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Alignment apparatus and alignment detection method

  • US 9,939,248 B2
  • Filed: 02/01/2016
  • Issued: 04/10/2018
  • Est. Priority Date: 09/23/2015
  • Status: Active Grant
First Claim
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1. An alignment apparatus, comprising:

  • a work table;

    a plurality of alignment rods provided on the work table, wherein a capacitor element is provided inside the alignment rod, and a capacitance of the capacitor element is changeable as the alignment rod deforms; and

    an alarm element connected to the capacitor element for giving an alarm when it receives a capacitance change value which exceeds a preset threshold value.

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