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Acoustic transducer and microphone using the acoustic transducer

  • US 9,936,305 B2
  • Filed: 12/22/2011
  • Issued: 04/03/2018
  • Est. Priority Date: 01/07/2011
  • Status: Active Grant
First Claim
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1. An acoustic transducer, comprising:

  • a substrate having an opening that is configured to receive a sound wave;

    a vibrating electrode provided adjacent to the opening in the substrate, the vibrating electrode having;

    a first vibrating portion;

    a second vibrating portion that is smaller than the first vibrating portion, the second vibrating portion extending from one side of the first vibrating portion;

    a continuous slit partially between the first vibrating portion and the second vibrating portion of the vibrating electrode;

    a first anchor portion and a second anchor portion coupled between the first vibrating portion and the second vibrating portion, the continuous slit extending between and aligned with the first and second anchor portion; and

    a fixed membrane having a fixed electrode, the vibrating and the fixed electrode being configured to output electrical signals based on changes in capacitances between the vibrating electrode and the fixed electrode in response to the sound wave.

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