Acceleration sensor
First Claim
Patent Images
1. An acceleration sensor comprising:
- a first weight;
a second weight symmetrical to the first weight about a plane;
a support arranged between the first weight and the second weight;
a first beam connecting the first weight and the support;
a second beam symmetrical to the first beam about a plane and connecting the second weight and the support;
a third beam connecting the first weight and the support;
a fourth beam symmetrical to the third beam about a plane and connecting the second weight and the support; and
a piezoresistive element disposed on at least one of the first beam and the third beam and a piezoresistive element disposed on at least one of the second beam and the fourth beam;
whereinthe first weight includes a first projection projecting toward the support;
the second weight includes a second projection projecting toward the support;
the support includes a third projection situated away from a location that faces the first projection and projecting toward the first weight and a fourth projection situated away from a location that faces the second projection and projecting toward the second weight;
the first beam includes a first end portion connected to the first projection and a second end portion connected to a portion of the support facing the first projection;
the second beam includes a first end portion connected to the second projection and a second end portion connected to a portion of the support facing the second projection;
the third beam includes a first end portion connected to the third projection and a second end portion connected to a portion of the first weight facing the third projection; and
the fourth beam includes a first end portion connected to the fourth projection and a second end portion connected to a portion of the second weight facing the fourth projection.
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Accused Products
Abstract
An acceleration sensor includes weights, a support, and beams on which piezoresistive elements are disposed. The weights include projections and recesses. The support includes projections and recesses. The beams are connected to the projections and the recesses.
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Citations
10 Claims
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1. An acceleration sensor comprising:
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a first weight; a second weight symmetrical to the first weight about a plane; a support arranged between the first weight and the second weight; a first beam connecting the first weight and the support; a second beam symmetrical to the first beam about a plane and connecting the second weight and the support; a third beam connecting the first weight and the support; a fourth beam symmetrical to the third beam about a plane and connecting the second weight and the support; and a piezoresistive element disposed on at least one of the first beam and the third beam and a piezoresistive element disposed on at least one of the second beam and the fourth beam;
whereinthe first weight includes a first projection projecting toward the support; the second weight includes a second projection projecting toward the support; the support includes a third projection situated away from a location that faces the first projection and projecting toward the first weight and a fourth projection situated away from a location that faces the second projection and projecting toward the second weight; the first beam includes a first end portion connected to the first projection and a second end portion connected to a portion of the support facing the first projection; the second beam includes a first end portion connected to the second projection and a second end portion connected to a portion of the support facing the second projection; the third beam includes a first end portion connected to the third projection and a second end portion connected to a portion of the first weight facing the third projection; and the fourth beam includes a first end portion connected to the fourth projection and a second end portion connected to a portion of the second weight facing the fourth projection. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification