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Configuration to reduce non-linear motion

  • US 9,958,271 B2
  • Filed: 09/24/2014
  • Issued: 05/01/2018
  • Est. Priority Date: 01/21/2014
  • Status: Active Grant
First Claim
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1. A Micro-Electro-Mechanical Systems (MEMS) sensor comprising;

  • first and second rotating arms, wherein the first and second rotating arms are coupled to each other and the first and second rotating arms are configured to counter rotate when driven into oscillation;

    at least one travelling system comprising at least one travelling mass and at least one proof mass coupled to each other;

    wherein the at least one travelling system is coupled to the first rotating arm by a first flexible element system and the at least one travelling system is coupled to the second rotating arm by a second flexible element system, and wherein the first flexible element system has a different spring stiffness value than the second flexible element system;

    wherein the at least one travelling mass and the at least one proof mass move in a first direction when driven into oscillation;

    wherein the at least one travelling mass moves in a non-linear translation in the first direction when driven into oscillation and the at least one proof mass moves in a linear translation in the first direction when driven into oscillation as a result of the first flexible element system having the different spring stiffness value than the second flexible element system; and

    at least one actuator for driving the at least one travelling system into oscillation.

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