Temperature stable MEMS resonator
First Claim
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1. A microelectromechanical system (MEMS) resonator comprising:
- a mechanically resonant structure having a first surface and a plurality openings formed in the first surface; and
a compensating material disposed within each of the openings in the first surface to reduce temperature dependence of a resonant frequency of the mechanically resonant structure, wherein the first surface is perpendicular to a height of the mechanically resonant structure and wherein the compensating material fills at least one of the openings from the first surface to a depth less than the height of the mechanically resonant structure.
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Abstract
A resonant member of a MEMS resonator oscillates in a mechanical resonance mode that produces non-uniform regional stresses such that a first level of mechanical stress in a first region of the resonant member is higher than a second level of mechanical stress in a second region of the resonant member. A plurality of openings within a surface of the resonant member are disposed more densely within the first region than the second region and at least partly filled with a compensating material that reduces temperature dependence of the resonant frequency corresponding to the mechanical resonance mode.
9 Citations
18 Claims
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1. A microelectromechanical system (MEMS) resonator comprising:
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a mechanically resonant structure having a first surface and a plurality openings formed in the first surface; and a compensating material disposed within each of the openings in the first surface to reduce temperature dependence of a resonant frequency of the mechanically resonant structure, wherein the first surface is perpendicular to a height of the mechanically resonant structure and wherein the compensating material fills at least one of the openings from the first surface to a depth less than the height of the mechanically resonant structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A microelectromechanical system (MEMS) resonator comprising:
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a mechanically resonant structure having a first surface and a plurality openings formed in the first surface; and a compensating material disposed within each of the openings in the first surface to reduce temperature dependence of a resonant frequency of the mechanically resonant structure, wherein the mechanically resonant structure comprises a serrated surface perpendicular to the first surface.
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10. A method of fabricating a microelectromechanical system (MEMS) resonator, the method comprising:
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forming a mechanically resonant structure having a resonant frequency; forming a plurality openings formed in a first surface of the mechanically resonant structure; and disposing a compensating material within each of the openings in the first surface to reduce temperature dependence of the resonant frequency of the mechanically resonant structure, wherein the first surface is perpendicular to a height of the mechanically resonant structure and wherein disposing the compensating material within each of the openings comprises filling at least one of the openings with compensating material from the first surface to a depth less than the height of the mechanically resonant structure. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A method of fabricating a microelectromechanical system (MEMS) resonator, the method comprising:
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forming a mechanically resonant structure having a resonant frequency; forming a plurality openings formed in a first surface of the mechanically resonant structure; and disposing a compensating material within each of the openings in the first surface to reduce temperature dependence of the resonant frequency of the mechanically resonant structure, wherein forming the mechanically resonant structure comprises forming a mechanically resonant structure having a serrated surface perpendicular to the first surface.
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Specification