Fabrication of high efficiency, high quality, large area diffractive waveplates and arrays

• US 9,983,479 B2
• Filed: 10/08/2013
• Issued: 05/29/2018
• Est. Priority Date: 04/21/2010
• Status: Active Grant

• Current Assignee: Beam Engineering For Advanced Measurements Co.
• Original Assignee: Beam Engineering For Advanced Measurements Co., The United States Of America As Represented By The Secretary Of The Army
• Inventors: Tabirian, Nelson V., Nersisyan, Sarik R., Kimball, Brian R., Steeves, Diane M.
• Primary Examiner(s): Chwasz, Jade R
• Assistant Examiner(s): DABBI, JYOTSNA V
• Application Number:
  US14/048,557
• Publication Number:
  US 20140092373A1
• Time in Patent Office: 1,694 Days
• Field of Search: 355 71, 355 77, 35948501, 35948503, 35948505, 35948601, 35948602, 35948603, 35948701, 35948702, 35948703, 35948704, 35948705, 35948706, 35948901, 35948907, 35948915, 35948916, 359 10
• CPC Class Codes: G02B 5/3083 Birefringent or phase retarding elements G02B5/3008, G02B5/3016 take precedence; systems for polarisation control G02B27/286; manufacturing phase modulating patterns by lithographic processes G03F7/001
• CPC Class Codes: G02B 5/32 Holograms used as optical elements
• CPC Class Codes: G03F 7/20 Exposure; Apparatus therefor photographic printing apparatus for making copies G03B27/00
• CPC Class Codes: G03H 2001/0439 for recording Holographic Optical Element [HOE] HOE per se G02B5/32
• CPC Class Codes: G03H 2260/51 Photoanisotropic reactivity wherein polarized light induces material birefringence, e.g. azo-dye doped polymer

Abstract

An apparatus and method for fabricating high quality one- or two-dimensional diffractive waveplates and arrays that exhibit high diffraction efficiency and capable of inexpensive large volume production. A generally non-holographic and aperiodic polarization converter for converting the polarization of a coherent input light beam of a visible wavelength into a pattern of continuous spatial modulation at the output of the polarization converter. A photoresponsive material characterized by an anisotropy axis according to polarization of the light beam is exposed to a polarization modulation pattern and coated subsequently with an anisotropic material overlayer with ability of producing an optical axis orientation according to and under the influence of the anisotropy axis of the photoresponsive material layer. The diffractive waveplates are obtained when exposure time of photoresponsive material layer exceeds an order of magnitude the time period that is known to produce spatially homogeneous orientation of the anisotropic overlayer.

Claims

1. An apparatus for non-holographically producing spatially continuous orientation modulation of an anisotropy axis of a photoresponsive material layer, comprising:

(a) a device configured to output a polarized coherent light beam having a wavelength in a UV-visible part of spectrum;

(b) a diffractive waveplate polarization converter transforming polarization of said light beam into a linear polarization state with a spatially continuous modulation pattern to provide a continually modulated polarization suitable for printing diffractive waveplate structure with high spatial resolution with smallest modulation feature sizes that would be comparable to or longer than the wavelength of the polarized coherent light beam;

(c) a photoresponsive material having thickness as a small fraction of wavelength of said light beam, an absorption spectrum comprising at least part of UV-visible wavelengths and an anisotropy axis formed or aligned according to polarization of said light beam;

(d) said photoresponsive material layer deposited on a substrate for exposure of at least a portion of said photoresponsive material layer to said light beam at the output of said diffractive waveplate polarization converter.

2. The apparatus as in claim 1 wherein the wavelength of said light beam is of a visible wavelength.

3. The apparatus as in claim 1 wherein

(a) said light beam is circularly polarized, and

(b) said diffractive waveplate polarization converter is a diffractive waveplate meeting quarter wave phase retardation condition for the wavelength of said light beam.

4. The apparatus as in claim 1 wherein

(a) said light beam is linearly polarized, and

(b) said polarization converter is a diffractive waveplate meeting half-wave phase retardation condition for the wavelength of said light beam.

5. The apparatus as in claim 1 wherein said diffractive waveplate polarization converter provides polarization modulation in more than one spatial dimension.

6. The apparatus as in claim 1 wherein said diffractive waveplate polarization converter provides polarization modulation that cannot be characterized with a single spatial period.

7. The apparatus as in claim 1 wherein said diffractive waveplate polarization converter is fabricated by non-holographic means including mechanical, electromagnetic, optical, chemical or a combination thereof.

8. The apparatus as in claim 1 wherein said diffractive waveplate polarization converter allows producing continuous patterns of linear polarization in a broad spectrum of wavelengths.

9. The apparatus as in claim 8 wherein

(a) said diffractive waveplate polarization converter is spectrally broadband;

(b) said photoresponsive material is photoresponsive within at least part of the spectral range of said diffractive waveplates; and

(c) the light beam comprises more than one wavelength within the spectral range of photoresponsivity of said photoresponsive material.

10. The apparatus of claim 1 wherein said diffractive waveplate polarization converter comprises more than one cycloidal diffractive waveplates combined to produce polarization modulation pattern at different spatial periods by varying the angle between the axes of said diffractive waveplates.

11. The apparatus of claim 1 further comprising optical means for projecting said polarization modulation pattern of said light beam onto at least a part of the area of said photoresponsive material layer, said projection generally changing the size, shape and topography of said polarization modulation pattern obtained at the output of said diffractive waveplate polarization converter.

12. The apparatus of claim 1 further comprising at least one substrate for controlling at least one of mechanical shape and stability, thermal conductivity, thickness homogeneity, radiation resistance, and resistance to adverse ambient conditions.

13. An apparatus for non-holographically producing spatially continuous orientation modulation of an anisotropy axis of a photoresponsive material layer, the apparatus comprising:

(a) a device configured to output a linearly polarized coherent light beam having a wavelength in UV-visible part of electromagnetic spectrum;

(b) a diffractive wave plate polarization converter continuously modulating the polarization of said light beam along at least a single axis to provide a continually modulated polarization suitable for printing diffractive waveplate structure with high spatial resolution pattern with smallest features that would be comparable to or longer than the wavelength of said linearly polarized coherent light beam not achievable in pixilated systems;

(c) a photoresponsive material having thickness as a small fraction of wavelength of said light beam, having an absorption spectrum comprising at least part of visible wavelengths, and an anisotropy axis that is formed or aligned according to polarization of said light beam;

(d) depositing said layer of photoresponsive material onto a substrate for holding and positioning a layer of said photoresponsive material;

(e) positioning and projecting said polarization modulation pattern of said light beam onto a part of the area of said photoresponsive material layer;

(f) exposing different areas of said photoresponsive material layer to said polarization modulation pattern while maintaining continuity of the pattern projected on said photoresponsive material layer.

14. The apparatus of claim 13 wherein holding and positioning the layer of said photoresponsive material include at least one of the following:

a glass substrate;

a polymer substrate, a drum, a translation stage, and a rotation stage.

15. The apparatus as in claim 14 wherein the exposing different areas of said photoresponsive material layer to said polarization modulation pattern includes at least one of the mechanical motions, translation in the direction perpendicular to the polarization modulation axis, and rotation.

16. A method for non-holographically producing spatially continuous orientation modulation of an anisotropy axis of a photoresponsive material layer at a predetermined spatial period, the method comprising the steps of:

(a) producing a linear polarized coherent light beam to provide a continually modulated polarization suitable for printing diffractive waveplate structure with high spatial resolution with smallest features comparable to or longer than the wavelength of said linear polarized coherent light beam;

(b) propagating said light beam through a diffractive waveplate, the diffractive waveplate having optical axis modulation period twice larger compared to said predetermined spatial period; and

(c) exposing a photoresponsive material layer to said light beam propagated through said diffractive waveplate, the photoresponsive material having the ability of producing an anisotropy axis modulated according to the polarization of said light beam.

17. The method of claim 16 further comprising at least one anisotropic material overlayer with a thickness at least twice smaller than a smallest feature size of orientation modulation pattern of the anisotropy axis of a photoresponsive material layer, wherein the optical axis in the volume of said overlayer has the ability of according to and under the influence of the anisotropy axis modulation pattern of the photoresponsive material layer.

18. A method as in claim 17 for fabricating high quality diffractive waveplates providing diffraction efficiency greater than 95% over an area of greater than 1 inch in diameter, and scattering losses less than 1% comprising:

exposing said photoresponsive material layer to said polarization modulation pattern for receiving exposure energy density exceeding at least 5 times the exposure energy density sufficient for producing waveplates with spatially homogeneous orientation of optical axis orientation of said anisotropic material overlayer.

19. The method of claim 17 wherein said optical axis modulation of at least one of said anisotropic material overlayers is continuously modulated within said overlayer in the direction perpendicular to the modulation plane of the anisotropy axis of said photoresponsive material layer.