Method of manufacturing organic light-emitting diode display

• US 9,941,474 B2
• Filed: 09/09/2015
• Issued: 04/10/2018
• Est. Priority Date: 12/31/2014
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Kim, Sunho, Koo, Hyunwoo, Kim, Kihyun, Kim, Jeongho, Kim, Taewoong, Mo, Yeongon
• Primary Examiner(s): Bachner, Robert
• Assistant Examiner(s): REIDA, MOLLY KAY
• Application Number:
  US14/849,371
• Publication Number:
  US 20160190523A1
• Time in Patent Office: 944 Days
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/40 OLEDs integrated with touch screens
• CPC Class Codes: H10K 59/873 Encapsulations
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/80 using temporary substrates

Abstract

A method of manufacturing an OLED display is disclosed. In one aspect, the method includes providing a donor substrate including a material formed on one surface thereof and heating the material so as to form a barrier thin-film on the donor substrate. The method also includes providing an acceptor substrate and a substrate attached to the acceptor substrate, forming an OLED unit over the substrate, bonding the OLED unit and the barrier thin-film together, and irradiating a laser beam on the barrier thin-film so as to delaminate the donor substrate from the barrier thin-film.

Claims

1. A method of manufacturing an organic light-emitting diode (OLED) display, the method comprising:

providing a donor substrate;

forming a sacrificial layer over the donor substrate, wherein the sacrificial layer has upper and lower portions, wherein the upper portion of the sacrificial layer contacts the donor substrate;

forming a barrier thin-film on the sacrificial layer at a first temperature;

providing an acceptor substrate and a substrate attached to the acceptor substrate;

forming an OLED unit over the substrate below a second temperature;

bonding the OLED unit and the barrier thin-film together;

irradiating a laser beam to the sacrificial layer so as to delaminate the upper portion of the sacrificial layer from the lower portion of the sacrificial layer, wherein the first temperature is higher than the second temperature,

attaching an upper protective film on the lower portion of the sacrificial layer after the irradiating;

removing the upper protective film from the lower portion of the sacrificial layer; and

attaching a polarizing film, a touch screen panel (TSP), and a window onto the lower portion of the sacrificial layer.

2. The method of claim 1, wherein the sacrificial layer is formed of a material which is not disintegrated at a temperature of about 550°

C. or less.

3. The method of claim 1, wherein the sacrificial layer is formed of an inorganic material including hydrogen of about 4 wt % or more.

4. The method of claim 1, wherein the sacrificial layer is formed of an oxide, a nitride, a dielectric, or a semiconductor.

5. The method of claim 1, wherein the barrier thin-film has a thickness substantially the same as the sacrificial layer.

6. The method of claim 1, wherein the barrier thin-film includes an inorganic single layer, an inorganic multi-layer, or an organic and inorganic multi-layer.

7. The method of claim 1, further comprising forming a buffer layer over the OLED unit after forming the OLED unit over the substrate.

8. The method of claim 1, further comprising irradiating a laser beam on the substrate so as to delaminate the acceptor substrate from the substrate after delaminating the upper portion of the sacrificial layer from the lower portion of the sacrificial layer.

9. The method of claim 8, further comprising attaching a protective film to the substrate after delaminating the acceptor substrate.

10. The method of claim 1, wherein the bonding includes aligning the donor substrate to the acceptor substrate and performing the bonding in a vacuum environment.

11. A method of manufacturing an organic light-emitting diode (OLED) display, the method comprising:

providing a donor substrate;

forming a sacrificial layer over the donor substrate, wherein the sacrificial layer has upper and lower portions, wherein the upper portion of the sacrificial layer contacts the donor substrate;

forming a barrier thin-film on the sacrificial layer at a first temperature so as to form a donor portion;

attaching an intermediate substrate to an acceptor substrate so as to form an acceptor portion;

forming an OLED unit over the intermediate substrate below a second temperature;

bonding the OLED unit and the barrier thin-film together so as to attach the acceptor portion to the donor portion;

delaminating the upper portion of the sacrificial layer from the lower portion of the sacrificial layer, wherein the first temperature is higher than the second temperature;

attaching an upper protective film on the lower portion of the sacrificial layer after the delaminating;

removing the upper protective film from the lower portion of the sacrificial layer; and

attaching a polarizing film, a touch screen panel (TSP), and a window onto the lower portion of the sacrificial layer.

12. The method of claim 11, further comprising irradiating a laser beam on the intermediate substrate so as to delaminate the acceptor substrate from the intermediate substrate after delaminating the upper portion of the sacrificial layer from the lower portion of the sacrificial layer.

13. The method of claim 12, further comprising attaching a lower protective film to the intermediate substrate after delaminating the acceptor substrate.

14. The method of claim 11, wherein the bonding includes aligning the donor substrate to the acceptor substrate and performing the bonding in a vacuum environment.