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Force detecting device, robot, electronic component conveying apparatus

  • US 9,975,250 B2
  • Filed: 06/23/2017
  • Issued: 05/22/2018
  • Est. Priority Date: 11/05/2013
  • Status: Active Grant
First Claim
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1. A force detecting device comprising:

  • a first base section;

    a second base section; and

    a plurality of sensor devices sandwiched by the first base section and the second base section and configured to detect external forces applied to the first base section and the second base section, whereinthe sensor device includes a piezoelectric element and a package housing the piezoelectric element,the first base section includes a first attachment surface fixed to a first portion of a measurement target and the second base section includes a second attachment surface fixed to a second portion of the measurement target,each of the plurality of sensor devices is set such that a laminating direction of a first board and a second board of the piezoelectric element is direction different from a normal of the first attachment surface or the second attachment surface, andthe plurality of the sensor devices include the piezoelectric elements not arranged on the same plane and not arranged in parallel to each other.

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