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Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods

  • US 9,987,661 B2
  • Filed: 12/02/2015
  • Issued: 06/05/2018
  • Est. Priority Date: 12/02/2015
  • Status: Active Grant
First Claim
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1. An ultrasound device, comprising:

  • a substrate;

    a plurality of ultrasonic transducers integrated with the substrate and including a first group of ultrasonic transducers and a second group of ultrasonic transducers; and

    a plurality of individually electrically controllable bias electrodes including;

    a first bias electrode corresponding to the first group of ultrasonic transducers and comprising a first common membrane of the first group of ultrasonic transducers; and

    a second bias electrode corresponding to the second group of ultrasonic transducers and comprising a second common membrane of the second group of ultrasonic transducers.

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