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Force-sensing capacitor elements, deformable membranes and electronic devices fabricated therefrom

  • US 9,946,424 B2
  • Filed: 10/14/2015
  • Issued: 04/17/2018
  • Est. Priority Date: 11/05/2014
  • Status: Active Grant
First Claim
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1. A deformable membrane comprising:

  • a first layer having first and second major surfaces;

    a second layer having first and second major surfaces;

    a third layer having first and second major surfaces interposed between the second major surface of the first layer and the second major surface of the second layer;

    a first arrangement comprising a plurality of first structures, with corresponding first void regions, interposed between the second major surface of the first layer and the first major surface of the third layer, wherein each first structure has a first surface facing the second major surface of the first layer and a second surface facing the first major surface of the third layer; and

    a second arrangement comprising a plurality of second structures, with corresponding second void regions, interposed between the second major surface of the second layer and the second major surface of the third layer, wherein each second structure has a first surface facing the second major surface of the second layer and a second surface facing the second major surface of the third layer; and

    whereini) from about 1% to about 99% of the plurality of first structures have first surfaces that each overlap through the thickness of the deformable membrane with one or more of the first surfaces or with one or more of the second surfaces of the plurality of second structures, orii) from about 1% to about 99% of the plurality of first structures have second surfaces that each overlap through the thickness of the deformable membrane with one or more of the first surfaces or with one or more of the second surfaces of the plurality of second structures,wherein the first structures of the first arrangement are arranged according to a first array comprising a series of repeating lattice of positions,wherein the second structures of the second arrangement are arranged according to a second array comprising a series of repeating lattice of positions, andwherein the first repeating lattice of positions and the second repeating lattice of positions differ by a non-zero bias angle.

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