Inertial sensor
First Claim
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1. An inertial sensor comprising:
- a mass body which is displaceable in a first direction,wherein the mass body includesa first movable portion;
a second movable portion which is electrically isolated from the first movable portion; and
a mechanical coupling portion that mechanically connects the first movable portion and the second movable portion,wherein the inertial sensor includesa first fixed electrode which is disposed so as to be opposite to the first movable portion,a second fixed electrode which is disposed so as to be opposite to the first movable portion,a third fixed electrode which is disposed so as to be opposite to the second movable portion, anda fourth fixed electrode which is disposed so as to be opposite to the second movable portion,wherein a first capacitor is formed by the first movable portion and the first fixed electrode, a second capacitor is formed by the first movable portion and the second fixed electrode, a third capacitor is formed by the second movable portion and the third fixed electrode, and a fourth capacitor is formed by the second movable portion and the fourth fixed electrode,wherein when the mass body is displaced in the first direction, capacitance of one capacitor out of the first capacitor and the second capacitor increases, whereas capacitance of the other capacitor decreases, and capacitance of one capacitor out of the third capacitor and the fourth capacitor increases, whereas capacitance of the other capacitor decreases, andwherein one of a left side and a right side of the first movable portion has a plurality of etched cutout portions in one of two conductive layers which constitute said first movable portion, such that a mass of the first movable portion on the left side and a mass of the first movable portion on the right side are different from each other.
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Abstract
A low-noise and high-sensitivity inertial sensor is provided.
On the assumption that a movable portion VU1 and a movable portion VU2 are formed in the same SOI layer, the movable portion VU1 and the movable portion VU2 are mechanically connected to each other by a mechanical coupling portion MCU even while these movable portions are electrically isolated from each other. Thereby, according to a sensor element SE in the invention, it is possible to further suppress a shift between the capacitance of a MEMS capacitor 1 and the capacitance of a MEMS capacitor 2.
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Citations
5 Claims
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1. An inertial sensor comprising:
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a mass body which is displaceable in a first direction, wherein the mass body includes a first movable portion; a second movable portion which is electrically isolated from the first movable portion; and a mechanical coupling portion that mechanically connects the first movable portion and the second movable portion, wherein the inertial sensor includes a first fixed electrode which is disposed so as to be opposite to the first movable portion, a second fixed electrode which is disposed so as to be opposite to the first movable portion, a third fixed electrode which is disposed so as to be opposite to the second movable portion, and a fourth fixed electrode which is disposed so as to be opposite to the second movable portion, wherein a first capacitor is formed by the first movable portion and the first fixed electrode, a second capacitor is formed by the first movable portion and the second fixed electrode, a third capacitor is formed by the second movable portion and the third fixed electrode, and a fourth capacitor is formed by the second movable portion and the fourth fixed electrode, wherein when the mass body is displaced in the first direction, capacitance of one capacitor out of the first capacitor and the second capacitor increases, whereas capacitance of the other capacitor decreases, and capacitance of one capacitor out of the third capacitor and the fourth capacitor increases, whereas capacitance of the other capacitor decreases, and wherein one of a left side and a right side of the first movable portion has a plurality of etched cutout portions in one of two conductive layers which constitute said first movable portion, such that a mass of the first movable portion on the left side and a mass of the first movable portion on the right side are different from each other. - View Dependent Claims (2, 3, 4, 5)
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Specification