Generating simulated images from design information
First Claim
1. A system configured to generate simulated images from design information, comprising:
- one or more computer subsystems; and
one or more components executed by the one or more computer subsystems, wherein the one or more components comprise;
a generative model, wherein the generative model comprises;
two or more encoder layers configured for determining features of design information for a specimen; and
two or more decoder layers configured for generating one or more simulated images from the determined features, wherein the one or more simulated images illustrate how the design information formed on the specimen appears in one or more actual images of the specimen generated by an imaging system.
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Abstract
Methods and systems for generating simulated images from design information are provided. One system includes one or more computer subsystems and one or more components executed by the computer subsystem(s), which include a generative model. The generative model includes two or more encoder layers configured for determining features of design information for a specimen. The generative model also includes two or more decoder layers configured for generating one or more simulated images from the determined features. The simulated image(s) illustrate how the design information formed on the specimen appears in one or more actual images of the specimen generated by an imaging system.
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Citations
43 Claims
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1. A system configured to generate simulated images from design information, comprising:
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one or more computer subsystems; and one or more components executed by the one or more computer subsystems, wherein the one or more components comprise; a generative model, wherein the generative model comprises; two or more encoder layers configured for determining features of design information for a specimen; and two or more decoder layers configured for generating one or more simulated images from the determined features, wherein the one or more simulated images illustrate how the design information formed on the specimen appears in one or more actual images of the specimen generated by an imaging system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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41. A system configured to generate simulated images from design information, comprising:
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one or more computer subsystems; one or more components executed by the one or more computer subsystems, wherein the one or more components comprise; a generative model, wherein the generative model comprises; two or more encoder layers configured for determining features of design information for a specimen; and two or more decoder layers configured for generating one or more simulated images from the determined features, wherein the one or more simulated images illustrate how the design information formed on the specimen appears in one or more actual images of the specimen; and an imaging subsystem configured to generate the one or more actual images of the specimen, wherein the one or more computer subsystems are configured to acquire the one or more actual images and the one or more simulated images and to perform one or more functions for the specimen based on the one or more actual images and the one or more simulated images.
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42. A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for generating simulated images from design information, wherein the computer-implemented method comprises:
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determining features of design information for a specimen by inputting the design information to two or more encoder layers of a generative model; and generating one or more simulated images by inputting the determined features to two or more decoder layers of the generative model, wherein the one or more simulated images illustrate how the design information formed on the specimen appears in one or more actual images of the specimen generated by an imaging system.
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43. A computer-implemented method for generating simulated images from design information, comprising:
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determining features of design information for a specimen by inputting the design information to two or more encoder layers of a generative model; and generating one or more simulated images by inputting the determined features to two or more decoder layers of the generative model, wherein the one or more simulated images illustrate how the design information formed on the specimen appears in one or more actual images of the specimen generated by an imaging system, and wherein said determining and said generating are performed with one or more computer systems.
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Specification