AAO-based light guiding structure and fabrication thereof

• US 9,952,393 B2
• Filed: 06/26/2017
• Issued: 04/24/2018
• Est. Priority Date: 09/13/2014
• Status: Active Grant

• Current Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Original Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Inventors: Dobrinsky, Alexander, Shur, Michael, Gaska, Remigijus
• Primary Examiner(s): Bedtelyon, John M
• Application Number:
  US15/633,103
• Publication Number:
  US 20170299826A1
• Time in Patent Office: 302 Days
• CPC Class Codes: G02B 2006/12035 Materials
• CPC Class Codes: G02B 2006/12104 Mirror; Reflectors or the like
• CPC Class Codes: G02B 6/0096 the lights guides being of the hollow type
• CPC Class Codes: G02B 6/102 for infrared and ultraviolet radiation
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices
• CPC Class Codes: G02B 6/136 by etching
• CPC Class Codes: G02B 6/34 utilising prism or grating G02B6/293 takes precedence
• CPC Class Codes: G02B 6/4204 the coupling comprising intermediate optical elements, e.g. lenses, holograms encapsulated active devices H01S5/02208, H01L33/52
• CPC Class Codes: G02B 6/4239 Adhesive bonding; Encapsulation with polymer material

Abstract

A light guiding structure is provided. The structure includes an anodized aluminum oxide (AAO) layer and a fluoropolymer layer located immediately adjacent to a surface of the AAO layer. Light propagates through the AAO layer in a direction substantially parallel to the fluoropolymer layer. An optoelectronic device can be coupled to a surface of the AAO layer, and emit/sense light propagating through the AAO layer. Solutions for fabricating the light guiding structure are also described.

Claims

1. A structure including:

a reflective layer having a variable spatial reflectivity;

a first anodized aluminum oxide (AAO) layer located adjacent to the reflective layer; and

an optoelectronic device coupled to a side of the first AAO layer, wherein the optoelectronic device is positioned to emit light directed toward the side of the first AAO layer in a direction substantially parallel to the reflective layer.

2. The structure of claim 1, further comprising a coupler coupling the optoelectronic device to the side of the first AAO layer wherein the coupler is formed of a transparent material.

3. The structure of claim 2, wherein the coupler is formed of a fluoropolymer.

4. The structure of claim 1, further comprising a transparent film located between the first AAO layer and the reflective film.

5. The structure of claim 4, further comprising a gap layer located between the reflective layer and the transparent film, wherein the gap layer comprises a transparent fluid.

6. The structure of claim 4, wherein the transparent film comprises a fluoropolymer layer including a plurality of optical elements.

7. The structure of claim 1, wherein the reflective film has a reflectivity that decreases with distance away from the optoelectronic device.

8. The structure of claim 1, wherein the reflective film has a transmissivity that increases with distance away from the optoelectronic device.

9. The structure of claim 1, further comprising:

a fluoropolymer layer located adjacent to an opposing side of the first AAO layer as the reflective layer; and

a second AAO layer located adjacent to an opposing side of the fluoropolymer layer as the first AAO layer.

10. The structure of claim 9, wherein the first and second AAO layers provide a graded index of refraction.

11. A light guiding structure comprising:

a transparent film including a plurality of optical elements, wherein the transparent film is formed of fluoropolymer;

a first anodized aluminum oxide (AAO) layer located adjacent to the transparent film; and

an optoelectronic device coupled to a side of the first AAO layer, wherein the optoelectronic device is positioned to emit light directed toward the side of the first AAO layer in a direction substantially parallel to the transparent film.

12. The structure of claim 11, further comprising a reflective layer located adjacent to an opposite side of the transparent film as the first AAO layer.

13. The structure of claim 12, further comprising a gap layer located between the reflective layer and the transparent film.

14. The structure of claim 11, wherein the plurality of optical elements include surface patterning.

15. The structure of claim 11, wherein the plurality of optical elements include roughness elements.

16. The structure of claim 11, wherein the plurality of optical elements form a photonic crystal.

17. The structure of claim 11, wherein the plurality of optical elements include a set of Fresnel lenses.

18. A method comprising:

fabricating a light guiding structure including;

a first anodized aluminum oxide (AAO) layer; and

a fluoropolymer layer located immediately adjacent to a surface of the first AAO layer, wherein light propagates through the first AAO layer in a direction substantially parallel to the fluoropolymer layer;

forming a plurality of optical elements on a surface of the fluoropolymer layer opposite the first AAO layer; and

coupling an optoelectronic device to a side of the first AAO layer using a transparent material, wherein the optoelectronic device is positioned to emit light directed toward the side of the first AAO layer in a direction substantially parallel to the fluoropolymer layer.

19. The method of claim 18, wherein the fabricating includes:

depositing aluminum droplets on a surface of an aluminum layer;

anodizing a portion of the aluminum layer and the droplets to create the first AAO layer; and

forming the fluoropolymer layer on the first AAO layer.

20. The method of claim 18, further comprising forming a reflective layer located adjacent to an opposite side of the fluoropolymer layer as the first AAO layer, the reflective layer having a variable spatial reflectivity.