Rotation rate sensor and a method for operating a rotation rate sensor

• US 9,945,669 B2
• Filed: 05/05/2014
• Issued: 04/17/2018
• Est. Priority Date: 05/14/2013
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Balslink, Thorsten, Scheben, Rolf, Schmidt, Benjamin, Ameling, Ralf, Hattass, Mirko, Kuhlmann, Burkhard, Maul, Robert
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): Hernandez-Prewitt, Roger
• Application Number:
  US14/890,559
• Publication Number:
  US 20160084653A1
• Time in Patent Office: 1,443 Days
• Field of Search: 7350412, 74 57, 74 537
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure

Abstract

A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor include: a first rotational element, a second rotational element and a drive structure moveable in parallel to the drive plane, the first rotational element being drivable about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element being drivable about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure being (i) coupled to the first and second rotational elements, and (ii) configured to generate a drive mode in phase opposition of the first and second rotational vibrations.

Claims

1. A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor, comprising:

a first rotational element;

a second rotational element; and

a drive structure moveable in parallel to the drive plane;

wherein the first rotational element is driven about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element is driven about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure is coupled to the first rotational element and to the second rotational element, and the drive structure is configured to generate a drive mode in phase opposition of the first rotational vibration and the second rotational vibration; and

wherein the drive structure is;

(i) situated linearly moveably along a drive direction;

(ii) configured as a drive frame at least partially surrounding the first rotational element and the second rotational element;

(iii) coupled to the first rotational element and the second rotational element in such a way that the first rotational element and the second rotational element are driven in the opposite direction of one another with the aid of a linear movement of the drive structure along the drive direction.

2. A rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor, comprising:

a first rotational element;

a second rotational element; and

a drive structure moveable in parallel to the drive plane;

wherein the first rotational element is driven about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element is driven about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure is coupled to the first rotational element and to the second rotational element, and the drive structure is configured to generate a drive mode in phase opposition of the first rotational vibration and the second rotational vibration; and

wherein the first rotational element and the second rotational element are coupled to one another via a rocker structure having a rocker rotational axis situated in parallel to the rotational axis.

3. The rotation rate sensor as recited in claim 2, wherein the first rotational element and the second rotational element are coupled to one another via only one substrate of at least one of the rotation rate sensor, the drive structure, and the rocker structure.

4. The rotation rate sensor as recited in claim 2, wherein one of (i) the drive direction of the drive structure is situated in parallel to the rotational axis, or (ii) the drive direction includes a crown angle to the rotational axis, the crown angle being between 0 degree and 90 degrees starting from the rotational axis in the direction of the drive direction.

5. A rotation rate sensor system, comprising:

at least two rotation rate sensors, wherein each of the two rotation rate sensors is configured for detecting a rotational movement of the rotation rate sensor about a rotational axis extending within a drive plane of the rotation rate sensor, and wherein each of the two rotation rate sensor includes;

a first rotational element;

a second rotational element; and

a drive structure moveable in parallel to the drive plane;

wherein the first rotational element is driven about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, the second rotational element is driven about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane, the drive structure is coupled to the first rotational element and to the second rotational element, and the drive structure is configured to generate a drive mode in phase opposition of the first rotational vibration and the second rotational vibration;

wherein the rotation rate sensor system is configured for detecting at least two rotation rates about at least two different rotational axes, and wherein the drive structures of the at least two rotation rate sensors are coupled to one another.

6. A method for operating a rotation rate sensor for detecting a rotational movement of the rotation rate sensor about a rotational axis, the rotational axis being situated within a drive plane of the rotation rate sensor, the method comprising:

coupling a drive structure to a first rotational element and to a second rotational element; and

moving the drive structure in parallel to the drive plane, wherein the first rotational element is driven about a first center of rotation to achieve a first rotational vibration in parallel to the drive plane, and the second rotational element is driven about a second center of rotation to achieve a second rotational vibration in parallel to the drive plane;

wherein a drive mode in phase opposition of the first rotational vibration and the second rotational vibration is generated with the aid of the drive structure; and

wherein the drive structure is moved linearly along a drive direction to generate the drive mode in phase opposition of the first rotational vibration and the second rotational vibration.

7. The method as recited in claim 6, wherein a recess for anchoring to a substrate of the rotation rate sensor is situated on the first rotational element in the area of the first center of rotation, and a recess for anchoring to a substrate of the rotation rate sensor is situated on the second rotational element in the area of the second center of rotation.

8. The method as recited in claim 6, wherein the first rotational element and the second rotational element are coupled to one another via a rocker structure having a rocker rotational axis situated in parallel to the rotational axis, and wherein a detection mode in phase opposition of a first detection vibration of the first rotational element and a second detection vibration of the second rotational element is generated with the aid of the rocker structure.

9. The method as recited in claim 6, wherein the first rotational element and the second rotational element are coupled to one another via only one substrate of at least one of the rotation rate sensor, the drive structure, and the rocker structure.