Force detecting device, robot, electronic component conveying apparatus

• US 9,975,250 B2
• Filed: 06/23/2017
• Issued: 05/22/2018
• Est. Priority Date: 11/05/2013
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Kamiya, Toshiyuki, Kawai, Hiroki
• Primary Examiner(s): DUNLAP, JONATHAN M
• Application Number:
  US15/631,511
• Publication Number:
  US 20170282377A1
• Time in Patent Office: 333 Days
• Field of Search: 73862041-862046, 7386268, 73767, 73777, 73862625, 901 46, 901 27
• CPC Class Codes: B25J 13/085 Force or torque sensors B25J13/082, B25J13/084 take precedence
• CPC Class Codes: B25J 9/1633 compliant, force, torque control, e.g. combined with position control
• CPC Class Codes: B25J 9/1694 characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
• CPC Class Codes: G01L 1/16 using properties of piezoelectric devices
• CPC Class Codes: G01L 1/18 using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
• CPC Class Codes: G01L 5/00 Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
• CPC Class Codes: G01L 5/009 Force sensors associated with material gripping devices
• CPC Class Codes: G01L 5/167 using piezoelectric means
• CPC Class Codes: G01L 5/226 to manipulators, e.g. the force due to gripping
• CPC Class Codes: G01P 15/09 by piezoelectric pick-up
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: H02N 2/0095 producing combined linear and rotary motion, e.g. multi-direction positioners
• CPC Class Codes: H10N 30/302 Sensors
• CPC Class Codes: H10N 30/50 having a stacked or multilayer structure
• CPC Class Codes: H10N 30/802 Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
• CPC Class Codes: Y10S 901/46 Sensing device

Abstract

A force detecting device includes a first base section, a second base section, and a charge output element arranged between the first base section and the second base section. The charge output element includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate. The boards are laminated in a direction orthogonal to the normal an attachment surface of the second base section. The force detecting device detects an external force on the basis of a first output corresponding to a shearing force in a first detection direction orthogonal to the laminating direction of the first board and a second output corresponding to a shearing force in a second detection direction orthogonal to the laminating direction of the second board and crossing the first detection direction.

Claims

1. A force detecting device comprising:

a first base section;

a second base section; and

a plurality of sensor devices sandwiched by the first base section and the second base section and configured to detect external forces applied to the first base section and the second base section, wherein

the sensor device includes a piezoelectric element and a package housing the piezoelectric element,

the first base section includes a first attachment surface fixed to a first portion of a measurement target and the second base section includes a second attachment surface fixed to a second portion of the measurement target,

each of the plurality of sensor devices is set such that a laminating direction of a first board and a second board of the piezoelectric element is direction different from a normal of the first attachment surface or the second attachment surface, and

the plurality of the sensor devices include the piezoelectric elements not arranged on the same plane and not arranged in parallel to each other.

2. The force detecting device according to claim 1, wherein

the package includes a first member and a second member joined to the first member,

the first member includes a recess in which the piezoelectric element is set, and

the recess is sealed by the second member.

3. The force detecting device according to claim 2, wherein

the first member includes ceramics.

4. A robot comprising:

an arm; and

the force detecting device according to claim 3 connected to the arm.

5. A robot comprising:

an arm; and

the force detecting device according to claim 2 connected to the arm.

6. The force detecting device according to claim 1, wherein

the piezoelectric element detects external forces in three directions in total including orthogonally in two directions in planes of the first board and the second board and one direction orthogonal to the two directions.

7. A robot comprising:

an arm; and

the force detecting device according to claim 6 connected to the arm.

8. The force detecting device according to claim 1, further comprising:

a plurality of pressurizing screws provided around the sensor device and configured to apply pressurization to the piezoelectric element via the sensor device, and

a pressurization direction of each of the plurality of pressurizing screws is a direction parallel to the laminating direction of the first board and second board.

9. A robot comprising:

an arm; and

the force detecting device according to claim 8 connected to the arm.

10. The force detecting device according to claim 1, wherein

the laminating direction is orthogonal to the normal of the first attachment surface or the second attachment surface.

11. A robot comprising:

an arm; and

the force detecting device according to claim 10 connected to the arm.

12. The force detecting device according to claim 1, wherein

the piezoelectric element includes quartz.

13. A robot comprising:

an arm; and

the force detecting device according to claim 12 connected to the arm.

14. The force detecting device according to claim 1, wherein

at least one base section of the first base section and the second base section is formed in a tabular shape, and

in the piezoelectric element, the first board and the second board are arranged perpendicularly to the one base section.

15. A robot comprising:

an arm; and

the force detecting device according to claim 14 connected to the arm.

16. The force detecting device according to claim 1, wherein

at least one base section of the first base section and the second base section is formed in a tabular shape, and

a quartet or more of the sensor devices are respectively arranged in positions apart from a center section of the one base section when viewed from the attachment surface on which the one base section is fixed to the measurement target.

17. A robot comprising:

an arm; and

the force detecting device according to claim 16 connected to the arm.

18. A robot comprising:

an arm; and

the force detecting device according to claim 1 connected to the arm.