×

Ion beam extraction apparatus and method of use thereof

  • US 9,981,147 B2
  • Filed: 08/04/2016
  • Issued: 05/29/2018
  • Est. Priority Date: 05/22/2008
  • Status: Active Grant
First Claim
Patent Images

1. A method for extracting ions, comprising the steps of:

  • providing ions with an ion source, said ion source comprising;

    an electron resonance cyclotron ion source, said electron resonance cyclotron generating the ions, the ions comprising at least one of;

    cations; and

    anions;

    providing a triode extraction system, comprising;

    said ion source maintained at a first potential;

    an extraction electrode maintained at a third potential differing from said first potential; and

    a gating electrode positioned between said ion source and said extraction electrode;

    alternatingly (1) suppressing extraction of the ions from said ion source and (2) extracting a set of ions from said ion source through changing a second potential of said gating electrode from proximate the first potential to a value between the first potential and the third potential, said step of alternatingly (1) suppressing extraction of the ions from said ion source and (2) extracting a set of ions from said ion source further comprising the step of;

    intermittently oscillating the second potential from +30±

    10 kV to 0±

    5 kV.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×