Method of manufacture MEMS switches with reduced voltage
First Claim
1. A method of fabricating a switch comprising:
- forming a first fixed electrode and a second fixed electrode;
forming a first cantilevered electrode aligned vertically over the first fixed electrode;
forming a second cantilevered electrode aligned vertically over the first fixed electrode, and which has an end that overlaps and is parallel to an end of the first cantilevered electrode;
forming a third cantilevered electrode aligned vertically over the second fixed electrode and operable to directly contact the first cantilever electrode upon an application of a positive voltage to the second fixed electrode;
forming an extending protrusion which extends upward from an upper surface of an arm of the first cantilever electrode which is positioned under the third cantilevered electrode; and
forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
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Accused Products
Abstract
An approach includes a method of fabricating a switch. The approach includes forming a first fixed electrode and a second fixed electrode, forming a first cantilevered electrode aligned vertically over the first fixed electrode, forming a second cantilevered electrode aligned vertically over the first fixed electrode and which has an end that overlaps the first cantilevered electrode, forming a third cantilevered electrode aligned vertically over the second fixed electrode and operable to directly contact the first cantilevered electrode upon an application of a voltage to the second fixed electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.
63 Citations
11 Claims
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1. A method of fabricating a switch comprising:
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forming a first fixed electrode and a second fixed electrode; forming a first cantilevered electrode aligned vertically over the first fixed electrode; forming a second cantilevered electrode aligned vertically over the first fixed electrode, and which has an end that overlaps and is parallel to an end of the first cantilevered electrode; forming a third cantilevered electrode aligned vertically over the second fixed electrode and operable to directly contact the first cantilever electrode upon an application of a positive voltage to the second fixed electrode; forming an extending protrusion which extends upward from an upper surface of an arm of the first cantilever electrode which is positioned under the third cantilevered electrode; and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of fabricating a switch comprising:
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forming a first fixed electrode and a second fixed electrode; forming a first cantilevered electrode aligned vertically over the first fixed electrode; forming a second cantilevered electrode aligned vertically over the first fixed electrode, and which has an end that overlaps the first cantilevered electrode; forming a third cantilevered electrode aligned vertically over the second fixed electrode and operable to directly contact the first cantilever electrode upon an application of a voltage to the second fixed electrode; and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode, wherein the forming the hermetically sealed volume comprises; forming at least one hole in a nitride liner to gain access to a sacrificial resist; etching the sacrificial resist; and closing the at least one hole by deposition of additional liner material.
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Specification