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Acceleration sensor

  • US 9,964,561 B2
  • Filed: 07/30/2015
  • Issued: 05/08/2018
  • Est. Priority Date: 02/13/2013
  • Status: Active Grant
First Claim
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1. An acceleration sensor comprising:

  • a first weight;

    a second weight symmetrical to the first weight about a plane;

    a support arranged between the first weight and the second weight;

    a first beam connecting the first weight and the support;

    a second beam symmetrical to the first beam about a plane and connecting the second weight and the support;

    a third beam connecting the first weight and the support;

    a fourth beam symmetrical to the third beam about a plane and connecting the second weight and the support; and

    a piezoresistive element disposed on at least one of the first beam and the third beam and a piezoresistive element disposed on at least one of the second beam and the fourth beam;

    whereinthe first weight includes a first projection projecting toward the support;

    the second weight includes a second projection projecting toward the support;

    the support includes a third projection situated away from a location that faces the first projection and projecting toward the first weight and a fourth projection situated away from a location that faces the second projection and projecting toward the second weight;

    the first beam includes a first end portion connected to the first projection and a second end portion connected to a portion of the support facing the first projection;

    the second beam includes a first end portion connected to the second projection and a second end portion connected to a portion of the support facing the second projection;

    the third beam includes a first end portion connected to the third projection and a second end portion connected to a portion of the first weight facing the third projection; and

    the fourth beam includes a first end portion connected to the fourth projection and a second end portion connected to a portion of the second weight facing the fourth projection.

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