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System and method for a capacitive thermometer

  • US 9,939,331 B2
  • Filed: 05/21/2014
  • Issued: 04/10/2018
  • Est. Priority Date: 05/21/2014
  • Status: Active Grant
First Claim
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1. A circuit comprising:

  • a capacitive microelectromechanical system (MEMS) thermometer comprising a deflectable membrane and a sense electrode, wherein the deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane, whereinthe sense electrode comprises a rigid sense electrode,the deflectable membrane forms a parallel plate capacitor with the rigid sense electrode,the capacitive MEMS thermometer further comprisesa first thermal material with a first coefficient of thermal expansion, anda second thermal material with a second coefficient of thermal expansion different from the first coefficient of thermal expansion, wherein the first and second thermal materials are configured to cause the deflectable membrane to deflect based on the temperature of the capacitive MEMS thermometer, andthe deflectable membrane comprises the first and second thermal materials.

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