Microwave plasma device

• US 9,941,126 B2
• Filed: 06/19/2014
• Issued: 04/10/2018
• Est. Priority Date: 06/19/2013
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Funk, Merritt, Zhao, Jianping, Chen, Lee
• Primary Examiner(s): DHINGRA, RAKESH KUMAR
• Application Number:
  US14/309,090
• Publication Number:
  US 20140377966A1
• Time in Patent Office: 1,391 Days
• Field of Search: 15634541, 118723 MW
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/3222 Antennas
• CPC Class Codes: H01J 37/32266 Means for controlling power transmitted to the plasma
• CPC Class Codes: H01L 21/268 using electromagnetic radiation, e.g. laser radiation

Abstract

A processing system is disclosed, having a power transmission element with an interior cavity that propagates electromagnetic energy proximate to a continuous slit in the interior cavity. The continuous slit forms an opening between the interior cavity and a substrate processing chamber. The electromagnetic energy may generate an alternating charge in the continuous slit that enables the generation of an electric field that may propagate into the processing chamber. The electromagnetic energy may be conditioned prior to entering the interior cavity to improve uniformity or stability of the electric field. The conditioning may include, but is not limited to, phase angle, field angle, and number of feeds into the interior cavity.

Claims

1. A plasma processing system, comprising:

a plasma chamber comprising a plasma processing region that can support a semiconductor substrate;

a power transmission element comprising;

(i) a first interior cavity to propagate electromagnetic waves,

(ii) an annular continuous slit along one side of the power transmission element, the annular continuous slit forming an annular continuous opening between the first interior cavity and an exterior surface of the power transmission element,

(iii) a first power feed opening of the first interior cavity to receive the electromagnetic waves, and

(iv) a first power distribution element disposed within the first interior cavity and opposite the power feed opening and the annular continuous slit, the first power distribution element comprising a geometry that splits the electromagnetic waves along opposing directions within the first interior cavity;

a microwave power source that can provide the electromagnetic waves to the power transmission element;

a dielectric component arranged to cover at least a portion of the annular continuous slit and to transmit at least a portion of energy from the electromagnetic waves through the annular continuous opening;

the plasma processing region disposed adjacent to the power transmission element; and

a microwave plasma source disposed above the plasma chamber and opposite the plasma processing region, the microwave plasma source including;

(i) a second power feed opening that is in electrical communication with the microwave power source to receive the electromagnetic waves, and

(ii) a microwave cavity disposed above the plasma processing region, the microwave cavity including;

(a) an enclosure that enables the propagation of the electromagnetic waves and is fluidically isolated from the plasma processing region, and

(b) a plurality of cylindrical dielectric poles that each (1) are positioned within the enclosure and extend from the enclosure to a position in the plasma processing region above the dielectric component, (2) propagate energy from the enclosure to the plasma processing region, and (3) have a diameter that is less than or equal to ¼

of the wavelength of the electromagnetic waves.

2. The system of claim 1, further comprising:

a splitter disposed in electrical communication with the microwave power source, the power transmission element, and the microwave plasma source, and the splitter divides the electromagnetic waves between the first power feed opening and the second power feed opening.

3. The system of claim 2, wherein the microwave plasma source comprises a second power transmission element comprising a second power distribution element comprising a geometry that splits the electromagnetic waves along opposing directions within the second power transmission element.

4. The system of claim 2, further comprising:

a phase shifter component disposed between the splitter and the first power feed opening or the second feed opening, the phase shifter can shift a phase angle of the electromagnetic waves such that the phase angles of the electromagnetic waves through the first power feed opening and the second power feed opening are different or equal.

5. The system of claim 4, further comprising:

one or more field rotation components disposed between the microwave power source and the power transmission element or the microwave plasma source, the field rotation components can rotate the field of the electromagnetic waves.

6. The system of claim 2, further comprising:

one or more field rotation components disposed between the microwave power source and the power transmission element or the microwave plasma source, the field rotation components can rotate a field of the electromagnetic waves.

7. The system of claim 1, wherein the microwave plasma source is disposed adjacent to the power transmission element.

8. The plasma processing chamber of claim 1, wherein the plurality of cylindrical dielectric poles each comprise:

a length that is greater than a distance that enables the cylindrical dielectric pole to propagate at least a portion of the electromagnetic wave from the microwave cavity to the plasma processing region.

9. The plasma processing chamber of claim 8, wherein the plurality of cylindrical dielectric poles are at least a ¼

wavelength apart from each other.

10. The plasma processing system of claim 8, wherein the first power feed opening or the second power feed opening comprises one or more of the following disposed between power transmission element and the microwave power source:

a splitter component to split the electromagnetic waves provided by the microwave power source;

a phase angle shifting component to shift a phase angle of the electromagnetic waves provided by the microwave power source;

or

a field rotation component to rotate a field of the electromagnetic waves provided by the microwave power source.

11. The plasma processing system of claim 8, wherein the first power feed opening or the second power feed opening comprises two or more of the following disposed between power transmission element and the microwave power source:

a splitter component to split the electromagnetic waves provided by the microwave power source;

a phase angle shifting component to shift a phase angle of the electromagnetic waves provided by the microwave power source;

or

a field rotation component to rotate a field of the electromagnetic waves provided by the microwave power source.

12. The plasma processing system of claim 8, wherein the first power feed opening or the second power feed opening comprises all of the following components disposed between power transmission element and the microwave power source:

a splitter component to split the electromagnetic waves provided by the microwave power source;

a phase angle shifting component to shift a phase angle of the electromagnetic waves provided by the microwave power source; and

a field rotation component to rotate a field of the electromagnetic waves provided by the microwave power source.

13. The plasma processing system of claim 1, wherein the first power distribution element is a vertical protrusion.

14. The plasma processing system of claim 1, wherein the power transmission element is disposed on a vertical side wall.