Wire grid polarizer and manufacturing method thereof, and display device

• US 9,952,367 B2
• Filed: 05/07/2015
• Issued: 04/24/2018
• Est. Priority Date: 12/30/2014
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd.
• Original Assignee: BOE Technology Group Co., Ltd.
• Inventors: Li, Yingyi, Wu, Yanbing, Ji, Chunyan
• Primary Examiner(s): FONT, FRANK G
• Application Number:
  US14/890,782
• Publication Number:
  US 20160327713A1
• Time in Patent Office: 1,083 Days
• Field of Search: 35948505, 35948703, 349 96, 4271631, 427466, 430321
• CPC Class Codes: B29D 11/00644 polarizing
• CPC Class Codes: B29K 2033/04 Polymers of esters
• CPC Class Codes: B29K 2105/0002 monomers or prepolymers
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles
• CPC Class Codes: G02F 1/133528 Polarisers
• CPC Class Codes: G02F 1/133548 Wire-grid polarisers

Abstract

Disclosed are a wire grid polarizer and a manufacturing method thereof, and a display device, which relate to the display technical field. The manufacturing method of the wire grid polarizer includes: coating a polymer monomer on the surface of the base substrate; subjecting the polymer monomer at a position corresponding to the resin protrusions to a curing treatment; forming a pattern of the resin protrusions disposed on the surface of the base substrate with intervals being provided between the resin protrusions; forming a metal layer on the surface of the resin protrusions; and forming a pattern of wire grid formed of the metal wires disposed on the surface of the resin protrusions with intervals being provided between the metal wires by a single patterning process, such that each of the metal wires covers at least one surface for polarization of one resin protrusion.

Claims

1. A wire grid polarizer, comprising:

a base substrate;

resin protrusions disposed on a surface of the base substrate with intervals being provided between the resin protrusions; and

metal wires disposed on the surface of the resin protrusions with intervals being provided between the metal wires, the metal wires forming a pattern of wire grid;

wherein each of the metal wires covers and contacts with all surfaces for polarization of the resin protrusions, and the surfaces for polarization are upper surface and side surfaces of the resin protrusions, and the side surfaces are parallel to an arrangement direction of the wire grid;

wherein a thickness of the metal wires on the upper surface is same as a thickness of the metal wires on the side surfaces of the resin protrusions.

2. The wire grid polarizer according to claim 1, wherein a material for forming the resin protrusions comprises an acrylic polymer;

and a material for forming the metal wires comprises at least one selected from the group consisting of elementary substance aluminum, elementary substance copper, and elementary substance iron.

3. The wire grid polarizer according to claim 1, wherein the metal wires are arranged at a period of less than or equal to 100 nm.

4. The wire grid polarizer according to claim 1, wherein each of the metal wires has a width of less than or equal to 50 nm.

5. The wire grid polarizer according to claim 1, wherein a sum of a thickness of the resin protrusions and a thickness of the metal wires is 20 nm to 100 nm.

6. The wire grid polarizer according to claim 1, wherein a material for forming the base substrate comprises at least one selected from the group consisting of glass and quartz, or at least one selected from the group consisting of polyethylene glycol terephthalate and cellulose triacetate.

7. The wire grid polarizer according to claim 1, wherein each of the metal wires covers at least one surface for polarization of one resin protrusion.

8. A display device, comprising the wire grid polarizer according to claim 1.

9. A method for manufacturing a wire grid polarizer, wherein,

the method comprises:

coating a layer of a polymer monomer on a surface of a base substrate;

subjecting the layer of the polymer monomer at a position corresponding to resin protrusions to a curing treatment;

forming a pattern of the resin protrusions disposed on the surface of the base substrate with intervals being provided between the resin protrusions;

forming a metal layer on the surface of the resin protrusions; and

forming a pattern of wire grid formed of metal wires disposed on the surface of the base substrate with intervals being provided between the metal wires by a single patterning process, such that each of the metal wires covers and contacts with all surfaces for polarization of one resin protrusion, wherein a thickness of the metal wires on the upper surface is same as a thickness of the metal wires on the side surfaces of the resin protrusions.

10. The method for manufacturing the wire grid polarizer according to claim 9, wherein forming of the resin protrusions after coating the layer of the polymer monomer on the surface of the base substrate comprises:

disposing a first mask plate on a surface of the layer of the polymer monomer, and exposing a position of the layer of the polymer monomer corresponding to a transparent area of the first mask plate; and

removing the layer of the polymer monomer corresponding to a shielding area of the first mask plate.

11. A method for manufacturing the wire grid polarizer according to claim 9, wherein forming of the resin protrusions after coating the layer of the polymer monomer on the surface of the base substrate comprises:

stamping a stamping die into the layer of the polymer monomer to contact the stamping die with the base substrate;

exposing the polymer monomer within the stamping die; and

separating the stamping die from the polymer monomer subjected to exposure and the base substrate.

12. The method for manufacturing the wire grid polarizer according to claim 11, wherein the stamping die is formed of a transparent material.

13. The method for manufacturing the wire grid polarizer according to claim 10, wherein forming of the pattern of wire grid formed of metal wires disposed on the surface of the base substrate by a patterning process such that each of the metal wires covers a resin protrusion comprises:

coating a photoresist layer on a surface of the metal layer;

forming a photoresist-reserved area corresponding to a pattern of metal wires to be formed and a photoresist-removed area corresponding to other areas on the surface of the metal layer on the surface of the metal layer by a single mask exposure process and a developing process with a second mask plate;

wherein,

a width of an opaque area of the second mask plate is greater than a width of a transparent area of the first mask plate;

or,

the width of the opaque area of the second mask plate is greater than a width of a groove of the stamping die;

etching the metal layer at a position corresponding to the photoresist-removed area; and

removing a photoresist layer corresponding to the photoresist-reserved area to form a pattern of the metal wires.

14. The method for manufacturing the wire grid polarizer according to claim 9, wherein a material for forming the layer of the polymer monomer comprises an acrylic monomer;

and a material for forming the metal layer comprises at least one of elementary substance aluminum, elementary substance copper, and elementary substance iron.

15. The method for manufacturing the wire grid polarizer according to claim 9, wherein a sum of a thickness of the layer of the polymer monomer and a thickness of the metal layer is 20 nm to 100 nm.

16. The method for manufacturing the wire grid polarizer according to claim 9, wherein a material for forming the resin protrusions comprises acrylic polymer;

and a material for forming the metal wires comprises at least one selected from the group consisting of elementary substance aluminum, elementary substance copper, and elementary substance iron.

17. The method for manufacturing the wire grid polarizer according to claim 9, wherein the metal wires are arranged at a period of less than or equal to 100 nm.

18. The method for manufacturing a wire grid polarizer according to claim 9, wherein each of the metal wires has a width of less than or equal to 50 nm.

19. The method for manufacturing the wire grid polarizer according to claim 9, wherein a sum of a thickness of a resin protrusion and a thickness of a metal wire is 20 nm to 100 nm.

20. The method for manufacturing a wire grid polarizer according to claim 9, wherein a material for forming the base substrate includes at least one selected from the group consisting of glass and quartz, or at least one selected from the group consisting of polyethylene glycol terephthalate and cellulose triacetate.