Configuration to reduce non-linear motion

• US 9,958,271 B2
• Filed: 09/24/2014
• Issued: 05/01/2018
• Est. Priority Date: 01/21/2014
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Anac, Ozan, Seeger, Joseph
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US14/495,786
• Publication Number:
  US 20160363445A1
• Time in Patent Office: 1,315 Days
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G01C 19/5733 Structural details or topology
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01C 19/5762 the sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01P 15/0802 Details

Abstract

Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2nd harmonic motion is minimized.

Claims

1. A Micro-Electro-Mechanical Systems (MEMS) sensor comprising;

first and second rotating arms, wherein the first and second rotating arms are coupled to each other and the first and second rotating arms are configured to counter rotate when driven into oscillation;

at least one travelling system comprising at least one travelling mass and at least one proof mass coupled to each other;

wherein the at least one travelling system is coupled to the first rotating arm by a first flexible element system and the at least one travelling system is coupled to the second rotating arm by a second flexible element system, and wherein the first flexible element system has a different spring stiffness value than the second flexible element system;

wherein the at least one travelling mass and the at least one proof mass move in a first direction when driven into oscillation;

wherein the at least one travelling mass moves in a non-linear translation in the first direction when driven into oscillation and the at least one proof mass moves in a linear translation in the first direction when driven into oscillation as a result of the first flexible element system having the different spring stiffness value than the second flexible element system; and

at least one actuator for driving the at least one travelling system into oscillation.

2. The MEMS sensor of claim 1, wherein the at least one travelling system moves in a plane parallel to a substrate.

3. The MEMS sensor of claim 2, wherein the first and second rotating arms are coupled to an anchor on the substrate by a set of flexible elements.

4. The MEMS sensor of claim 1, further comprising:

at least one transducer configured to sense motion of a portion of the at least one travelling system.

5. The MEMS sensor of claim 4, wherein the at least one transducer comprises at least one of a capacitive transducer, an optical transducer, or a piezoelectric transducer.

6. The MEMS sensor of claim 4, wherein the at least one transducer is configured to sense motion of another portion of the at least one travelling system in a second direction that is in plane with and orthogonal to the first direction.

7. The MEMS sensor of claim 1, wherein the at least one proof mass is configured to be displaced less than respective portions of the first and second rotating arms are displaced in the first direction when the first and second rotating arms counter rotate when driven into oscillation.

8. The MEMS sensor of claim 1, wherein the first flexible element system and the second flexible element system, coupled to the first and second rotating arms, are configured to allow in plane rotation of the first and second rotating arms.

9. The MEMS sensor of claim 6, wherein the at least one proof mass is flexibly coupled to the at least one travelling mass and is configured to move relative to the at least one travelling mass in the second direction.

10. The MEMS sensor of claim 1, wherein the first and second rotating arms are disposed symmetrically with respect to the at least one travelling system.

11. The MEMS sensor of claim 1, wherein the at least one travelling mass is flexibly coupled to the at least one proof mass and is configured to allow the at least one proof mass to move in a direction orthogonal to the first direction relative to the travelling mass.

12. The MEMS sensor of claim 11, wherein the at least one travelling mass comprises a first travelling mass flexibly coupled to at least one first proof mass, and a second travelling mass flexibly coupled to at least one second proof mass, and wherein the at least one first proof mass and the at least one second proof mass are able to move in the direction orthogonal to the first direction relative to the first travelling mass and the second travelling mass, respectively.

13. The MEMS sensor of claim 12, further comprising:

a first transducer configured to sense motion of a portion of the first travelling mass in the direction orthogonal to the first direction; and

a second transducer configured to sense motion of a portion of the second travelling mass in the direction orthogonal to the first direction.

14. The MEMS sensor of claim 12, further comprising:

a third transducer configured to sense motion of a portion of the at least one first proof mass in the direction orthogonal to the first direction; and

a fourth transducer configured to sense motion of a portion of the at least one second proof mass in the direction orthogonal to the first direction.

15. The MEMS sensor of claim 12, wherein the first travelling mass and the second travelling masses are coupled to each other with a third flexible element system.

16. The MEMS sensor of claim 15, wherein the third flexible element system is compliant in the direction orthogonal to the first direction.

17. The MEMS sensor of claim 15, wherein the third flexible element system comprises a folded spring.

18. The MEMS sensor of claim 17, wherein the third flexible element system comprises the folded spring and a straight beam.

19. The MEMS sensor of claim 15, wherein the first flexible element system, the second flexible element system, and the third flexible element system have unequal compliances.

20. The MEMS sensor of claim 13, wherein the first transducer is configured to sense motion of another portion of the at least one first proof mass in the direction orthogonal to the first direction, and wherein the second transducer is configured to sense motion of another portion of the at least one second proof mass in the direction orthogonal to the first direction.

21. The MEMS sensor of claim 6, wherein the at least one transducer is configured to detect motion of at least a portion of the at least one traveling mass in response to angular velocity applied to the MEMS sensor orthogonal to the first direction.

22. The MEMS sensor of claim 6, wherein the at least one transducer is configured to detect motion of at least a portion of the at least one proof mass in response to angular velocity applied to the MEMS sensor about an axis orthogonal to the first direction.