Arrays of integrated analytical devices and methods for production
First Claim
1. An analytical system for the simultaneous measurement of multiple reactions comprising:
- an array of integrated analytical devices; and
an excitation light source;
wherein the array of integrated analytical devices comprises;
a substrate layer;
a filter module layer disposed on the substrate layer;
a collection module layer disposed on or with the filter module layer, wherein the collection module layer comprises a Fresnel lens structure configured to split a light beam into a plurality of light beams;
a waveguide module layer disposed on the collection module layer; and
a zero-mode waveguide module layer disposed on the waveguide module layer;
wherein the zero-mode waveguide module layer comprises a plurality of nanometer-scale apertures penetrating into the waveguide module layer.
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Abstract
Arrays of integrated analytical devices and their methods for production are provided. The arrays are useful in the analysis of highly multiplexed optical reactions in large numbers at high densities, including biochemical reactions, such as nucleic acid sequencing reactions. The integrated devices allow the highly sensitive discrimination of optical signals using features such as spectra, amplitude, and time resolution, or combinations thereof. The arrays and methods of the invention make use of silicon chip fabrication and manufacturing techniques developed for the electronics industry and highly suited for miniaturization and high throughput.
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Citations
25 Claims
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1. An analytical system for the simultaneous measurement of multiple reactions comprising:
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an array of integrated analytical devices; and an excitation light source; wherein the array of integrated analytical devices comprises; a substrate layer; a filter module layer disposed on the substrate layer; a collection module layer disposed on or with the filter module layer, wherein the collection module layer comprises a Fresnel lens structure configured to split a light beam into a plurality of light beams; a waveguide module layer disposed on the collection module layer; and a zero-mode waveguide module layer disposed on the waveguide module layer; wherein the zero-mode waveguide module layer comprises a plurality of nanometer-scale apertures penetrating into the waveguide module layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification