Position detection apparatus, substrate processing apparatus, position detection method and substrate processing method

• US 9,975,247 B2
• Filed: 07/08/2015
• Issued: 05/22/2018
• Est. Priority Date: 09/26/2014
• Status: Active Grant

• Current Assignee: SCREEN Holdings Co., Ltd.
• Original Assignee: SCREEN Holdings Co., Ltd.
• Inventors: Okita, Yuji, Kakuma, Hiroaki, Sano, Hiroshi
• Primary Examiner(s): Patel, Jayesh A
• Application Number:
  US14/793,794
• Publication Number:
  US 20160091892A1
• Time in Patent Office: 1,049 Days
• Field of Search: None
• CPC Class Codes: B25J 9/1674 characterised by safety, monitoring, diagnostic
• CPC Class Codes: G05B 2219/40611 Camera to monitor endpoint, end effector position
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G06T 2207/30164 Workpiece; Machine component
• CPC Class Codes: G06T 7/74 involving reference images or patches

Abstract

A position detection apparatus detects the positions of movable parts 33, 43, 53 which are movable within processing space SP inside a chamber 90. An imaging device 72 shoots reference sections 61-64, which are disposed inside the chamber 90 and the positions of which are known, and the movable parts and accordingly obtains an original image. An image processor 86 executes image processing which is for detecting the movable parts and the reference sections from the original image. An image detector 86 detects the positions of the movable parts within the processing space in accordance with position information which is indicative of the positions of the movable parts and the reference sections within the original image. It is possible to accurately detect the positions of the movable parts while suppressing the influence exerted by deviation of the imaging device.

Claims

1. A position detection apparatus which detects a position of a movable part which is so disposed to move within processing space inside a chamber, comprising:

an imaging device which shoots a reference section and the movable part, thereby obtaining an original image, the reference section being disposed inside the chamber and a position of which inside the chamber being known;

an image processor which performs image processing of the original image, thereby detecting the movable part and the reference section within the original image; and

the image processor further detects the position of the movable part within the processing space based upon position information which is indicative of positions of the movable part and the reference section detected within the original image,

wherein the position information concerning the reference section is information which is indicative of a relative position relative to the position of the reference section within a reference image which corresponds to the original image, wherein the reference image contains the reference section as it is when the imaging device is set to an appropriate position.

2. The position detection apparatus of claim 1, wherein the image processor detects the movable part within a corrected image which is obtained by correcting the original image which contains the movable part in accordance with the position information concerning the reference section.

3. The position detection apparatus of claim 1, wherein the image processor detects the movable part within a partial area of the original image containing the movable part which is specified by the position information concerning the reference section.

4. The position detection apparatus of claim 1, wherein the image processor corrects the position information concerning the movable part based upon the position information concerning the reference section, thereby detecting the position of the movable part within the processing space.

5. The position detection apparatus of claim 1, wherein the position detector image processor detects a relative position of the movable part relative to the position of the movable part within a reference image as it is when the imaging device and the movable part are set to appropriate positions.

6. The position detection apparatus of claim 1, wherein an alignment mark which serves as the reference section is disposed inside the chamber.

7. The position detection apparatus of claim 1, comprising an illuminator which makes illumination light impinge upon the reference section, wherein the imaging device is disposed at such a position which receives reflected light or transmitted light of the illumination light which is created by the reference section.

8. The position detection apparatus of claim 7, wherein the imaging device is disposed at such a position which receives the reflected light of the illumination light which is created by the reference section, and the reference section is made partially of a retroreflective material.

9. The position detection apparatus of claim 1, wherein the position information concerning the reference section contains at least one of information which is indicative of coordinates of the reference section within the original image, information which is indicative of an amount of inclination of the reference section within the original image and information which is indicative of a size of the reference section within the original image.

10. A substrate processing apparatus, comprising:

a chamber which has a processing space inside;

a holder which holds a substrate to be processed inside the chamber;

a processing device which is so structured to be able to move inside the chamber and which performs predetermined processing of the substrate; and

a position detector which comprises the position detection apparatus of claim 1, the position detection apparatus detecting a position of the processing device, which is regarded as the movable part, inside the chamber.

11. The substrate processing apparatus of claim 10, comprising a controller which prohibits the processing device from performing the processing of the substrate when the position of the processing device detected by the position detector is not within a predetermined appropriate range to prevent inappropriate processing of the substrate.

12. The substrate processing apparatus of claim 11, wherein the controller prohibits the processing device from performing the processing of the substrate when the position of the reference section detected within the original image is not within a predetermined appropriate range to prevent inappropriate processing of the substrate.

13. The substrate processing apparatus of claim 10, comprising a memory which stores the position information concerning the reference section within the reference image which corresponds to the original image as it is when the imaging device is set to an appropriate position.

14. A position detection method of detecting a position of a movable part which is movable within processing space inside a chamber, comprising:

an imaging step of shooting a reference section and the movable part, thereby obtaining an original image, the reference section being disposed inside the chamber in advance;

an image processing step of executing image processing for detecting the movable part and the reference section from the original image; and

a position detecting step of detecting the position of the movable part within the processing space based upon position information which is indicative of positions of the movable part and the reference section detected within the original image,

wherein the position information concerning the reference section is information which is indicative of a relative position relative to the position of the reference section within a reference image which corresponds to the original image, wherein the reference image contains the reference section as it is when the imaging device is set to an appropriate position.

15. The position detection method of claim 14, wherein at the image processing step, the original image containing the movable part is corrected based upon the position information concerning the reference section and the movable part is detected within the corrected image.

16. The position detection method of claim 14, wherein at the image processing step, the movable part is detected within a partial area of the original image containing the movable part which is specified in accordance with the position information concerning the reference section.

17. The position detection method of claim 14, wherein at the position detecting step, the position information concerning the movable part is corrected in accordance with the position information concerning the reference section, thereby detecting the position of the movable part within the processing space.

18. The position detection method of claim 14, wherein the position information concerning the reference section contains at least one of information which is indicative of coordinates of the reference section within the original image, information which is indicative of an amount of inclination of the reference section within the original image and information which is indicative of a size of the reference section within the original image.

19. A substrate processing method, comprising the steps of:

holding a substrate to be processed within processing space inside a chamber and setting a processing device which is so structured to be able to move inside the chamber, to a predetermined position;

executing the position detection method of claim 14, detecting the position of the processing device inside the chamber while regarding the processing device as the movable part, and verifying the position of the processing device; and

performing predetermined processing of the substrate using the processing device.

20. The substrate processing method of claim 19, wherein the processing device stops processing when an amount of deviation of the processing device from the predetermined position is beyond a set amount.