Acoustic transducer and microphone using the acoustic transducer
First Claim
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1. An acoustic transducer, comprising:
- a substrate having an opening that is configured to receive a sound wave;
a vibrating electrode provided adjacent to the opening in the substrate, the vibrating electrode having;
a first vibrating portion;
a second vibrating portion that is smaller than the first vibrating portion, the second vibrating portion extending from one side of the first vibrating portion;
a continuous slit partially between the first vibrating portion and the second vibrating portion of the vibrating electrode;
a first anchor portion and a second anchor portion coupled between the first vibrating portion and the second vibrating portion, the continuous slit extending between and aligned with the first and second anchor portion; and
a fixed membrane having a fixed electrode, the vibrating and the fixed electrode being configured to output electrical signals based on changes in capacitances between the vibrating electrode and the fixed electrode in response to the sound wave.
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Abstract
Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane, provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane, provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.
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Citations
32 Claims
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1. An acoustic transducer, comprising:
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a substrate having an opening that is configured to receive a sound wave; a vibrating electrode provided adjacent to the opening in the substrate, the vibrating electrode having; a first vibrating portion; a second vibrating portion that is smaller than the first vibrating portion, the second vibrating portion extending from one side of the first vibrating portion; a continuous slit partially between the first vibrating portion and the second vibrating portion of the vibrating electrode; a first anchor portion and a second anchor portion coupled between the first vibrating portion and the second vibrating portion, the continuous slit extending between and aligned with the first and second anchor portion; and a fixed membrane having a fixed electrode, the vibrating and the fixed electrode being configured to output electrical signals based on changes in capacitances between the vibrating electrode and the fixed electrode in response to the sound wave. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A microphone, comprising:
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an acoustic transducer that includes; a substrate having an opening that is configured to receive a sound wave; a vibrating electrode, provided adjacent to the opening in the substrate, the vibrating electrode having; a first vibrating portion and a second vibrating portion that is smaller than the first vibrating portion, the second vibrating portion extending from one side of the first vibrating portion; a continuous slit partially between the first vibrating portion and the second vibrating portion of the vibrating electrode; and a first anchor portion and a second anchor portion coupled between the first vibrating portion and the second vibrating portion, the continuous slit extending between and aligned with the first and second anchor portions; and a fixed membrane, provided adjacent to the opening in the substrate, the fixed membrane including a fixed electrode, the vibrating electrode and the fixed electrode being configured to output electrical signals based on changes in capacitances between the vibrating electrode and the fixed electrode in response to the sound wave; an integrated circuit configured to supply electric power to the acoustic transducer, to receive the electrical signals from, to amplify the electrical signals from the acoustic transducer, and to externally output the electrical signals. - View Dependent Claims (21, 22, 23, 24, 25)
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26. A device, comprising:
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a substrate having an opening; and a vibrating electrode coupled to the substrate, the vibrating electrode having a first vibrating portion and a second vibrating portion that extends from one side of the first vibrating portion, the first vibrating portion and the second vibrating portion being suspended adjacent to the opening, the first vibrating portion being partially separated from the second vibrating portion by a continuous gap that extends from a first location and a second location, the first location being at a first end of the continuous gap, the second location being at a second end of the continuous gap, the second vibrating portion is mechanically coupled to the first vibrating portion at the first end and the second end of the continuous gap, and the first vibrating portion being larger than the second vibrating portion. - View Dependent Claims (27, 28)
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29. An acoustic transducer, comprising:
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a substrate having an opening; a vibrating electrode adjacent to the opening in the substrate, the vibrating electrode having a first vibrating portion and a second vibrating portion that is smaller than the first vibrating portion, the second vibrating portion extending from one side of the first vibrating portion, the first vibrating portion and the second vibrating portion are completely separated by a slit; and a fixed membrane having a fixed electrode, the vibrating and fixed electrodes being configured to output electrical signals based on changes in capacitances between the vibrating electrode and the fixed electrode in response to the sound wave. - View Dependent Claims (30)
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31. A microphone, comprising:
an acoustic transducer that includes; a substrate having an opening; a vibrating electrode adjacent to the opening in the substrate, the vibrating electrode having a first vibrating portion and a second vibrating portion that is smaller than the first vibrating portion, the second vibrating portion extending from one side of the first vibrating portion, the first vibrating portion being completely separated from the second vibrating portion by a slit; and a fixed membrane adjacent to the opening in the substrate, the fixed membrane including a fixed electrode; and an integrated circuit configured to supply electric power to the acoustic transducer, to receive electrical signals from vibrating electrode and the fixed electrode, to amplify the electrical signals from the acoustic transducer, and to externally output the electrical signals. - View Dependent Claims (32)
Specification