Acceleration sensor

• US 9,964,561 B2
• Filed: 07/30/2015
• Issued: 05/08/2018
• Est. Priority Date: 02/13/2013
• Status: Active Grant

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Hamamura, Hiroshi
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): Hernandez-Prewit, Roger
• Application Number:
  US14/813,329
• Publication Number:
  US 20150331010A1
• Time in Patent Office: 1,013 Days
• Field of Search: 7351433
• CPC Class Codes: B81B 3/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes B81B5/00 takes precedence
• CPC Class Codes: G01P 15/12 by alteration of electrical resistance G01P15/0897, G01P15/105 take precedence
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: H01L 29/84 controllable by variation of applied mechanical force, e.g. of pressure

Abstract

An acceleration sensor includes weights, a support, and beams on which piezoresistive elements are disposed. The weights include projections and recesses. The support includes projections and recesses. The beams are connected to the projections and the recesses.

Claims

1. An acceleration sensor comprising:

a first weight;

a second weight symmetrical to the first weight about a plane;

a support arranged between the first weight and the second weight;

a first beam connecting the first weight and the support;

a second beam symmetrical to the first beam about a plane and connecting the second weight and the support;

a third beam connecting the first weight and the support;

a fourth beam symmetrical to the third beam about a plane and connecting the second weight and the support; and

a piezoresistive element disposed on at least one of the first beam and the third beam and a piezoresistive element disposed on at least one of the second beam and the fourth beam;

wherein

the first weight includes a first projection projecting toward the support;

the second weight includes a second projection projecting toward the support;

the support includes a third projection situated away from a location that faces the first projection and projecting toward the first weight and a fourth projection situated away from a location that faces the second projection and projecting toward the second weight;

the first beam includes a first end portion connected to the first projection and a second end portion connected to a portion of the support facing the first projection;

the second beam includes a first end portion connected to the second projection and a second end portion connected to a portion of the support facing the second projection;

the third beam includes a first end portion connected to the third projection and a second end portion connected to a portion of the first weight facing the third projection; and

the fourth beam includes a first end portion connected to the fourth projection and a second end portion connected to a portion of the second weight facing the fourth projection.

2. The acceleration sensor according to claim 1, wherein

a tip of the first projection is positioned on a side where the first weight is disposed with respect to a tip of the third projection;

and

a tip of the second projection is positioned on a side where the second weight is disposed with respect to a tip of the fourth projection.

3. The acceleration sensor according to claim 1, wherein

a tip of the first projection is positioned on a side where the support is disposed with respect to a tip of the third projection;

and

a tip of the second projection is positioned on a side where the support is disposed with respect to a tip of the fourth projection.

4. The acceleration sensor according to claim 1, wherein the support extends along a direction that faces the weight and along a direction perpendicular or substantially perpendicular to a direction in which the plurality of beams are arranged, and the support is fixed on an external structure at only one end portion of both end portions in the extending directions as a fixed end.

5. The acceleration sensor according to claim 4, wherein a size of the support in a cross section perpendicular or substantially perpendicular to the direction in which the support extends is locally reduced in a vicinity of the fixed end.

6. The acceleration sensor according to claim 1, wherein the acceleration sensor is configured to detect accelerations in two axial directions.

7. The acceleration sensor according to claim 1, wherein the acceleration sensor is a micro-electro-mechanical systems piezoresistive acceleration sensor that is micromachined on a silicon on insulator substrate.

8. The acceleration sensor according to claim 1, wherein the first weight and the second weight are symmetrical about a plane.

9. The acceleration sensor according to claim 1, wherein each of the first weight and the second weight has an oblong or substantially oblong shape with short sides parallel to one axis and long sides parallel or substantially parallel to another axis as seen in a plane.

10. The acceleration sensor according to claim 1, wherein the support has an H shape in which a center of a surface that faces the first weight is recessed in a direction opposite to the first weight and a center of a surface that faces the second weight is recessed in a direction opposite to the second weight.