Configuration to reduce non-linear motion
First Claim
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1. A Micro-Electro-Mechanical Systems (MEMS) sensor comprising;
- first and second rotating arms, wherein the first and second rotating arms are coupled to each other and the first and second rotating arms are configured to counter rotate when driven into oscillation;
at least one travelling system comprising at least one travelling mass and at least one proof mass coupled to each other;
wherein the at least one travelling system is coupled to the first rotating arm by a first flexible element system and the at least one travelling system is coupled to the second rotating arm by a second flexible element system, and wherein the first flexible element system has a different spring stiffness value than the second flexible element system;
wherein the at least one travelling mass and the at least one proof mass move in a first direction when driven into oscillation;
wherein the at least one travelling mass moves in a non-linear translation in the first direction when driven into oscillation and the at least one proof mass moves in a linear translation in the first direction when driven into oscillation as a result of the first flexible element system having the different spring stiffness value than the second flexible element system; and
at least one actuator for driving the at least one travelling system into oscillation.
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Abstract
Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.
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Citations
22 Claims
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1. A Micro-Electro-Mechanical Systems (MEMS) sensor comprising;
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first and second rotating arms, wherein the first and second rotating arms are coupled to each other and the first and second rotating arms are configured to counter rotate when driven into oscillation; at least one travelling system comprising at least one travelling mass and at least one proof mass coupled to each other; wherein the at least one travelling system is coupled to the first rotating arm by a first flexible element system and the at least one travelling system is coupled to the second rotating arm by a second flexible element system, and wherein the first flexible element system has a different spring stiffness value than the second flexible element system; wherein the at least one travelling mass and the at least one proof mass move in a first direction when driven into oscillation; wherein the at least one travelling mass moves in a non-linear translation in the first direction when driven into oscillation and the at least one proof mass moves in a linear translation in the first direction when driven into oscillation as a result of the first flexible element system having the different spring stiffness value than the second flexible element system; and at least one actuator for driving the at least one travelling system into oscillation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification