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Temperature stable MEMS resonator

  • US 9,948,273 B1
  • Filed: 12/21/2016
  • Issued: 04/17/2018
  • Est. Priority Date: 12/21/2007
  • Status: Active Grant
First Claim
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1. A microelectromechanical system (MEMS) resonator comprising:

  • a mechanically resonant structure having a first surface and a plurality openings formed in the first surface; and

    a compensating material disposed within each of the openings in the first surface to reduce temperature dependence of a resonant frequency of the mechanically resonant structure, wherein the first surface is perpendicular to a height of the mechanically resonant structure and wherein the compensating material fills at least one of the openings from the first surface to a depth less than the height of the mechanically resonant structure.

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