Process for making semiconductor dies, chips, and wafers using non-contact measurements obtained from DOEs of NCEM-enabled fill cells on test wafers that include multiple means/steps for enabling NC detection of GATECNT-GATE via opens

• US 9,953,889 B1
• Filed: 09/30/2016
• Issued: 04/24/2018
• Est. Priority Date: 12/16/2015
• Status: Expired due to Fees

• Current Assignee: PDF Solutions
• Original Assignee: PDF Solutions
• Inventors: Lam, Stephen, Ciplickas, Dennis, Brozek, Tomasz, Cheng, Jeremy, Comensoli, Simone, De, Indranil, Doong, Kelvin, Eisenmann, Hans, Fiscus, Timothy, Haigh, Jonathan, Hess, Christopher, Kibarian, John, Lee, Sherry, Liao, Marci, Lin, Sheng-Che, Matsuhashi, Hideki, Michaels, Kimon, O'Sullivan, Conor, Rauscher, Markus, Rovner, Vyacheslav, Strojwas, Andrzej, Strojwas, Marcin, Taylor, Carl, Vallishayee, Rakesh, Weiland, Larg, Yokoyama, Nobuharu
• Primary Examiner(s): Luu, Chuong A
• Application Number:
  US15/281,491
• Time in Patent Office: 571 Days
• Field of Search: 438 11, 438 14, 438 18
• CPC Class Codes: G01R 31/2884 using dedicated test connectors, test elements or test circuits on the IC under test G01R31/2855 takes precedence
• CPC Class Codes: G06F 11/079 Root cause analysis, i.e. error or fault diagnosis in a hardware test environment G06F11/22; in a software test environment G06F11/36
• CPC Class Codes: G06F 30/30 Circuit design
• CPC Class Codes: G06F 30/39 Circuit design at the physical level physical level design for reconfigurable circuits G06F30/347
• CPC Class Codes: G06F 30/392 Floor-planning or layout, e.g. partitioning or placement
• CPC Class Codes: G06F 30/398 Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] optical proximity correction [OPC] design processes G03F1/36
• CPC Class Codes: H01L 2027/11866 Gate electrode terminals or contacts
• CPC Class Codes: H01L 2027/11875 Wiring region, routing
• CPC Class Codes: H01L 2027/11885 Two levels of metal
• CPC Class Codes: H01L 2027/11887 Three levels of metal
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32
• CPC Class Codes: H01L 22/34 Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line switching, multiplexing, gating devices G01R19/25; process control with lithography, e.g. dose control, G03F7/20; structures for alignment control by optical means G03F7/70633
• CPC Class Codes: H01L 23/5226 Via connections in a multilevel interconnection structure
• CPC Class Codes: H01L 23/528 Geometry or layout of the interconnection structure H01L27/0207 takes precedence; algorithms G06F30/00
• CPC Class Codes: H01L 27/0207 Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
• CPC Class Codes: H01L 27/11803 using field effect technology
• CPC Class Codes: H01L 27/11807 CMOS gate arrays
• CPC Class Codes: H01L 29/0649 Dielectric regions, e.g. SiO2 regions, air gaps
• CPC Class Codes: H01L 29/0684 characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
• CPC Class Codes: H01L 29/41725 : Source or drain electrodes for field effect devices with monocrystalline semiconductor on source/drain region H01L29/0843
• CPC Class Codes: H01L 29/45 : Ohmic electrodes

Abstract

Improved processes for manufacturing semiconductor wafers, chips, or dies utilize in-line data obtained from non-contact electrical measurements (“NCEM”) of fill cells that contain structures configured to target/expose a variety of open-circuit, short-circuit, leakage, and/or excessive resistance failure modes. Such processes include evaluating one or more Designs of Experiments (“DOEs”), each comprised of multiple NCEM-enabled fill cells, in at least two variants, targeted to the same failure mode. Such DOEs include multiple means/steps for enabling non-contact (NC) detection of GATECNT-GATE via opens.

Claims

1. A method for making integrated circuits (ICs), comprising at least:

(a) performing initial processing steps to produce a test wafer that includes a first Design of Experiments (DOE) of Non-Contact Electrical Measurement (NCEM)-enabled, gate contact (GATECNT)-gate (GATE)-via-open-configured fill cells, said initial processing steps including;

(i) patterning, on the test wafer, a first means for enabling NC detection of GATECNT-GATE via opens; and

,

(ii) patterning, on the test wafer, a second means for enabling NC detection of GATECNT-GATE via opens;

wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are different;

(b) determining a presence or absence of GATECNT-GATE via opens on the test wafer by;

performing a voltage contrast examination of NCEM-enabled fill cells in the first DOE, including at least the first and second means for enabling NC detection of GATECNT-GATE via opens; and

,

(c) using the results from step (b) to select NCEM-enabled fill cells for inclusion on a subsequent product wafer.

2. A method for making ICs, as defined in claim 1,

wherein step (c) includes:

selecting, for inclusion on the product wafer, a plurality of NCEM-enabled, GATECNT-GATE-via-open-configured fill cells, if step (b) indicated a presence of any GATECNT-GATE via opens.

3. A method for making ICs, as defined in claim 1,

wherein step (c) includes:

omitting, from inclusion on the product wafer, any NCEM-enabled, GATECNT-GATE-via-open-configured fill cells, if step (b) indicated an absence of any GATECNT-GATE via opens.

4. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a A_PDF_VCI_FILL8_9S101_0004_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL16_9S101_0004_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL32_9S101_0004_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL64_9S101_0004_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL8_9S101_0003_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL16_9S101_0003_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL32_9S101_0003_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL64_9S101_0003_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL8_9S107_0003_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL16_9S107_0002_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL32_9S107_0003_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL64_9S107_0003_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL8_9S111_0001_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL16_9S111_0001_1 means for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL32_9S111_0001_1 means for enabling NC detection of GATECNT-GATE via opens; and

,

a A_PDF_VCI_FILL64_9S111_0001_1 means for enabling NC detection of GATECNT-GATE via opens.

5. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a C_V682_PDF_VCI_16_2000140_01 means for enabling NC detection of GATECNT-GATE via opens;

a C_V682_PDF_VCI_16_2002240_34 means for enabling NC detection of GATECNT-GATE via opens;

a C_V682_PDF_VCI_16_2004340_67 means for enabling NC detection of GATECNT-GATE via opens;

a C_V682_PDF_VCI_16_2000146_01 means for enabling NC detection of GATECNT-GATE via opens;

a C_V682_PDF_VCI_16_2002246_34 means for enabling NC detection of GATECNT-GATE via opens; and

,

a C_V682_PDF_VCI_16_2004346_67 means for enabling NC detection of GATECNT-GATE via opens.

6. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a D_PDF_VCI_VFILL4_12S01_0105_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0037_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0034_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0097_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0088_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0087_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0019_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0083_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0008_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0070_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0001_1 means for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0065_1 means for enabling NC detection of GATECNT-GATE via opens; and

,

a D_PDF_VCI_VFILL4_12S01_0052_1 means for enabling NC detection of GATECNT-GATE via opens.

7. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a E_PDF_VCI_FILL8_17S1_0053_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0051_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0026_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0022_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0021_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0020_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0019_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0018_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0017_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0008_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0007_1 means for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0006_1 means for enabling NC detection of GATECNT-GATE via opens; and

,

a E_PDF_VCI_FILL8_17S1_0005_1 means for enabling NC detection of GATECNT-GATE via opens.

8. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a F_PDF_VCI_FILL08_24S1_0084_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S2_0047_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0080_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0079_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0078_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0076_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0077_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0076_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0075_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0073_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0060_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0059_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0058_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S2_0025_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0056_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0057_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S2_0023_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0056_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0054_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0055_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S2_0017_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0053_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S2_0016_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0051_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0084_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S2_0045_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0077_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0076_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0075_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0073_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0057_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0056_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0055_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S2_0033_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0053_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S2_0031_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0051_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0043_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S2_0035_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0036_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0035_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0034_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0032_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0016_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0015_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0014_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S2_0037_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0012_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S2_0036_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0010_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0003_1 means for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S2_0045_1 means for enabling NC detection of GATECNT-GATE via opens; and

,

a F_PDF_VCI_FILL08_24S2_0043_1 means for enabling NC detection of GATECNT-GATE via opens.

9. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a G_V931_PDF_VCI_20001AC_01 means for enabling NC detection of GATECNT-GATE via opens;

a G_V931_PDF_VCI_2000DAC_13 means for enabling NC detection of GATECNT-GATE via opens;

a G_V931_PDF_VCI_20019AC_25 means for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V16_14S1_08 means for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V16_14S1_09 means for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V16_14S1_10 means for enabling NC detection of GATECNT-GATE via opens; and

,

a H_PDF_VCI_V16_14S1_13 means for enabling NC detection of GATECNT-GATE via opens.

10. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a I_V421_VCI_20S3000123_001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000223_002 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000124_001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000224_002 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000125_001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000225_002 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000127_001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3001227_018 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002327_035 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002427_036 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3003527_053 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3004627_070 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000128_001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000D28_013 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3001928_025 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3001A28_026 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002628_038 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3003228_050 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000126_001 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3001226_018 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002326_035 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002426_036 means for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3003526_053 means for enabling NC detection of GATECNT-GATE via opens; and

,

a I_V421_VCI_20S3004626_070 means for enabling NC detection of GATECNT-GATE via opens.

11. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a J_PDF_VCI_VFILLCV4_7S101_1_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S101_31_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S102_63_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S102_92_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S102_93_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S111_282_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S111_311_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S111_312_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S112_313_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S112_342_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S112_343_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S113_344_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S113_373_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S113_374_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S114_375_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S114_404_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S114_405_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S270_0046_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S270_0001_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S108_140_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S108_142_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S108_171_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S109_208_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S109_210_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S109_244_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S110_245_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S110_247_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S110_281_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S271_0083_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S271_0002_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S271_0001_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL8_1_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL8_2_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL8_19_1 means for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL8_28_1 means for enabling NC detection of GATECNT-GATE via opens; and

,

a J_PDF_VCI_FILL8_29_1 means for enabling NC detection of GATECNT-GATE via opens.

12. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a K_V549_PDF_VCI_300012B_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_300102B_16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001F2B_31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000158_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2002458_36 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2004758_71 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_300012C_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_300102C_16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001F2C_31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000128_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001028_16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001F28_31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002028_32 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002F28_47 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003E28_62 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000100_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001000_16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001F00_31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_200015A_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_200175A_23 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2002D5A_45 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000127_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001027_16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001F27_31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002027_32 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002F27_47 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003E27_62 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003F27_63 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004E27_78 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3005D27_93 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000101_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001101_17 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2002101_33 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001003_16 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000103_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001F03_31 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20001C3_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000AC3_10 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20013C3_19 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20001C4_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000AC4_10 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20013C4_19 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20001C5_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000AC5_10 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20013C5_19 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000194_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001794_23 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2002D94_45 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000136_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000D36_13 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001936_25 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001A36_26 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002636_38 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003236_50 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003336_51 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003F36_63 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004B36_75 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004C36_76 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3005836_88 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3006436_100 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000137_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000D37_13 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001937_25 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001A37_26 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002637_38 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003237_50 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003337_51 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003F37_63 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004B37_75 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004C37_76 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3005837_88 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3006437_100 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20001A8_01 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20017A8_23 means for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20018A8_24 means for enabling NC detection of GATECNT-GATE via opens; and

,

a K_V549_PDF_VCI_2002EA8_46 means for enabling NC detection of GATECNT-GATE via opens.

13. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a L_V54C_B_PDF_VCI_100012E_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_B_PDF_VCI_100172E_23 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_B_PDF_VCI_100012C_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_B_PDF_VCI_100242C_36 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_B_PDF_VCI_100472C_71 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_300012B_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_300102B_16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001F2B_31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_300012C_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_300102C_16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001F2C_31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3000127_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001027_16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001F27_31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002027_32 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002F27_47 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003E27_62 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003F27_63 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3004E27_78 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3005D27_93 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3000128_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001028_16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001F28_31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002028_32 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002F28_47 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003E28_62 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3000136_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3000D36_13 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001936_25 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001A36_26 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002636_38 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003236_50 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003336_51 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003F36_63 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3004B36_75 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3004C36_76 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3005836_88 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3006436_100 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000100_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2001000_16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2001F00_31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000101_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000601_06 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000B01_11 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000103_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2001003_16 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2001F03_31 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20001A8_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20017A8_23 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20018A8_24 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2002EA8_46 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20001C3_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000AC3_10 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20013C3_19 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20001C4_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000AC4_10 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20013C4_19 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20001C5_01 means for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000AC5_10 means for enabling NC detection of GATECNT-GATE via opens; and

,

a L_V54C_M_PDF_VCI_20013C5_19 means for enabling NC detection of GATECNT-GATE via opens.

14. A method for making ICs, as defined in claim 1, wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a M_V54B_PDF_VCI_100012E_01 means for enabling NC detection of GATECNT-GATE via opens;

a M_V54B_PDF_VCI_100172E_23 means for enabling NC detection of GATECNT-GATE via opens; and

,

a M_V54B_PDF_VCI_100182E_24 means for enabling NC detection of GATECNT-GATE via opens.

28. A method for making ICs, as defined in claim 1, wherein step (a) further includes patterning at least three additional fill cells selected from the list consisting of:

AA-tip-to-tip-short-configured, NCEM-enabled fill cells;

AACNT-tip-to-tip-short-configured, NCEM-enabled fill cells;

AACNT-AA-tip-to-tip-short-configured, NCEM-enabled fill cells;

TS-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATE-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATECNT-tip-to-tip-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-tip-to-tip-short-configured, NCEM-enabled fill cells;

M1-tip-to-tip-short-configured, NCEM-enabled fill cells;

V0-tip-to-tip-short-configured, NCEM-enabled fill cells;

M1-V0-tip-to-tip-short-configured, NCEM-enabled fill cells;

V1-M1-tip-to-tip-short-configured, NCEM-enabled fill cells;

V1-tip-to-tip-short-configured, NCEM-enabled fill cells;

M2-tip-to-tip-short-configured, NCEM-enabled fill cells;

M2-V1-tip-to-tip-short-configured, NCEM-enabled fill cells;

V2-M2-tip-to-tip-short-configured, NCEM-enabled fill cells;

M3-tip-to-tip-short-configured, NCEM-enabled fill cells;

V2-tip-to-tip-short-configured, NCEM-enabled fill cells;

M3-V2-tip-to-tip-short-configured, NCEM-enabled fill cells;

AA-tip-to-side-short-configured, NCEM-enabled fill cells;

AACNT-tip-to-side-short-configured, NCEM-enabled fill cells;

AACNT-AA-tip-to-side-short-configured, NCEM-enabled fill cells;

GATE-AA-tip-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-tip-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-tip-to-side-short-configured, NCEM-enabled fill cells;

TS-GATECNT-tip-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-tip-to-side-short-configured, NCEM-enabled fill cells;

M1-tip-to-side-short-configured, NCEM-enabled fill cells;

V0-tip-to-side-short-configured, NCEM-enabled fill cells;

M1-V0-tip-to-side-short-configured, NCEM-enabled fill cells;

V1-M1-tip-to-side-short-configured, NCEM-enabled fill cells;

V1-tip-to-side-short-configured, NCEM-enabled fill cells;

M2-tip-to-side-short-configured, NCEM-enabled fill cells;

M2-V1-tip-to-side-short-configured, NCEM-enabled fill cells;

V2-M2-tip-to-side-short-configured, NCEM-enabled fill cells;

M3-tip-to-side-short-configured, NCEM-enabled fill cells;

V2-tip-to-side-short-configured, NCEM-enabled fill cells;

M3-V2-tip-to-side-short-configured, NCEM-enabled fill cells;

AA-side-to-side-short-configured, NCEM-enabled fill cells;

AACNT-side-to-side-short-configured, NCEM-enabled fill cells;

AACNT-AA-side-to-side-short-configured, NCEM-enabled fill cells;

AACNT-GATE-side-to-side-short-configured, NCEM-enabled fill cells;

GATE-side-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-side-to-side-short-configured, NCEM-enabled fill cells;

TS-GATE-side-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-side-to-side-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-side-to-side-short-configured, NCEM-enabled fill cells;

M1-side-to-side-short-configured, NCEM-enabled fill cells;

V0-side-to-side-short-configured, NCEM-enabled fill cells;

M1-V0-side-to-side-short-configured, NCEM-enabled fill cells;

V1-M1-side-to-side-short-configured, NCEM-enabled fill cells;

V1-side-to-side-short-configured, NCEM-enabled fill cells;

M2-side-to-side-short-configured, NCEM-enabled fill cells;

M2-V1-side-to-side-short-configured, NCEM-enabled fill cells;

V2-M2-side-to-side-short-configured, NCEM-enabled fill cells;

M3-side-to-side-short-configured, NCEM-enabled fill cells;

V2-side-to-side-short-configured, NCEM-enabled fill cells;

M3-V2-side-to-side-short-configured, NCEM-enabled fill cells;

AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

AACNT-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATE-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATE-TS-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-TS-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-AA-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-TS-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-GATE-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V0-GATECNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M1-AACNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M1-GATECNT-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M1-V0-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V1-M1-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V1-V0-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M2-M1-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M2-V1-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V2-V1-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

V2-M2-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M3-M2-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

M3-V2-L-shape-interlayer-short-configured, NCEM-enabled fill cells;

AA-diagonal-short-configured, NCEM-enabled fill cells;

TS-diagonal-short-configured, NCEM-enabled fill cells;

AACNT-diagonal-short-configured, NCEM-enabled fill cells;

AACNT-AA-diagonal-short-configured, NCEM-enabled fill cells;

GATE-diagonal-short-configured, NCEM-enabled fill cells;

GATE-AACNT-diagonal-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-diagonal-short-configured, NCEM-enabled fill cells;

GATECNT-diagonal-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-diagonal-short-configured, NCEM-enabled fill cells;

M1-diagonal-short-configured, NCEM-enabled fill cells;

V0-diagonal-short-configured, NCEM-enabled fill cells;

M1-V0-diagonal-short-configured, NCEM-enabled fill cells;

V1-M1-diagonal-short-configured, NCEM-enabled fill cells;

V1-diagonal-short-configured, NCEM-enabled fill cells;

M2-diagonal-short-configured, NCEM-enabled fill cells;

M2-V1-diagonal-short-configured, NCEM-enabled fill cells;

M3-diagonal-short-configured, NCEM-enabled fill cells;

V2-M2-diagonal-short-configured, NCEM-enabled fill cells;

V2-diagonal-short-configured, NCEM-enabled fill cells;

M3-V2-diagonal-short-configured, NCEM-enabled fill cells;

AA-corner-short-configured, NCEM-enabled fill cells;

AACNT-corner-short-configured, NCEM-enabled fill cells;

AACNT-AA-corner-short-configured, NCEM-enabled fill cells;

GATE-corner-short-configured, NCEM-enabled fill cells;

GATECNT-GATE-corner-short-configured, NCEM-enabled fill cells;

GATECNT-TS-corner-short-configured, NCEM-enabled fill cells;

GATECNT-corner-short-configured, NCEM-enabled fill cells;

GATECNT-AACNT-corner-short-configured, NCEM-enabled fill cells;

M1-corner-short-configured, NCEM-enabled fill cells;

V0-corner-short-configured, NCEM-enabled fill cells;

M1-V0-corner-short-configured, NCEM-enabled fill cells;

V1-M1-corner-short-configured, NCEM-enabled fill cells;

V1-corner-short-configured, NCEM-enabled fill cells;

M2-corner-short-configured, NCEM-enabled fill cells;

M2-V1-corner-short-configured, NCEM-enabled fill cells;

M3-corner-short-configured, NCEM-enabled fill cells;

V2-M2-corner-short-configured, NCEM-enabled fill cells;

V2-corner-short-configured, NCEM-enabled fill cells;

M3-V2-corner-short-configured, NCEM-enabled fill cells;

GATE-AA-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATE-AACNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATE-TS-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATECNT-TS-interlayer-overlap-short-configured, NCEM-enabled fill cells;

GATECNT-AA-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-AA-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-AACNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-TS-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-GATE-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M1-GATECNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M1-AACNT-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V1-V0-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M2-M1-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V2-V1-interlayer-overlap-short-configured, NCEM-enabled fill cells;

M3-M2-interlayer-overlap-short-configured, NCEM-enabled fill cells;

V0-GATECNT-via-chamfer-short-configured, NCEM-enabled fill cells;

V0-AACNT-via-chamfer-short-configured, NCEM-enabled fill cells;

V1-M1-via-chamfer-short-configured, NCEM-enabled fill cells;

V2-M2-via-chamfer-short-configured, NCEM-enabled fill cells;

V0-merged-via-short-configured, NCEM-enabled fill cells;

V1-merged-via-short-configured, NCEM-enabled fill cells;

V2-merged-via-short-configured, NCEM-enabled fill cells;

AA-snake-open-configured, NCEM-enabled fill cells;

TS-snake-open-configured, NCEM-enabled fill cells;

AACNT-snake-open-configured, NCEM-enabled fill cells;

GATE-snake-open-configured, NCEM-enabled fill cells;

GATECNT-snake-open-configured, NCEM-enabled fill cells;

V0-snake-open-configured, NCEM-enabled fill cells;

M1-snake-open-configured, NCEM-enabled fill cells;

V1-snake-open-configured, NCEM-enabled fill cells;

M2-snake-open-configured, NCEM-enabled fill cells;

V2-snake-open-configured, NCEM-enabled fill cells;

M3-snake-open-configured, NCEM-enabled fill cells;

AA-stitch-open-configured, NCEM-enabled fill cells;

TS-stitch-open-configured, NCEM-enabled fill cells;

AACNT-stitch-open-configured, NCEM-enabled fill cells;

GATECNT-stitch-open-configured, NCEM-enabled fill cells;

V0-stitch-open-configured, NCEM-enabled fill cells;

M1-stitch-open-configured, NCEM-enabled fill cells;

V1-stitch-open-configured, NCEM-enabled fill cells;

M2-stitch-open-configured, NCEM-enabled fill cells;

V2-stitch-open-configured, NCEM-enabled fill cells;

M3-stitch-open-configured, NCEM-enabled fill cells;

AACNT-TS-via-open-configured, NCEM-enabled fill cells;

AACNT-AA-via-open-configured, NCEM-enabled fill cells;

TS-AA-via-open-configured, NCEM-enabled fill cells;

V0-GATECNT-via-open-configured, NCEM-enabled fill cells;

V0-AA-via-open-configured, NCEM-enabled fill cells;

V0-TS-via-open-configured, NCEM-enabled fill cells;

V0-AACNT-via-open-configured, NCEM-enabled fill cells;

V0-GATE-via-open-configured, NCEM-enabled fill cells;

V0-via-open-configured, NCEM-enabled fill cells;

M1-V0-via-open-configured, NCEM-enabled fill cells;

V1-M1-via-open-configured, NCEM-enabled fill cells;

V1-M2-via-open-configured, NCEM-enabled fill cells;

M1-GATECNT-via-open-configured, NCEM-enabled fill cells;

M1-AANCT-via-open-configured, NCEM-enabled fill cells;

V2-M2-via-open-configured, NCEM-enabled fill cells;

V2-M3-via-open-configured, NCEM-enabled fill cells;

M1-metal-island-open-configured, NCEM-enabled fill cells;

M2-metal-island-open-configured, NCEM-enabled fill cells;

M3-metal-island-open-configured, NCEM-enabled fill cells;

V0-merged-via-open-configured, NCEM-enabled fill cells;

V0-AACNT-merged-via-open-configured, NCEM-enabled fill cells;

V0-GATECNT-merged-via-open-configured, NCEM-enabled fill cells;

V1-merged-via-open-configured, NCEM-enabled fill cells;

V2-merged-via-open-configured, NCEM-enabled fill cells;

V1-M1-merged-via-open-configured, NCEM-enabled fill cells; and

,

V2-M2-merged-via-open-configured, NCEM-enabled fill cells.

15. A method for making ICs, comprising at least:

(a) performing initial processing steps to produce a test wafer that includes a first DOE of NCEM-enabled, GATECNT-GATE-via-open-configured fill cells, said initial processing steps including;

(i) patterning, on the test wafer, a first means for enabling NC detection of GATECNT-GATE via opens; and

,

(ii) patterning, on the test wafer, a second means for enabling NC detection of GATECNT-GATE via opens;

wherein the first and second means for enabling NC detection of GATECNT-GATE via opens are different;

(b) determining a presence or absence of GATECNT-GATE via opens on the test wafer by;

performing a voltage contrast examination of NCEM-enabled fill cells in the first DOE, including at least the first and second means for enabling NC detection of GATECNT-GATE via opens; and

,

(c) using the results from step (b) in processing of a subsequent product wafer.

16. A method for making ICs, comprising at least:

(a) performing initial processing steps to produce a test wafer that includes a first DOE of NCEM-enabled, GATECNT-GATE-via-open-configured fill cells, said initial processing steps including;

(i) first step for enabling, on the test wafer, NC detection of GATECNT-GATE via opens; and

,

(ii) second step for enabling, on the test wafer, NC detection of GATECNT-GATE via opens;

wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are different;

(b) determining a presence or absence of GATECNT-GATE via opens on the test wafer by;

performing a voltage contrast examination of NCEM-enabled fill cells in the first DOE; and

,

(c) using the results from step (b) to select NCEM-enabled fill cells for inclusion on a subsequent product wafer.

17. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a A_PDF_VCI_FILL8_9S101_0004_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL16_9S101_0004_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL32_9S101_0004_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL64_9S101_0004_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL8_9S101_0003_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL16_9S101_0003_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL32_9S101_0003_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL64_9S101_0003_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL8_9S107_0003_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL16_9S107_0002_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL32_9S107_0003_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL64_9S107_0003_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL8_9S111_0001_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL16_9S111_0001_1 step for enabling NC detection of GATECNT-GATE via opens;

a A_PDF_VCI_FILL32_9S111_0001_1 step for enabling NC detection of GATECNT-GATE via opens; and

,

a A_PDF_VCI_FILL64_9S111_0001_1 step for enabling NC detection of GATECNT-GATE via opens.

18. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a C_V682_PDF_VCI_16_2000140_01 step for enabling NC detection of GATECNT-GATE via opens;

a C_V682_PDF_VCI_16_2002240_34 step for enabling NC detection of GATECNT-GATE via opens;

a C_V682_PDF_VCI_16_2004340_67 step for enabling NC detection of GATECNT-GATE via opens;

a C_V682_PDF_VCI_16_2000146_01 step for enabling NC detection of GATECNT-GATE via opens;

a C_V682_PDF_VCI_16_2002246_34 step for enabling NC detection of GATECNT-GATE via opens; and

,

a C_V682_PDF_VCI_16_2004346_67 step for enabling NC detection of GATECNT-GATE via opens.

19. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a D_PDF_VCI_VFILL4_12S01_0105_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0037_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0034_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0097_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0088_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0087_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0019_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0083_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0008_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0070_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0001_1 step for enabling NC detection of GATECNT-GATE via opens;

a D_PDF_VCI_VFILL4_12S01_0065_1 step for enabling NC detection of GATECNT-GATE via opens; and

,

a D_PDF_VCI_VFILL4_12S01_0052_1 step for enabling NC detection of GATECNT-GATE via opens.

20. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a E_PDF_VCI_FILL8_17S1_0053_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0051_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0026_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0022_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0021_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0020_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0019_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0018_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0017_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0008_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0007_1 step for enabling NC detection of GATECNT-GATE via opens;

a E_PDF_VCI_FILL8_17S1_0006_1 step for enabling NC detection of GATECNT-GATE via opens; and

,

a E_PDF_VCI_FILL8_17S1_0005_1 step for enabling NC detection of GATECNT-GATE via opens.

21. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a F_PDF_VCI_FILL08_24S1_0084_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S2_0047_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0080_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0079_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0078_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0076_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0077_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0076_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0075_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0073_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0060_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0059_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0058_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S2_0025_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0056_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0057_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S2_0023_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0056_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0054_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0055_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S2_0017_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0053_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S2_0016_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL08_24S1_0051_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0084_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S2_0045_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0077_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0076_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0075_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0073_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0057_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0056_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0055_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S2_0033_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0053_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S2_0031_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL32_24S1_0051_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0043_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S2_0035_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0036_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0035_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0034_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0032_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0016_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0015_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0014_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S2_0037_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0012_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S2_0036_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL16_24S1_0010_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S1_0003_1 step for enabling NC detection of GATECNT-GATE via opens;

a F_PDF_VCI_FILL64_24S2_0045_1 step for enabling NC detection of GATECNT-GATE via opens; and

,

a F_PDF_VCI_FILL08_24S2_0043_1 step for enabling NC detection of GATECNT-GATE via opens.

22. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a G_V931_PDF_VCI_20001AC_01 step for enabling NC detection of GATECNT-GATE via opens;

a G_V931_PDF_VCI_2000DAC_13 step for enabling NC detection of GATECNT-GATE via opens;

a G_V931_PDF_VCI_20019AC_25 step for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V16_14S1_08 step for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V16_14S1_09 step for enabling NC detection of GATECNT-GATE via opens;

a H_PDF_VCI_V16_14S1_10 step for enabling NC detection of GATECNT-GATE via opens; and

,

a H_PDF_VCI_V16_14S1_13 step for enabling NC detection of GATECNT-GATE via opens.

23. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a I_V421_VCI_20S3000123_001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000223_002 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000124_001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000224_002 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000125_001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000225_002 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000127_001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3001227_018 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002327_035 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002427_036 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3003527_053 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3004627_070 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000128_001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000D28_013 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3001928_025 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3001A28_026 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002628_038 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3003228_050 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3000126_001 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3001226_018 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002326_035 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3002426_036 step for enabling NC detection of GATECNT-GATE via opens;

a I_V421_VCI_20S3003526_053 step for enabling NC detection of GATECNT-GATE via opens; and

,

a I_V421_VCI_20S3004626_070 step for enabling NC detection of GATECNT-GATE via opens.

24. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a J_PDF_VCI_VFILLCV4_7S101_1_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S101_31_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S102_63_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S102_92_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S102_93_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S111_282_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S111_311_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S111_312_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S112_313_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S112_342_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S112_343_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S113_344_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S113_373_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S113_374_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S114_375_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S114_404_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S114_405_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S270_0046_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S270_0001_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S108_140_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S108_142_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S108_171_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S109_208_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S109_210_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S109_244_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S110_245_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S110_247_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV4_7S110_281_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S271_0083_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S271_0002_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_VFILLCV8_7S271_0001_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL8_1_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL8_2_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL8_19_1 step for enabling NC detection of GATECNT-GATE via opens;

a J_PDF_VCI_FILL8_28_1 step for enabling NC detection of GATECNT-GATE via opens; and

,

a J_PDF_VCI_FILL8_29_1 step for enabling NC detection of GATECNT-GATE via opens.

25. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a K_V549_PDF_VCI_300012B_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_300102B_16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001F2B_31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000158_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2002458_36 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2004758_71 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_300012C_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_300102C_16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001F2C_31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000128_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001028_16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001F28_31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002028_32 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002F28_47 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003E28_62 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000100_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001000_16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001F00_31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_200015A_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_200175A_23 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2002D5A_45 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000127_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001027_16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001F27_31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002027_32 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002F27_47 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003E27_62 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003F27_63 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004E27_78 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3005D27_93 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000101_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001101_17 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2002101_33 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001003_16 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000103_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001F03_31 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20001C3_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000AC3_10 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20013C3_19 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20001C4_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000AC4_10 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20013C4_19 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20001C5_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000AC5_10 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20013C5_19 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2000194_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2001794_23 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_2002D94_45 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000136_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000D36_13 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001936_25 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001A36_26 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002636_38 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003236_50 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003336_51 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003F36_63 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004B36_75 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004C36_76 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3005836_88 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3006436_100 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000137_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3000D37_13 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001937_25 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3001A37_26 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3002637_38 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003237_50 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003337_51 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3003F37_63 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004B37_75 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3004C37_76 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3005837_88 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_3006437_100 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20001A8_01 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20017A8_23 step for enabling NC detection of GATECNT-GATE via opens;

a K_V549_PDF_VCI_20018A8_24 step for enabling NC detection of GATECNT-GATE via opens; and

,

a K_V549_PDF_VCI_2002EA8_46 step for enabling NC detection of GATECNT-GATE via opens.

26. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a L_V54C_B_PDF_VCI_100012E_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_B_PDF_VCI_100172E_23 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_B_PDF_VCI_100012C_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_B_PDF_VCI_100242C_36 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_B_PDF_VCI_100472C_71 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_300012B_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_300102B_16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001F2B_31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_300012C_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_300102C_16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001F2C_31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3000127_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001027_16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001F27_31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002027_32 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002F27_47 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003E27_62 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003F27_63 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3004E27_78 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3005D27_93 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3000128_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001028_16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001F28_31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002028_32 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002F28_47 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003E28_62 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3000136_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3000D36_13 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001936_25 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3001A36_26 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3002636_38 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003236_50 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003336_51 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3003F36_63 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3004B36_75 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3004C36_76 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3005836_88 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_3006436_100 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000100_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2001000_16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2001F00_31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000101_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000601_06 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000B01_11 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000103_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2001003_16 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2001F03_31 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20001A8_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20017A8_23 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20018A8_24 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2002EA8_46 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20001C3_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000AC3_10 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20013C3_19 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20001C4_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000AC4_10 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20013C4_19 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_20001C5_01 step for enabling NC detection of GATECNT-GATE via opens;

a L_V54C_M_PDF_VCI_2000AC5_10 step for enabling NC detection of GATECNT-GATE via opens; and

,

a L_V54C_M_PDF_VCI_20013C5_19 step for enabling NC detection of GATECNT-GATE via opens.

27. A method for making ICs, as defined in claim 16, wherein the first and second steps for enabling NC detection of GATECNT-GATE via opens are both selected from the list consisting of:

a M_V54B_PDF_VCI_100012E_01 step for enabling NC detection of GATECNT-GATE via opens;

a M_V54B_PDF_VCI_100172E_23 step for enabling NC detection of GATECNT-GATE via opens; and

,

a M_V54B_PDF_VCI_100182E_24 step for enabling NC detection of GATECNT-GATE via opens.