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Linear displacement measuring apparatus

  • US 9,989,345 B2
  • Filed: 09/28/2016
  • Issued: 06/05/2018
  • Est. Priority Date: 09/30/2015
  • Status: Active Grant
First Claim
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1. A linear displacement measuring apparatus comprising:

  • an elongate main scale mounted on one of two objects which linearly relatively move; and

    a slider mounted on the other of the two objects and configured to slide along the main scale and detect a relative displacement amount with respect to the main scale, whereinthe slider comprises;

    a traveling body configured to travel on the main scale along the main scale;

    a carriage part mounted on the other of the two objects;

    coupling means for coupling the traveling body with the carriage part, the coupling means allowing relative displacement between the traveling body and the carriage part and biasing the traveling body toward the main scale, andmisalignment detecting means for detecting that the relative displacement between the traveling body and the carriage part exceeds a prescribed allowable range.

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