Work pieces and methods of laser drilling through holes in substrates using an exit sacrificial cover layer

• US 9,953,912 B2
• Filed: 04/26/2016
• Issued: 04/24/2018
• Est. Priority Date: 04/28/2015
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Goers, Uta-Barbara
• Primary Examiner(s): CULBERT, ROBERTS P
• Application Number:
  US15/138,656
• Publication Number:
  US 20160322291A1
• Time in Patent Office: 728 Days
• Field of Search: 216 65
• CPC Class Codes: B23K 26/0622 by shaping pulses
• CPC Class Codes: B23K 26/18 using absorbing layers on the workpiece, e.g. for marking or protecting purposes
• CPC Class Codes: B23K 26/382 by boring
• CPC Class Codes: H01L 21/486 Via connections through the substrate with or without pins
• CPC Class Codes: H01L 23/49827 Via connections through the substrates, e.g. pins going through the substrate, coaxial cables H01L23/49822, H01L23/49833, H01L23/4985, H01L23/49861 take precedence
• CPC Class Codes: H01L 23/49838 Geometry or layout
• CPC Class Codes: H01L 23/49894 Materials of the insulating layers or coatings
• CPC Class Codes: H05K 2203/1383 Temporary protective insulating layer
• CPC Class Codes: H05K 3/002 by liquid chemical etching
• CPC Class Codes: H05K 3/0029 of inorganic insulating material
• CPC Class Codes: H05K 3/4038 Through-connections; Vertical interconnect access [VIA] connections H05K3/403, H05K3/42 take precedence

Abstract

Work pieces and methods of forming through holes in substrates are disclosed. In one embodiment, a method of forming a through hole in a substrate by drilling includes affixing an exit sacrificial cover layer to a laser beam exit surface of the substrate, positioning a laser beam in a predetermined location relative to the substrate and corresponding to a desired location for the through hole, and forming the through hole by repeatedly pulsing the laser beam into an entrance surface of the substrate and through a bulk of the substrate. The method further includes forming a hole in the exit sacrificial cover layer by repeatedly pulsing the laser beam into the through hole formed in the substrate such that the laser beam passes through the laser beam exit surface of the substrate and into the exit sacrificial cover layer.

Claims

1. A method of forming a through hole in a substrate by drilling, the method comprising:

affixing an exit sacrificial cover layer to a laser beam exit surface of the substrate, wherein the exit sacrificial cover layer has a different composition than the substrate;

positioning a laser beam in a predetermined location relative to the substrate and corresponding to a desired location for the through hole;

forming the through hole by repeatedly pulsing the laser beam into an entrance surface of the substrate and through a bulk of the substrate; and

forming a hole in the exit sacrificial cover layer by repeatedly pulsing the laser beam into the through hole formed in the substrate such that the laser beam passes through the laser beam exit surface of the substrate and into the exit sacrificial cover layer,

wherein a thickness of the exit sacrificial cover layer is greater than about 100 μ

m.

2. The method of claim 1, wherein:

the laser beam is pulsed through the substrate and the exit sacrificial cover layer such that the through hole of the substrate has an entrance diameter and an exit diameter;

the method further comprises etching the substrate with an etching solution; and

a ratio between the exit diameter and the entrance diameter of the through hole is greater than about 0.7 after etching the substrate.

3. The method of claim 2, wherein a thickness of the substrate is less than about 300 μ

m.

4. The method of claim 3, wherein a thickness of the exit sacrificial cover layer is at least 200 μ

m.

5. The method of claim 4, wherein the entrance diameter is greater than about 40 μ

m, and the ratio between the exit diameter and the entrance diameter of the through hole is greater than about 0.8 after etching the substrate.

6. The method of claim 1, wherein

the laser beam is pulsed through the substrate and the exit sacrificial cover layer such that the through hole of the substrate has an entrance diameter and an exit diameter, and

the entrance diameter is less than about 40 μ

m.

7. The method of claim 1, wherein the exit sacrificial cover layer is a polymer layer.

8. The method of claim 1, wherein the laser beam has a wavelength of about 355 nm, the laser beam has a pulse width between about 5 ns and about 75 ns, the laser beam is pulsed at a repetition rate between about 1 kHz and about 30 kHz, and the laser beam has a pulse energy between about 25 μ

J and about 175 μ

J.

9. The method of claim 1, wherein the laser beam has a wavelength of about 355 nm, and the laser beam has a numerical aperture between about 0.02 and about 0.4.

10. The method of claim 1, further comprising:

affixing an entrance sacrificial cover layer to a laser beam entrance surface of the substrate; and

prior to forming the through hole in the substrate, forming a through hole in the entrance sacrificial cover layer by repeatedly pulsing the laser beam at the predetermined location.

11. The method of claim 1, wherein the exit sacrificial cover layer is affixed to the laser beam exit surface of the substrate by applying a liquid polymer material to the laser beam exit surface of the substrate.

12. The method of claim 11, further comprising removing the exit sacrificial cover layer from the laser beam exit surface of the substrate by applying a solvent to the exit sacrificial cover layer.

13. The method of claim 1, wherein the exit sacrificial cover layer is removed after the through hole is formed in the substrate.

14. The method of claim 1, further comprising:

etching the substrate with an etching solution; and

applying an electrically conductive material to the through hole.

15. The method of claim 1, wherein:

the laser beam is pulsed through the substrate and the exit sacrificial cover layer such that the through hole of the substrate has an entrance diameter and an exit diameter;

the exit diameter defines an exit hole of the through hole having a circumference C; and

the laser beam exit surface of the substrate is free from one or more channels extending from the circumference C of the exit hole.

16. The method of claim 1, wherein the substrate is glass.

17. A method of forming a through hole in a substrate by drilling, the method comprising:

affixing an exit sacrificial cover layer to a laser beam exit surface of the substrate wherein the exit sacrificial cover layer has a different composition than the substrate;

positioning a laser beam in a predetermined location relative to the substrate and corresponding to a desired location for the through hole;

forming the through hole by repeatedly pulsing the laser beam into an entrance surface of the substrate and through a bulk of the substrate; and

forming a hole in the exit sacrificial cover layer by repeatedly pulsing the laser beam into the through hole formed in the substrate such that the laser beam passes through the laser beam exit surface of the substrate and into the exit sacrificial cover layer,

wherein the exit sacrificial cover layer is a glass layer.

18. A method of forming a through hole in a substrate by drilling, the method comprising:

affixing an exit sacrificial cover layer to a laser beam exit surface of the substrate wherein the exit sacrificial cover layer has a different composition than the substrate;

positioning a laser beam in a predetermined location relative to the substrate and corresponding to a desired location for the through hole;

forming the through hole by repeatedly pulsing the laser beam into an entrance surface of the substrate and through a bulk of the substrate;

forming a hole in the exit sacrificial cover layer by repeatedly pulsing the laser beam into the through hole formed in the substrate such that the laser beam passes through the laser beam exit surface of the substrate and into the exit sacrificial cover layer; and

applying a fluid to at least one of the exit sacrificial cover layer and the laser beam exit surface of the substrate before attaching the exit sacrificial cover layer to the laser beam exit surface of the substrate.