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Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body

  • US 9,939,268 B2
  • Filed: 09/03/2015
  • Issued: 04/10/2018
  • Est. Priority Date: 09/05/2014
  • Status: Active Grant
First Claim
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1. A physical quantity sensor element comprising:

  • a driving portion which vibrates in a first direction along a first axis orthogonal to a reference surface, the driving portion having a first side, a second side, a third side, and a fourth side, the first side opposing the third side and the second side opposing the fourth side;

    a detecting portion which vibrates in a second direction along a second axis in the reference surface due to an inertial force acting on the driving portion, the detecting portion having a first side, a second side, a third side, and a fourth side that coincide with the first side, the second side, the third side, and the fourth side of the driving portion;

    a first beam portion which connects the driving portion and the detecting portion with each other, the first beam portion connecting the driving portion and the detecting portion only on the respective first sides and third sides of the driving portion and the detecting portion;

    a fixing portion fixed to a base substrate;

    a second beam portion which connects the detecting portion and the fixing portion, the second beam portion connecting the detecting portion only on the second side and the fourth side;

    a detecting fixed electrode portion disposed on the base substrate along the first side and the third side of the detecting portion; and

    a driving fixed electrode portion disposed on a recessed portion in the base substrate,wherein the driving fixed electrode portion is connected to a terminal along an axis parallel to the second axis and the detecting fixed electrode portion is connected to a terminal along an axis parallel to the second axis,wherein the second axis is parallel to an axis extending orthogonal to the second side and the fourth side of the detecting portion,wherein a spring constant of the first beam portion in the first direction is smaller than a spring constant of the second beam portion in the first direction, andwherein a spring constant of the second beam portion in the first direction is greater than a spring constant of the second beam portion in the second direction.

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