×

Systems and methods for substrate lamination

  • US 9,981,460 B1
  • Filed: 05/06/2014
  • Issued: 05/29/2018
  • Est. Priority Date: 05/06/2014
  • Status: Active Grant
First Claim
Patent Images

1. A lamination system for laminating substrates to form a laminated assembly, comprising:

  • a lamination device including an upper member defining an upper cavity, a flexible membrane, and a lower member defining a lower cavity, the lower cavity configured to receive at least a first substrate and a second substrate;

    a pressurization system in communication with the upper cavity and the lower cavity; and

    a control unit coupled to the lamination device and the pressurization system, the control unit configured to control operation of the lamination device and the pressurization system, wherein the control unit comprises a processing circuit programmed to;

    control the pressurization system to generate a vacuum environment within the lower cavity;

    thencontrol at least one substrate support of the lamination device to move the substrate support from a first position, where the substrate support is configured to support the first substrate separated from the second substrate, to a second position, where the substrate support is configured to enable contact between the first substrate and the second substrate, to bring the first substrate into contact with the second substrate;

    control the pressurization system to pressurize the upper cavity to a first pressure to move the flexible membrane toward the lower member and into contact with the first substrate;

    control the pressurization system to depressurize the upper cavity and to move the flexible membrane toward the upper member and out of contact with the first substrate; and

    control the pressurization system to pressurize the lower cavity to a second pressure higher than the first pressure to apply air pressure at the second pressure to the first and second substrates and form a laminated assembly.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×