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Hybrid vertical cavity light emitting sources

  • US 9,941,663 B2
  • Filed: 05/17/2012
  • Issued: 04/10/2018
  • Est. Priority Date: 03/27/2009
  • Status: Active Grant
First Claim
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1. A vertical cavity light emitting source comprising:

  • (a) a lower reflector comprising a first patterned membrane comprising an array of holes patterned into a layer of semiconductor;

    (b) an active region disposed over the lower reflector, wherein the active region is separated from the lower reflector by at least one intra-cavity electrically conductive metal contact disposed between an outermost surface of the active region and the lower reflector, and further wherein the active region comprises a light-emitting region, a first cladding layer, a second cladding layer, a first contact layer comprising a doped semiconductor and a second contact layer comprising a doped semiconductor, wherein the light-emitting region is between the first and second cladding layers and the first and second cladding layers are between the first and second contact layers; and

    (c) an upper reflector comprising a second patterned membrane comprising an array of holes patterned into a layer of semiconductor disposed over the active region, wherein the upper reflector is separated from the active region by at least one intra-cavity electrically conductive metal contact disposed between the upper reflector and an outermost surface of the active region.

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