode layer which is in contact with the ohmic layer is same with that of the upper surface of the electrode layer which is in contact with the bottom surface of the channel layer.

3. The light emitting device according to claim 1, wherein the adhesion layer comprises Au, Sn, and Ti, or composite materials thereof.

4. The light emitting device according to claim 1, wherein the conductive support member comprises at least one of Cu, W or CuW.

5. The light emitting device according to claim 1, wherein the adhesion layer comprises a first surface facing the electrode layer, and a second surface facing the conductive support member, wherein the first surface comprises a recess portion positioned between the at least two protrusions of the electrode layer facing the light-emitting structure, and wherein the second surface comprises a bottom surface positioned corresponding to the conductive support member.

6. The light emitting device according to claim 1, wherein each of the at least two protrusions of the electrode layer is vertically disposed between the current blocking layer and the channel layer.

7. The light emitting device according to claim 1, wherein the one outermost side surface of the electrode layer is aligned with outermost side surfaces of the channel layer or the insulating layer.

8. The light emitting device according to claim 1, wherein the channel layer is in contact with the second conductivity type semiconductor layer and a bottom surface of the insulating layer, and wherein the plurality of extension portions of the electrode layer is disposed lower than the ohmic layer and the channel layer.

9. The light emitting device according to claim 1, wherein the insulating layer and the channel layer respectively comprise a first and a second flat extended portion extended to an outer side of the light-emitting structure and disposed on the adhesion layer.

10. The light emitting device according to claim 9, wherein the insulating layer and the channel layer comprise the same material selected from at least one of SiO₂, SiOx, SixOy, Al₂O₃, TiO₂, Si₃N₄, SixNy, SiOxNy, or AlN.

11. The light emitting device according to claim 1, wherein the adhesion layer comprises at least one protrusion protruding toward the light-emitting structure, and wherein the at least one protrusion is disposed between the plurality of extension portions.

12. A light emitting device package, comprising the light emitting device according to claim 1.

13. The light emitting device according to claim 1, wherein the electrode layer is in contact with an internal side surface of the channel layer.

14. The light emitting device according to claim 1, wherein the active layer includes an InGaN well layer and AlGaN barrier layer.

15. A light emitting device, comprising

a conductive support member;

an adhesion layer including a barrier metal layer and a bonding metal layer on the conductive support member;

an electrode layer having a first multi-layer structure on the adhesion layer;

an ohmic layer having a second multi-layer structure on the electrode layer;

a light-emitting structure disposed on the ohmic layer, the light-emitting structure having at least one portion of a bottom surface directly in contact with the ohmic layer and an inclined side surface, the light-emitting structure including a first conductivity type semiconductor layer, a second conductivity type semiconductor layer and an active layer disposed between the first conductivity type semiconductor layer and the second conductivity type semiconductor layer;

a channel layer disposed on the adhesion layer, the channel layer disposed under a plurality of peripheral portions of the bottom surface of the light-emitting structure;

an insulating layer disposed on an upper surface of the first conductivity type semiconductor layer and the inclined side surface of the light-emitting structure;

an electrode disposed on an upper surface of the light-emitting structure; and

a current blocking layer disposed between the adhesion layer and the light-emitting structure, the current blocking layer positioned corresponding to a position of the electrode and including an insulating material, wherein the first conductivity type semiconductor layer comprises a roughness pattern portion and a non-patterned portion on the upper surface thereof, wherein the ohmic layer is spaced apart from an outermost side surface of the adhesion layer and the ohmic layer comprises a first portion vertically overlapped with the insulating layer, and has a portion directly contacting the electrode layer, wherein the electrode layer comprises an upper surface, a bottom surface, at least two protrusions that extend from the upper surface or the bottom surface and protrude toward the adhesion layer, and a plurality of extension portions disposed under the bottom surface of the channel layer and vertically disposed between the current blocking layer and the channel layer, respectively, each of the upper surface and the bottom surface having a different height from an upper surface of the conductive support member, wherein the bottom surface of the electrode layer is continuously formed from one outermost side surface to the other outermost side surface, wherein the at least two protrusions of the electrode layer are vertically overlapped with the ohmic layer, wherein the adhesion layer has a top surface corresponding to the bottom surface of the electrode layer and the top surface of the adhesion layer is in contact with the bottom surface of the electrode layer, wherein the adhesion layer comprises a first surface facing the electrode layer, and a second surface facing the conductive support member, wherein the first surface comprises a recess portion positioned between the at least two protrusions of the electrode layer facing the light-emitting structure, and wherein the second surface comprises a bottom surface positioned corresponding to the conductive support member.

16. The light emitting device according to claim 15, wherein the adhesion layer comprises at least one protrusion protruding toward the light-emitting structure, and wherein the at least one protrusion is disposed between the plurality of extension portions.

17. The light emitting device according to claim 15, wherein the one outermost side surface of the electrode layer is aligned with outermost side surfaces of the channel layer and the insulating layer.

18. The light emitting device according to claim 15, wherein the channel layer is in contact with the second conductivity type semiconductor layer and a bottom surface of the insulating layer, and wherein the plurality of extension portions of the electrode layer are disposed lower than the ohmic layer and the channel layer.

19. The light emitting device according to claim 15, wherein the adhesion layer comprises Au, Sn, and Ti, or composite materials thereof, and wherein the conductive support member comprises at least one of Cu, W or CuW.