System and method for a capacitive thermometer
First Claim
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1. A circuit comprising:
- a capacitive microelectromechanical system (MEMS) thermometer comprising a deflectable membrane and a sense electrode, wherein the deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane, whereinthe sense electrode comprises a rigid sense electrode,the deflectable membrane forms a parallel plate capacitor with the rigid sense electrode,the capacitive MEMS thermometer further comprisesa first thermal material with a first coefficient of thermal expansion, anda second thermal material with a second coefficient of thermal expansion different from the first coefficient of thermal expansion, wherein the first and second thermal materials are configured to cause the deflectable membrane to deflect based on the temperature of the capacitive MEMS thermometer, andthe deflectable membrane comprises the first and second thermal materials.
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Abstract
Various embodiments disclosed herein include a capacitive thermometer including a deflectable membrane and a sense electrode. The deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane.
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Citations
24 Claims
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1. A circuit comprising:
a capacitive microelectromechanical system (MEMS) thermometer comprising a deflectable membrane and a sense electrode, wherein the deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane, wherein the sense electrode comprises a rigid sense electrode, the deflectable membrane forms a parallel plate capacitor with the rigid sense electrode, the capacitive MEMS thermometer further comprises a first thermal material with a first coefficient of thermal expansion, and a second thermal material with a second coefficient of thermal expansion different from the first coefficient of thermal expansion, wherein the first and second thermal materials are configured to cause the deflectable membrane to deflect based on the temperature of the capacitive MEMS thermometer, and the deflectable membrane comprises the first and second thermal materials. - View Dependent Claims (2, 3)
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4. A circuit comprising:
a capacitive microelectromechanical system (MEMS) thermometer comprising a deflectable membrane and a sense electrode, wherein the deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane, wherein the capacitive MEMS thermometer comprises; a first cavity containing a first fluid with a first coefficient of thermal expansion; an overpressure cavity formed adjacent to the first cavity and separated from the first cavity, the sense electrode formed as a rigid sense electrode overlying the first cavity and the overpressure cavity, wherein the sense electrode is configured to seal a top opening of the first cavity and the overpressure cavity, and a second cavity containing a second fluid with a second coefficient of thermal expansion different from the first coefficient of thermal expansion, wherein the second cavity is in fluid communication with the overpressure cavity, the deflectable membrane separating the first cavity from the second cavity. - View Dependent Claims (5, 6)
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7. A wireless device comprising:
a radio frequency (RF) circuit, the RF circuit comprising; an inductive element; and a capacitor coupled to the inductive element, wherein the capacitor comprises a capacitive thermometer with a mechanically deflectable membrane configured to adjust a capacitive value proportionally to a change in temperature. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A capacitive thermometer comprising:
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a first cavity; a second cavity formed beneath the first cavity; a third cavity formed beneath the second cavity; a deflectable membrane separating the first cavity from the second cavity, the deflectable membrane comprising a first material having a first coefficient of thermal expansion and a second material having a second coefficient of thermal expansion different from the first coefficient of thermal expansion, wherein the deflectable membrane comprises a ventilation hole; a first perforated sense electrode separating the second cavity from the third cavity, wherein the electrode is separated from the membrane by a separation distance and is capacitively coupled to the membrane; a first protective layer formed over the first cavity and sealing the first cavity; and a second protective layer formed beneath the third cavity and sealing the third cavity. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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Specification