Metal oxide-polymer composite particles for chemical mechanical planarization
First Claim
Patent Images
1. A process for removing material from a substrate through chemical and abrasive actions, the process comprising:
- removing material from a substrate with a polishing pad or slurry composition, wherein the polishing pad, or the slurry composition, or both include metal oxide-polymer composite particles that comprise a plurality of metal oxide particles and a polymer core, to produce a processed surface, wherein;
the metal oxide particles are modified with a bifunctional modifying agent via which the metal oxide particles are covalently attached to the polymer in the polymer core, andat least a portion of the metal oxide particles are partially embedded within the polymer core and project out from the polymer core.
1 Assignment
0 Petitions
Accused Products
Abstract
CMP processes, tools and slurries utilize metal oxide-polymer composite particles that include metal oxide particles and a polymer core. The metal oxide particles are modified with a modifying agent and are partially or fully embedded within the polymer core. Using these processes, tools and slurries can enhance removal rates, reduce defectivity and increase cleanability with respect to comparable systems and substrates.
64 Citations
23 Claims
-
1. A process for removing material from a substrate through chemical and abrasive actions, the process comprising:
-
removing material from a substrate with a polishing pad or slurry composition, wherein the polishing pad, or the slurry composition, or both include metal oxide-polymer composite particles that comprise a plurality of metal oxide particles and a polymer core, to produce a processed surface, wherein; the metal oxide particles are modified with a bifunctional modifying agent via which the metal oxide particles are covalently attached to the polymer in the polymer core, and at least a portion of the metal oxide particles are partially embedded within the polymer core and project out from the polymer core. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A CMP slurry composition comprising metal oxide-polymer composite particles dispersed in an aqueous media, the metal oxide-polymer composite particles including a plurality of metal oxide particles and a polymer core, wherein:
-
the metal oxide particles are modified with a bifunctional modifying agent via which the metal oxide particles are covalently attached to the polymer in the polymer core, and at least a portion of the metal oxide particles are partially embedded within the polymer core and project out from the polymer core. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 22)
-
-
17. A CMP polishing pad comprising metal oxide-polymer composite particles that include a plurality of metal oxide particles and a polymer core, wherein:
-
the metal oxide particles are modified with a bifunctional modifying agent, and at least a portion of the metal oxide particles are partially embedded within the polymer core and project out from the polymer core. - View Dependent Claims (18, 19, 23)
-
-
20. A metal oxide-polymer composite particle comprising:
-
a plurality of metal oxide particles; a polymer core, the metal oxide particles being modified with a modifying agent via which the metal oxide particles are covalently attached to the polymer in the polymer core; and one or more ingredients selected from the group consisting of a CMP chemical etchant, a CMP processing accelerator, and a CMP passivating agent, wherein at least a portion of the metal oxide particles are partially embedded within the polymer core and project out from the polymer core. - View Dependent Claims (21)
-
Specification